Plasma Chemistries for High Density Plasma Etching of SiC
Journal Article
·
· Journal of Electronic Materials
A variety of different plasma chemistries, including SF6, Cl2, IC1 and IBr, have been examined for dry etching of 6H-SiC in high ion density plasma tools (Inductively Coupled Plasma and Electron Cyclotron Resonance). Rates up to 4,500~"min-1 were obtained for SF6 plasmas, while much lower rates (S800~.min-') were achieved with Cl2, ICl and IBr. The F2- based chemistries have poor selectivity for SiC over photoresist masks (typically 0.4-0.5), but Ni masks are more robust, and allow etch depths 210pm in the SiC. A micromachining process (sequential etch/deposition (<2,000Angstrom min-1) for SiC steps) designed for Si produces relatively low etch rates.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1941
- Report Number(s):
- SAND98-2513J; ON: DE00001941
- Journal Information:
- Journal of Electronic Materials, Journal Name: Journal of Electronic Materials
- Country of Publication:
- United States
- Language:
- English
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