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Title: Optimized Structural Designs for Stretchable Silicon Integrated Circuits

Journal Article · · Small
 [1];  [2];  [1];  [3];  [4];  [1];  [3];  [5];  [6];  [1]
  1. Univ. of Illinois at Urbana-Champaign, IL (United States)
  2. Institute of High Performance Computing, Connexis (Singapore)
  3. Northwestern Univ., Evanston, IL (United States)
  4. Univ. of Miami, Coral Gables, FL (United States)
  5. Tsinghua Univ., Beijing (China)
  6. Institute of High Performance Computing, Connexis (Singapore); National Univ. of Singapore (Singapore)

Here, materials and design strategies for stretchable silicon integrated circuits that use non-coplanar mesh layouts and elastomeric substrates are presented. Detailed experimental and theoretical studies reveal many of the key underlying aspects of these systems. The results shpw, as an example, optimized mechanics and materials for circuits that exhibit maximum principal strains less than 0.2% even for applied strains of up to ≈90%. Simple circuits, including complementary metal–oxide–semiconductor inverters and n-type metal–oxide–semiconductor differential amplifiers, validate these designs. The results suggest practical routes to high-performance electronics with linear elastic responses to large strain deformations, suitable for diverse applications that are not readily addressed with conventional wafer-based technologies.

Research Organization:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division; National Science Foundation (NSF)
Grant/Contract Number:
FG02-07ER46471; FG02-07ER46453; ECCS-0824129
OSTI ID:
1875846
Journal Information:
Small, Vol. 5, Issue 24; ISSN 1613-6810
Publisher:
WileyCopyright Statement
Country of Publication:
United States
Language:
English

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Peel-and-Stick: Mechanism Study for Efficient Fabrication of Flexible/Transparent Thin-film Electronics journal October 2013
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Printed Electronics Based on Inorganic Semiconductors: From Processes and Materials to Devices journal June 2018
Transfer Printed Flexible and Stretchable Thin Film Solar Cells Using a Water-Soluble Sacrificial Layer journal August 2016
Mechanics analysis of two-dimensionally prestrained elastomeric thin film for stretchable electronics journal December 2010
Stretchable Semiconductor Technologies with High Areal Coverages and Strain-Limiting Behavior: Demonstration in High-Efficiency Dual-Junction GaInP/GaAs Photovoltaics journal March 2012
High-Resolution Printing of 3D Structures Using an Electrohydrodynamic Inkjet with Multiple Functional Inks journal June 2015
Inorganic semiconducting materials for flexible and stretchable electronics journal September 2017
A Review of Printable Flexible and Stretchable Tactile Sensors journal November 2019
Review of Flexible Temperature Sensing Networks for Wearable Physiological Monitoring journal May 2017
Strategies for Designing Stretchable Strain Sensors and Conductors journal December 2019
Energy Harvesters for Wearable and Stretchable Electronics: From Flexibility to Stretchability journal September 2016
Single-Walled Carbon Nanotube Aerogel-Based Elastic Conductors journal April 2011
Waterproof AlInGaP optoelectronics on stretchable substrates with applications in biomedicine and robotics journal October 2010
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Polyimide Encapsulation of Spider-Inspired Crack-Based Sensors for Durability Improvement journal March 2018
Localizing genesis in polydomain liquid crystal elastomers journal January 2020
Stretchable electronics based on Ag-PDMS composites interactiveresource January 2014
Materials for stretchable electronics in bioinspired and biointegrated devices journal March 2012
Conducting Polymer Dough for Deformable Electronics journal October 2015
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Structural Anisotropy in Stretchable Silicon journal May 2019
Stretchable Field-Effect-Transistor Array of Suspended SnO2 Nanowires journal April 2011
Electric Field Assisted Self-Healing of Open Circuits with Conductive Particle-Insulating Fluid Dispersions: Optimizing Dispersion Concentration. text January 2019
Tunnel Encapsulation Technology for Durability Improvement in Stretchable Electronics Fabrication journal October 2018
Transfer Printing and its Applications in Flexible Electronic Devices journal February 2019
Design, Fabrication and Failure Analysis of Stretchable Electrical Routings journal July 2014

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