Method for fabricating superconducting devices using a focused ion beam

Cybart, Shane A.; Cho, Ethan Y.; Dynes, Robert C.; Wong, Travis J.

Title: Method for fabricating superconducting devices using a focused ion beam

Patent · Tue Jul 13 00:00:00 EDT 2021

OSTI ID:1840263

Cybart, Shane A.; Cho, Ethan Y.; Dynes, Robert C.; Wong, Travis J.

Nano-scale junctions, wires, and junction arrays are created by using a focused high-energy ion beam to direct-write insulating or poorly conducting barriers into thin films of materials that are sensitive to disorder, including superconductors, ferromagnetic materials and semiconductors.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC02-05CH11231

Assignee:: The Regents of the University of California (Oakland, CA)

Patent Number(s):: 11,063,201

Application Number:: 16/255,499

OSTI ID:: 1840263

Resource Relation:: Patent File Date: 01/23/2019

Country of Publication:: United States

Language:: English

References (35)

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