MEMS metal-quartz gyroscope
Abstract
The present disclosure relates to a gyroscope that makes use of a shuttle having a first plurality of fingers, a stator having a second plurality of fingers, at least one fixed support structure, and a plurality of flexors for supporting the shuttle for vibratory motion relative to the stator. The fingers of the shuttle are able to move in a vibratory motion adjacent the fingers of the stator without contacting the fingers of the stator. Portions of the fingers of at least one of the shuttle and the stator also make use of a grounded metal material layer to reduce parasitic capacitive coupling between the fingers of the shuttle and the fingers of the stator.
- Inventors:
- Publication Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1805427
- Patent Number(s):
- 10,900,783
- Application Number:
- 16/008,793
- Assignee:
- Lawrence Livermore National Security, LLC (Livermore, CA)
- DOE Contract Number:
- AC52-07NA27344
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 06/14/2018
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Park, Sangtae, and Pannu, Satinderpall S. MEMS metal-quartz gyroscope. United States: N. p., 2021.
Web.
Park, Sangtae, & Pannu, Satinderpall S. MEMS metal-quartz gyroscope. United States.
Park, Sangtae, and Pannu, Satinderpall S. 2021.
"MEMS metal-quartz gyroscope". United States. https://www.osti.gov/servlets/purl/1805427.
@article{osti_1805427,
title = {MEMS metal-quartz gyroscope},
author = {Park, Sangtae and Pannu, Satinderpall S.},
abstractNote = {The present disclosure relates to a gyroscope that makes use of a shuttle having a first plurality of fingers, a stator having a second plurality of fingers, at least one fixed support structure, and a plurality of flexors for supporting the shuttle for vibratory motion relative to the stator. The fingers of the shuttle are able to move in a vibratory motion adjacent the fingers of the stator without contacting the fingers of the stator. Portions of the fingers of at least one of the shuttle and the stator also make use of a grounded metal material layer to reduce parasitic capacitive coupling between the fingers of the shuttle and the fingers of the stator.},
doi = {},
url = {https://www.osti.gov/biblio/1805427},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 26 00:00:00 EST 2021},
month = {Tue Jan 26 00:00:00 EST 2021}
}
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