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Title: MEMS metal-quartz gyroscope

Abstract

The present disclosure relates to a gyroscope that makes use of a shuttle having a first plurality of fingers, a stator having a second plurality of fingers, at least one fixed support structure, and a plurality of flexors for supporting the shuttle for vibratory motion relative to the stator. The fingers of the shuttle are able to move in a vibratory motion adjacent the fingers of the stator without contacting the fingers of the stator. Portions of the fingers of at least one of the shuttle and the stator also make use of a grounded metal material layer to reduce parasitic capacitive coupling between the fingers of the shuttle and the fingers of the stator.

Inventors:
;
Publication Date:
Research Org.:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1805427
Patent Number(s):
10,900,783
Application Number:
16/008,793
Assignee:
Lawrence Livermore National Security, LLC (Livermore, CA)
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Patent
Resource Relation:
Patent File Date: 06/14/2018
Country of Publication:
United States
Language:
English

Citation Formats

Park, Sangtae, and Pannu, Satinderpall S. MEMS metal-quartz gyroscope. United States: N. p., 2021. Web.
Park, Sangtae, & Pannu, Satinderpall S. MEMS metal-quartz gyroscope. United States.
Park, Sangtae, and Pannu, Satinderpall S. 2021. "MEMS metal-quartz gyroscope". United States. https://www.osti.gov/servlets/purl/1805427.
@article{osti_1805427,
title = {MEMS metal-quartz gyroscope},
author = {Park, Sangtae and Pannu, Satinderpall S.},
abstractNote = {The present disclosure relates to a gyroscope that makes use of a shuttle having a first plurality of fingers, a stator having a second plurality of fingers, at least one fixed support structure, and a plurality of flexors for supporting the shuttle for vibratory motion relative to the stator. The fingers of the shuttle are able to move in a vibratory motion adjacent the fingers of the stator without contacting the fingers of the stator. Portions of the fingers of at least one of the shuttle and the stator also make use of a grounded metal material layer to reduce parasitic capacitive coupling between the fingers of the shuttle and the fingers of the stator.},
doi = {},
url = {https://www.osti.gov/biblio/1805427}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 26 00:00:00 EST 2021},
month = {Tue Jan 26 00:00:00 EST 2021}
}

Works referenced in this record:

Method and Apparatus for a Micromachined Multisensor
patent-application, February 2010


Comb drive micromechanical tuning fork gyro
patent, September 1994