Plasma characterization studies for materials processing
- Univ. of Minnesota, Minneapolis, MN (United States)
New applications for plasma processing of materials require a more detailed understanding of the fundamental processes occurring in the processing reactors. We have developed reactors offering specific advantages for materials processing, and we are using modeling and diagnostic techniques for the characterization of these reactors. The emphasis is in part set by the interest shown by industry pursuing specific plasma processing applications. In this paper we report on the modeling of radio frequency plasma reactors for use in materials synthesis, and on the characterization of the high rate diamond deposition process using liquid precursors. In the radio frequency plasma torch model, the influence of specific design changes such as the location of the excitation coil on the enthalpy flow distribution is investigated for oxygen and air as plasma gases. The diamond deposition with liquid precursors has identified the efficient mass transport in form of liquid droplets into the boundary layer as responsible for high growth, and the chemical properties of the liquid for the film morphology.
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- OSTI ID:
- 175505
- Report Number(s):
- CONF-9505200-; ON: DE96000983; TRN: 96:003539
- Resource Relation:
- Conference: 13. symposium on energy engineering sciences, Argonne, IL (United States), 15-17 May 1995; Other Information: PBD: [1995]; Related Information: Is Part Of Thirteenth symposium on energy engineering sciences: Proceedings. Fluid/thermal processes, systems analysis and control; PB: 275 p.
- Country of Publication:
- United States
- Language:
- English
Similar Records
Thermal plasma processing of materials. Progress report, September 1, 1988--January 31, 1992
Thermal plasma processing of materials