Precision laser annealing of Si devices for enhanced electro-optic performance.

Conference · Wed Jan 01 00:00:00 EST 2014

OSTI ID:1684789

Bender, Daniel A; DeRose, Christopher T.; Starbuck, Andrew Lea; Verley, Jason C.; Jenkins, Mark W.

Abstract not provided.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1684789
• Report Number(s): SAND2014-0752P; 498598
• Resource Relation: Conference: Proposed for presentation at the Photonics West held February 5-7, 2014 in San Francisco, CA.
• Country of Publication: United States
• Language: English