High-yield growth kinetics and spatial mapping of single-walled carbon nanotube forests at wafer scale

Meshot, Eric R.; Park, Sei Jin; Buchsbaum, Steven F.; Jue, Melinda L.; Kuykendall, Tevye R.; Schaible, Eric; Bayu Aji, Leonardus Bimo; Kucheyev, Sergei O.; Wu, Kuang Jen J.; Fornasiero, Francesco

doi:10.1016/j.carbon.2019.12.023

Title: High-yield growth kinetics and spatial mapping of single-walled carbon nanotube forests at wafer scale

Journal Article · Wed Apr 01 00:00:00 EDT 2020 · Carbon

DOI:https://doi.org/10.1016/j.carbon.2019.12.023· OSTI ID:1642502

^[1];

^[1]; Buchsbaum, Steven F. ^[1]; Jue, Melinda L. ^[1]; Kuykendall, Tevye R. ^[1]; Schaible, Eric ^[2]; Bayu Aji, Leonardus Bimo ^[1]; Kucheyev, Sergei O. ^[1]; Wu, Kuang Jen J. ^[1];

^[1]

Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Advanced Light Source (ALS)

Emerging commercial applications of vertically aligned, single-walled carbon nanotube (SWCNT) “forests” require synthesis that minimizes nanotube diameter while maximizing number density across substrate areas exceeding centimeter scale. To address this need, we synthesized SWCNT forests on full silicon wafers with notable reproducibility and uniformity, and co-optimized growth for small diameters and high densities across large areas to access new territory in this 3D parameter space. We mapped the spatial uniformity of key structural features using Raman microscopy, synchrotron X-ray scattering, and Rutherford backscattering spectrometry. Low C₂H₂ flux over sub-nm Fe/Mo catalysts produced small-diameter SWCNTs (2.1 nm) at high number densities (2.26 × 10¹² cm^-2) on wafers up to 6 in. Although removing Mo resulted in larger SWCNT diameters and lower densities (<0.7 × 10¹² cm^-2), mass conversion rates from C₂H₂ to SWCNT product were high and remarkably invariant for catalyst compositions and densities (i.e., 47.7% or 1.30 × 10⁶% g-catalyst^-1 on 4-in. wafers). These carbon conversion efficiencies far exceed typical benchtop reactors and are on par with the best reported literature values. Our detailed elucidation of correlations among structural characteristics within this resource-efficient process is expected to guide future scale-up efforts of SWCNT forest growth beyond wafer scale.

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Research Organization:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC52-07NA27344; AC02-05CH11231

OSTI ID:: 1642502

Alternate ID(s):: OSTI ID: 1580312

Report Number(s):: LLNL-JRNL-778865; 972819

Journal Information:: Carbon, Vol. 159, Issue na; ISSN 0008-6223

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 8 works

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