Nanoscale optical tomography with cathodoluminescence spectroscopy

Atre, Ashwin C.; Dionne, Jennifer A.; Brenny, Benjamin; Coenen, Toon; Polman, Albert

Title: Nanoscale optical tomography with cathodoluminescence spectroscopy

Patent · Tue Feb 04 00:00:00 EST 2020

OSTI ID:1632524

Atre, Ashwin C.; Dionne, Jennifer A.; Brenny, Benjamin; Coenen, Toon; Polman, Albert

In one aspect, a cathodoluminescence (CL) spectroscopic tomography device includes a sample stage to support a sample. An electron beam source scans an electron beam over the sample to yield light emission by the sample. A reflective element directs the light emission by the sample to a light detector. A controller controls operation of the sample stage, the electron beam source, and the light detector. In one aspect, a CL spectroscopic tomography device includes an electron beam source which directs an electron beam at an object to yield an emission by the object. A detector detects the emission. A controller receives information from the detector related to the detected emission. The controller derives a two-dimensional (2D) CL map from the information related to the detected emission, and derives a three-dimensional (3D) CL tomogram from the 2D CL map.

View Patent

Cite

Export

Save

Research Organization:: Stanford Univ., CA (United States); Stichting voor Fundamenteel Onderzoek der Materie, Utrecht (Netherlands)

Sponsoring Organization:: USDOE

DOE Contract Number:: EE0005331

Assignee:: The Board of Trustees of the Leland Stanford Junior University (Stanford, CA); Stichting voor Fundamenteel Onderzoek der Materie (Utrecht, NL)

Patent Number(s):: 10,551,330

Application Number:: 15/305,329

OSTI ID:: 1632524

Resource Relation:: Patent File Date: 04/22/2015

Country of Publication:: United States

Language:: English

References (19)

Probing the Photonic Local Density of States with Electron Energy Loss Spectroscopy García de Abajo, F. J.; Kociak, M. Physical Review Letters, Vol. 100, Issue 10 https://doi.org/10.1103/PhysRevLett.100.106804	journal	March 2008
Nanoshells to nanoeggs to nanocups: optical properties of reduced symmetry core–shell nanoparticles beyond the quasistatic limit Knight, Mark W.; Halas, Naomi J. New Journal of Physics, Vol. 10, Issue 10 https://doi.org/10.1088/1367-2630/10/10/105006	journal	October 2008
Clustering of Multi-Modal Data Kooijman, Cornelis Sander; Stoks, Sander Richard Marie https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130015351 US Patent Application 13/546863; 20130015351	patent-application	January 2013
Filtering in SPECT Image Reconstruction Lyra, Maria; Ploussi, Agapi International Journal of Biomedical Imaging, Vol. 2011 https://doi.org/10.1155/2011/693795	journal	January 2011
Three-Dimensional Super-Resolution Imaging by Stochastic Optical Reconstruction Microscopy Huang, B.; Wang, W.; Bates, M. Science, Vol. 319, Issue 5864 https://doi.org/10.1126/science.1153529	journal	February 2008
Reconstruction and visualization of nanoparticle composites by transmission electron tomography Wang, X. Y.; Lockwood, R.; Malac, M. Ultramicroscopy, Vol. 113 https://doi.org/10.1016/j.ultramic.2011.11.001	journal	February 2012
Systems and methods for imaging dynamic processes Claus, Bernhard Erich Hermann; Eberhard, Jeffrey Wayne; Langan, David Allen https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9468409 US Patent Document 9,468,409	patent	October 2016
Device and Method for Analyzing a Sample Zeile, Ulrike https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100059672 US Patent Application 12/584283; 20100059672	patent-application	March 2010
The Reconstruction of a Three-Dimensional Structure from Projections and its Application to Electron Microscopy Crowther, R. A.; DeRosier, D. J.; Klug, A. Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 317, Issue 1530 https://doi.org/10.1098/rspa.1970.0119	journal	June 1970
FIB-SEM cathodoluminescence tomography: practical and theoretical considerations: FIB-SEM CL TOMOGRAPHY De Winter, D. A. M.; Lebbink, M. N.; De Vries, D. F. Wiggers Journal of Microscopy, Vol. 243, Issue 3 https://doi.org/10.1111/j.1365-2818.2011.03510.x	journal	June 2011
Three-dimensional atomic imaging of crystalline nanoparticles Van Aert, Sandra; Batenburg, Kees J.; Rossell, Marta D. Nature, Vol. 470, Issue 7334 https://doi.org/10.1038/nature09741	journal	February 2011
Multi-color nanoscale imaging based on nanoparticle cathodoluminescence Walsworth, Ronald L.; Lichtman, Jeff; Kasthuri, Narayanan https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9541512 US Patent Document 9,541,512	patent	January 2017
System and Method for Sample Analysis by Three Dimensional Cathodoluminescence Galloway, Simon https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130140459 US Patent Application 13/309425; 20130140459	patent-application	June 2013
System and Method for Measuring Angular Luminescence in a Charged Particle Microscope Stowe, David; Galloway, Simon Andrew; Parsons, James https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140027632 US Patent Application 13/558948; 20140027632	patent-application	January 2014
Adjustable Cathodoluminescence Detection System and Microscope Employing Such a System Kociak, Mathieu; Zagonel, Luiz Fernando; Tence, Marcel https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130068966 US Patent Application 13/699981; 20130068966	patent-application	March 2013
Tile for Detector Array of Imaging Modality Having Selectively Removable/Replaceable Tile Sub-Assemblies Abenaim, Daniel; Choquette, Martin; Howitt, Lane https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130264483 US Patent Application 13/440268; 20130264483	patent-application	October 2013
Reducing the missing wedge: High-resolution dual axis tomography of inorganic materials Arslan, Ilke; Tong, Jenna R.; Midgley, Paul A. Ultramicroscopy, Vol. 106, Issue 11-12 https://doi.org/10.1016/j.ultramic.2006.05.010	journal	October 2006
Deconvolution of Time-Gated Cathodoluminescense Images Berney, Jean https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130193342 US Patent Application 13/795291; 20130193342	patent-application	August 2013
Systems and Methods for Imaging Dynamic Processes Claus, Bernhard Erich Hermann; Eberhard, Jeffrey Wayne; Langan, David Allen https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140153690 US Patent Application 14/090677; 20140153690	patent-application	June 2014

Similar Records

Cathodoluminescence for the 21st century: Learning more from light

Journal Article · Fri Sep 08 00:00:00 EDT 2017 · Applied Physics Reviews · OSTI ID:1632524

Coenen, T.; Haegel, N. M.

Scanning cathodoluminescence microscopy: A unique approach to atomic-scale characterization of heterointerfaces and imaging of semiconductor inhomogeneities

Conference · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States) · OSTI ID:1632524

Christen, J; Grundmann, M; Bimberg, D

Germanium Sulfide Nano-Optics Probed by STEM-Cathodoluminescence Spectroscopy

Journal Article · Fri Jun 08 00:00:00 EDT 2018 · Nano Letters · OSTI ID:1632524

Sutter, Peter; Argyropoulos, Christos; Sutter, Eli

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS

Title: Nanoscale optical tomography with cathodoluminescence spectroscopy

Citation Formats

References (19)

Similar Records

Related Subjects