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Title: Sensing analytical instrument parameters, specimen characteristics, or both from sparse datasets

Patent ·
OSTI ID:1632476
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Disclosed are methods for sensing conditions of an electron microscope system and/or a specimen analyzed thereby. Also disclosed are sensor systems and electron microscope systems able to sense system conditions, and/or conditions of the specimen being analyzed by such systems. In one embodiment, a sparse dataset can be acquired from a random sub-sampling of the specimen by an electron beam probe of the electron microscope system. Instrument parameters, specimen characteristics, or both can be estimated from the sparse dataset.

Research Organization:
Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-76RL01830
Assignee:
Battelle Memorial Institute (Richland, WA)
Patent Number(s):
10,541,109
Application Number:
15/660,096
OSTI ID:
1632476
Resource Relation:
Patent File Date: 07/26/2017
Country of Publication:
United States
Language:
English

References (12)

Position detecting system patent May 1986
Charged Particle Microscope With Special Aperture Plate patent-application April 2016
Ion Sources, Systems And Methods patent-application July 2009
Scanning Probe Microscope and Measurement Method Using the Same patent-application January 2005
Probe System with Multiple Actuation Locations patent-application January 2017
Methods and systems for determining a presence of defects and a thin film characteristic of a specimen patent September 2006
Mathematical image assembly in a scanning-type microscope patent April 2017
Sparse Sampling And Reconstruction For Electron And Scanning Probe Microscope Imaging patent-application March 2015
Through Process Flow Intra-Chip and Inter-Chip Electrical Analysis and Process Control Using In-Line Nanoprobing patent-application December 2015
Probe system with multiple actuation locations patent January 2018
Method and Apparatus for Mura Detection and Metrology patent-application January 2009
Microscopy System and Method for Creating Three Dimensional Images Using Probe Molecules patent-application June 2013

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