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Title: Numerical solution of plasma fluid equations using locally refined grids

Abstract

This paper describes a numerical method for the solution of plasma fluid equations on block-structured, locally refined grids. The plasma under consideration is typical of those used for the processing of semiconductors. The governing equations consist of a drift-diffusion model of the electrons and an isothermal model of the ions coupled by Poisson's equation. A discretization of the equations is given for a uniform spatial grid, and a time-split integration scheme is developed. The algorithm is then extended to accommodate locally refined grids. This extension involves the advancement of the discrete system on a hierarchy of levels, each of which represents a degree of refinement, together with synchronization steps to ensure consistency across levels. A brief discussion of a software implementation is followed by a presentation of numerical results.

Authors:
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE Office of Defense Programs (DP) (US)
OSTI Identifier:
16136
Report Number(s):
UCRL-ID-126401
ON: DE97053435; TRN: US200432%%301
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Technical Report
Resource Relation:
Other Information: Supercedes report DE97053435; PBD: 26 Jan 1997
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ALGORITHMS; ELECTRONS; IMPLEMENTATION; PLASMA; PROCESSING; SYNCHRONIZATION; NUMERICAL SOLUTION; PLASMA FLUID EQUATIONS

Citation Formats

Colella, P., LLNL. Numerical solution of plasma fluid equations using locally refined grids. United States: N. p., 1997. Web. doi:10.2172/16136.
Colella, P., LLNL. Numerical solution of plasma fluid equations using locally refined grids. United States. https://doi.org/10.2172/16136
Colella, P., LLNL. 1997. "Numerical solution of plasma fluid equations using locally refined grids". United States. https://doi.org/10.2172/16136. https://www.osti.gov/servlets/purl/16136.
@article{osti_16136,
title = {Numerical solution of plasma fluid equations using locally refined grids},
author = {Colella, P., LLNL},
abstractNote = {This paper describes a numerical method for the solution of plasma fluid equations on block-structured, locally refined grids. The plasma under consideration is typical of those used for the processing of semiconductors. The governing equations consist of a drift-diffusion model of the electrons and an isothermal model of the ions coupled by Poisson's equation. A discretization of the equations is given for a uniform spatial grid, and a time-split integration scheme is developed. The algorithm is then extended to accommodate locally refined grids. This extension involves the advancement of the discrete system on a hierarchy of levels, each of which represents a degree of refinement, together with synchronization steps to ensure consistency across levels. A brief discussion of a software implementation is followed by a presentation of numerical results.},
doi = {10.2172/16136},
url = {https://www.osti.gov/biblio/16136}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Jan 26 00:00:00 EST 1997},
month = {Sun Jan 26 00:00:00 EST 1997}
}