Selective area growth of semiconductors using patterned sol-gel materials

Warren, Emily L.; Tamboli, Adele Clare

Title: Selective area growth of semiconductors using patterned sol-gel materials

Patent · Tue Apr 09 00:00:00 EDT 2019

OSTI ID:1568186

Warren, Emily L.; Tamboli, Adele Clare

Systems and methods for growing semiconductor materials on substrates by using patterned sol-gel materials are provided. According to a first aspect of the invention, a method includes forming a pattern of a sol-gel material on a first region of substrate, and depositing a semiconductor material on a second region of the substrate by selective area growth. The second region is adjacent to the first region.

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Research Organization:: National Renewable Energy Laboratory (NREL), Golden, CO (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC36-08GO28308

Assignee:: Alliance for Sustainable Energy, LLC (Golden, CO)

Patent Number(s):: 10,256,093

Application Number:: 15/362,420

OSTI ID:: 1568186

Resource Relation:: Patent File Date: 11/28/2016

Country of Publication:: United States

Language:: English

References (7)

Methods for removing nuclei formed during epitaxial growth Lee, Jae Hyung; Kim, Youngsik; Na, Yeul https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9378950 US Patent Document 9,378,950	patent	June 2016
Semiconductive Micro- and Nano-Wire Array Manufacturing Warren, Emily L.; Audesirk, Heather A.; Lewis, Nathan S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140057416 US Patent Application 13/972809; 20140057416 A1	patent-application	February 2014
Hetero-epitaxial growth of non-lattice matched semiconductors Terranova, Nancy; Barnett, Allen M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5356509 US Patent Document 5,356,509	patent	October 1994
Semiconductive micro- and nano-wire array manufacturing Warren, Emily L.; Audesirk, Heather A.; Lewis, Nathan S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9048097 US Patent Document 9,048,097	patent	June 2015
Selective OMCVD growth of compound semiconductor materials on silicon substrates Salerno, Jack P.; Lee, Jhang W.; McCullough, Richard https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4826784 US Patent Document 4,826,784	patent	May 1989
Isoplanar isolated active regions Miller, Robert O. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5548154 US Patent Document 5,548,154	patent	August 1996
Solution growth of lattice mismatched and solubility mismatched heterostructures Barnett, Allen M.; Zolper, John C. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4876210 US Patent Document 4,876,210	patent	October 1989

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