skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Methods and devices for fabricating and assembling printable semiconductor elements

Abstract

The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.

Inventors:
; ; ; ; ; ; ;
Publication Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531946
Patent Number(s):
9,450,043
Application Number:
14/155,010
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
DOE Contract Number:  
FG02-91ER45439
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014-01-14
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING

Citation Formats

Nuzzo, Ralph G., Rogers, John A., Menard, Etienne, Lee, Keon Jae, Khang, Dahl-Young, Sun, Yugang, Meitl, Matthew, and Zhu, Zhengtao. Methods and devices for fabricating and assembling printable semiconductor elements. United States: N. p., 2016. Web.
Nuzzo, Ralph G., Rogers, John A., Menard, Etienne, Lee, Keon Jae, Khang, Dahl-Young, Sun, Yugang, Meitl, Matthew, & Zhu, Zhengtao. Methods and devices for fabricating and assembling printable semiconductor elements. United States.
Nuzzo, Ralph G., Rogers, John A., Menard, Etienne, Lee, Keon Jae, Khang, Dahl-Young, Sun, Yugang, Meitl, Matthew, and Zhu, Zhengtao. 2016. "Methods and devices for fabricating and assembling printable semiconductor elements". United States. https://www.osti.gov/servlets/purl/1531946.
@article{osti_1531946,
title = {Methods and devices for fabricating and assembling printable semiconductor elements},
author = {Nuzzo, Ralph G. and Rogers, John A. and Menard, Etienne and Lee, Keon Jae and Khang, Dahl-Young and Sun, Yugang and Meitl, Matthew and Zhu, Zhengtao},
abstractNote = {The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.},
doi = {},
url = {https://www.osti.gov/biblio/1531946}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 20 00:00:00 EDT 2016},
month = {Tue Sep 20 00:00:00 EDT 2016}
}

Works referenced in this record:

Image Sensor Capable of Judging Proximity to Subject
patent-application, August 2010


Multi-electrode cardiac lead adapter with multiplexer
patent-application, August 2003


Electronic devices with small functional elements supported on a carrier
patent, November 2004


Method for Producing at Least One Multilayer Body, and Multilayer Body
patent-application, November 2009


Methods of making spatially aligned nanotubes and nanotube arrays
patent, February 2013


Nanopatterned Biopolymer Optical Device and Method of Manufacturing the Same
patent-application, May 2010


Methods of positioning and/or orienting nanostructures
patent, March 2005


Methods and apparatus for fluidic self assembly
patent, September 2003


Method of utilizing a contact printing stamp
patent, May 2008


Methods and devices for fabricating three-dimensional nanoscale structures
patent-application, December 2006


Biocompatible Scaffolds and Adipose-Delivered Stem Cells
patent-application, February 2008


Methods for Fabrication Isolated Micro-and Nano-Structures Using Soft or Imprint Lithography
patent-application, January 2009


Semiconductor device and manufacturing method thereof
patent-application, March 2003


Semiconductor device and method of manufacturing the same
patent-application, May 2003


Method of transferring semiconductors
patent, May 2001


Electroactive Biopolymer Optical and Electro-Optical Devices and Method of Manufacturing the Same
patent-application, March 2010


Cell adhesion
patent, April 2004


Method and device for imaging and analysis of biopolymer arrays
patent-application, June 2001


Photonic crystal biosensor structure and fabrication method
patent-application, January 2007


Surface plasmon polariton band gap structures
patent-application, February 2002


Microfluidic Devices and Methods for Fabricating the Same
patent-application, January 2009


Multispectral Plasmonic Crystal Sensors
patent-application, September 2008


Step and flash imprint lithography
patent, January 2002


Multispectral plasmonic crystal sensors
patent, April 2010


Silk Fibroin Materials and Use Thereof
patent-application, November 2010


Direct-connect signaling system
patent-application, December 2003


Medical device applications of nanostructured surfaces
patent-application, February 2005


Stretchable Form of Single Crystal Silicon for High Performance Electronics on Rubber Substrates
patent-application, April 2013


Flexible display designed for minimal mechanical strain
patent-application, June 2006


Method for plasma deposition on apertured substrates
patent, April 1993


Implantable biomedical devices on bioresorbable substrates
patent, March 2014


Thermally Managed LED Arrays Assembled by Printing
patent-application, December 2012


Implantable electrode array
patent-application, February 2007


Method and apparatus for transferring blocks
patent, May 2004


Pattern Transfer Printing by Kinetic Control of Adhesion to an Elastomeric Stamp
patent-application, August 2009


Heat spreader and semiconductor device and package using the same
patent, June 2006


Strained semiconductor by full wafer bonding
patent-application, November 2006


Stretchable and elastic interconnects
patent-application, September 2004


Silk fibroin materials and use thereof
patent, November 2010


Fibrous Protein Fusions and Use Thereof in the Formation of Advanced Organic/Inorganic Composite Materials
patent-application, November 2008


Web fabrication of devices
patent, January 2004


Cooling system for a semiconductor device and method of fabricating same
patent, April 2006


Method for making bonded metal back-plane substrates
patent, May 2000


Techniques for layer transfer processing
patent-application, April 2005


Light active sheet and methods for making the same
patent-application, September 2005


Silk Biomaterials and Methods of Use Thereof
patent-application, August 2010


Embossed mask lithography
patent, May 2005


Decal transfer lithography
patent-application, April 2006


Organic species that facilitate charge transfer to or from nanostructures
patent, September 2005


Electrical contacts for flexible displays
patent, March 2005


Stretchable Form of Single Crystal Silicon for High Performance Electronics on Rubber Substrates
patent-application, March 2010


Covalently immobilized protein gradients in three-dimensional porous scaffolds
patent-application, September 2007


Silk-Based Drug Delivery System
patent-application, April 2008


Method of selective removal of SiGe alloys
patent, May 2005


Composite stamper for imprint lithography
patent-application, June 2005


Biomaterial
patent, November 2001


Conformable Actively Multiplexed High-Density Surface Electrode Array for Brain Interfacing
patent-application, March 2013


Deformable organic devices
patent-application, October 2005


Concentrated Aqueous Silk Fibron Solution and Use Thereof
patent-application,  


High-Speed, High-Resolution Electrophysiology In-Vivo Using Conformal Electronics
patent-application, June 2012


A Stretchable Form of Single Crystal Silicon for High Performance Electronics on Rubber Substrates
patent-application, December 2006


Shape-memory polymer coated electrodes
patent-application, March 2007


Surface mountable flexible interconnect
patent, July 1999


Implantable microelectronic device and method of manufacture
patent, May 2010


Method for Silk Fibron Gelation Using Sonification
patent-application, July 2010


Method for Producing Biomaterial Scaffolds
patent-application, November 2008


Methods for transferring elements from a template to a substrate
patent, April 2003


Methods of Making Spatially Aligned Nanotubes and Nanotube Arrays
patent-application, December 2012


Multiple-mode planar-waveguide sensor, fabrication materials and techniques
patent-application, April 2004


Methods of forming two-sided HDMI interconnect structures
patent, November 1997


Flexible electronic assembly
patent-application, February 2008


Oriented nanostructures and methods of preparing
patent-application, July 2004


Electrospun pharmaceutical compositions
patent-application, December 2006


Self-aligned patterning in dual damascene process
patent-application, August 2003


Flexible Circuit Electrode Array
patent-application, November 2008


Stretchable semiconductor elements and stretchable electrical circuits
patent-application, February 2006


Concentrated Aqueous Silk Fibroin Solution and Use Thereof
patent-application, September 2009


Nanotube-based sensors for biomolecules
patent-application, October 2004


Fabrication of finely featured devices by liquid embossing
patent, February 2003


Light redirecting films and film systems
patent-application, October 2008


Printable, Flexible and Stretchable Diamond for Thermal Management
patent-application, March 2010


Multi-feature-size electronic structures
patent, August 2003


UVA1-LED Phototherapy Device and Method
patent-application, May 2010


High on-state breakdown heterojunction bipolar transistor
patent-application, March 2006


Substrates, systems and methods for analyzing materials
patent-application, June 2008


Biopolymer Optofluidic Device and Method of Manufacturing the Same
patent-application, April 2010


Biopolymer Sensor and Method of Manufacturing the Same
patent-application, March 2010


Disposable pulse oximeter sensor
patent, November 1995


Strained semiconductor by full wafer bonding
patent-application, January 2005


Stamp for a lithographic process
patent, October 1998


Electrocorticography telemitter
patent-application, June 2006


Thermal interface with silver-filled carbon nanotubes
patent, December 2006


Light therapy bandage with imbedded emitters
patent-application, October 2007


Nanocomposites
patent-application, May 2004


Stretchable interconnects using stress gradient films
patent, June 2004


Flexible and Stretchable Electronic Systems for Epidermal Electronics
patent-application, February 2013


Electro-optic displays, and methods for driving same
patent, September 2005


Epitaxy/substrate release layer
patent, April 2006


Methods for forming assemblies
patent, August 2001


Nanodevices, microdevices and sensors on in-vivo structures and method for the same
patent-application, February 2003


Heat-transfer-stamp process for thermal imprint lithography
patent, September 2005


Apparatuses and methods used in forming assemblies
patent, August 2001


Web process interconnect in electronic assemblies
patent, October 2002


Thermal dissipation of integrated circuits using diamond paths
patent, May 1994


Disposing method for semiconductor elements
patent, April 2004


Control of the Degradation of Diodegradable Implants using a Coating
patent-application, August 2009


Process for producing photonic crystals
patent-application, June 2005


Deformable organic devices
patent-application, August 2006


Exposure method and exposure apparatus
patent, January 2001


Photovoltaic power generation system
patent-application, October 2004


Trench isolation method for semiconductor device
patent, September 2000


Method for Forming Inorganic Coatings
patent-application, August 2010


Organic species that facilitate charge transfer to or from nanostructures
patent-application, September 2004


Silk Microspheres for Encapsulation and Controlled Release
patent-application, February 2010


Metal nano-void photonic crystal for enhanced raman spectroscopy
patent-application, June 2006


Reworkable high density interconnect structure incorporating a release layer
patent, July 1995


Embedded thermal conductors for semiconductor chips
patent, September 1999


Implantable Biomedical Devices On Bioresorbable Substrates
patent-application, September 2011


Thermal interface material with carbon nanotubes
patent, August 2007


Tissue-Engineered Silk Organs
patent-application, July 2010


Method and apparatus for coating medical implants
patent-application, February 2007


Cooling system for a semiconductor device and method of fabricating same
patent, January 2007


One-chip micro-integrated optoelectronic sensor
patent, April 2005


Printable Semiconductor Structures and Related Methods of Making and Assembling
patent-application, November 2010


Methods fro Stepwise Deposition of Silk Fibroin Coatings
patent-application, August 2009


Composite patterning devices for soft lithography
patent-application, October 2005


Optical Systems Fabricated by Printing-based Assembly
patent-application, November 2010


Apparatuses and methods for flexible displays
patent, February 2005


Bonded intermediate substrate and method of making same
patent-application, November 2006


Systems and methods for transporting particles
patent-application, May 2006


Fabrication of strained heterojunction structures
patent-application, June 2006


Release Strategies for Making Transferable Semiconductor Structures, Devices and Device Components
patent-application, July 2011


Biopolymer Optical Waveguide and Method of Manufacturing the Same
patent-application, March 2010


Printable Semiconductor Structures and Related Methods of Making and Assembling
patent-application, February 2007


High Resolution Electrohydrodynamic Jet Printing for Manufacturing Systems
patent-application, August 2011


Stretchable and foldable electronic devices
patent, October 2013


Implantable, tissue conforming drug delivery device
patent-application, August 2006


Planar nanowire based sensor elements, devices, systems and methods for using and making same
patent-application, July 2004


Cardiac mapping system simulator
patent, August 1991


Blood testing and therapeutic compound delivery system
patent-application, November 2005


Methods and apparatuses for improved flow in performing fluidic self assembly
patent, March 2003


Microfludic Device with a Cylindrical Microchannel and a Method for Fabricating Same
patent-application, March 2010


Electric microcontact printing method and apparatus
patent-application, September 2003


Appendage Mountable Electronic Devices COnformable to Surfaces
patent-application, December 2013


Full panel electronic packaging structure and method of making same
patent, August 1988


Chip level hermetic and biocompatible electronics package using SOI wafers
patent-application, August 2004


Transient devices designed to undergo programmable transformations
patent-application, June 2013


Biopolymer Photonic Crystals and Method of Manufacturing the Same
patent-application, February 2010


Water-degradable electrode
patent, June 1995


Stretchable and Foldable Electronic Devices
patent-application, July 2010


Bipolar transistor with lattice matched base layer
patent, March 2007


Sensor system
patent, December 2003


Arrays of ultrathin silicon solar microcells
patent, March 2014


Method for forming inorganic coatings
patent-application, July 2006


Nanotube films and articles
patent, March 2004


Process to pattern thick TiW metal layers using uniform and selective etching
patent-application, September 2004


High Resolution Printing of Charge
patent-application, July 2011


Manufacturing method for electric device
patent-application, April 2004


Microtransponder Array for Implant
patent-application, August 2009


Apparatus for fabricating self-assembling microstructures
patent, May 1999


Angular displacement sensors
patent, February 1992


Stretchable interconnects using stress gradient films
patent-application, July 2002


Flexible displays
patent, October 2003


Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements
patent-application, December 2009


Tandem photovoltaic cell stacks
patent-application, October 2004


Apparatuses and methods for forming electronic assemblies
patent, December 2003


GaN-based nitric oxide sensors and methods of making and using the same
patent-application, August 2008


Methods for fabricating a multiple modular assembly
patent, November 2001


Electroform spring built on mandrel transferable to other surface
patent-application, April 2006


Method of manufacturing semiconductor device
patent-application, November 2005


Arrays of Ultrathin Silicon Solar Microcells
patent-application, November 2011


Fabrication of high thermal conductivity arrays of carbon nanotubes and their composites
patent-application, December 2006


Waterproof stretchable optoelectronics
patent-application, June 2012


High-Resolution Mapping of Bio-Electric Fields
patent-application, July 2008


Concentrated aqueous silk fibroin solution and use thereof
patent, December 2009


Concentrated aqueous silk fibroin solution and use thereof
patent-application, August 2007


Silk biomaterials and methods of use thereof
patent, March 2010


Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements
patent-application, September 2011


Optical systems fabricated by printing-based assembly
patent, July 2011


Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements
patent-application, March 2010


Electrochemical device
patent, January 2007


Release Strategies For Making Transferable Semiconductor Structures, Devices And Device Components
patent-application, May 2008


Non-Contact Transfer Printing
patent-application, February 2013


Displays combining active and non-active inks
patent, October 2002


Multi-channel electrophysiologic signal data acquisition system on an integrated circuit
patent-application, August 2006


Diazonium Salt Modification of Silk Polymer
patent-application, September 2009


Interconnect structure for electronic devices
patent, February 2004


Probe For Data Transmission Between A Brain And A Data Processing Device
patent-application, September 2009


Optical Systems Fabricated by Printing-Based Assembly
patent-application, November 2011


Active matrix type display device and method of manufacturing the same
patent-application, April 2006


Silk biomaterials and methods of use thereof
patent-application, November 2005


Methods and devices for promoting epithelial cell differentiation and keratinization
patent-application, August 2006


In-line fabrication of curved surface transistors
patent-application, June 2006


Devices and methods for pattern generation by ink lithography
patent-application, March 2008


Double-metal background driven displays
patent, July 2003


Nanowire heterostructures for encoding information
patent-application, February 2004


Wafer Breaker
patent, July 1973


Method for production of a film
patent, April 2010


Works referencing / citing this record:

Embedding thin chips in polymer
patent, July 2018


Self-similar and fractal design for stretchable electronics
patent, January 2019


Method and apparatus for light diffusion
patent, December 2018


Compliant needle for direct transfer of semiconductor devices
patent, November 2018