Patterning devices using fluorinated compounds

Katz, Howard E.; Dhar, Bal Mukund

Title: Patterning devices using fluorinated compounds

Patent · Tue Dec 18 00:00:00 EST 2018

OSTI ID:1531378

Katz, Howard E.; Dhar, Bal Mukund

A method for producing a spatially patterned structure includes forming a layer of a material on at least a portion of a substructure of the spatially patterned structure, forming a barrier layer of a flourinated material on the layer of material to provide an intermediate structure, and exposing the intermediate structure to at least one of a second material or radiation to cause at least one of a chemical change or a structural change to at least a portion of the intermediate structure. The barrier layer substantially protects the layer of the material from chemical and structural changes during the exposing. Substructures are produced according to this method.

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Research Organization:: Johns Hopkins Univ., Baltimore, MD (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FA9550-06-1-0076; FG02-07ER46465

Assignee:: The Johns Hopkins University (Baltimore, MD)

Patent Number(s):: 10,158,075

Application Number:: 15/722,856

OSTI ID:: 1531378

Resource Relation:: Patent File Date: 2017-10-02

Country of Publication:: United States

Language:: English

References (8)

Patterning surfaces with functional polymers Nie, Zhihong; Kumacheva, Eugenia Nature Materials, Vol. 7, Issue 4 https://doi.org/10.1038/nmat2109	journal	April 2008
Lateral lubistor structure and method Voldman, Steven H.; Mandelman, Jack A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7173310 US Patent Document 7,173,310	patent	February 2007
Method for producing spatially patterned structures using fluorinated compounds Katz, Howard Edan; Dhar, Bal Makund https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9091913 US Patent Document 9,091,913	patent	July 2015
Photolithographic patterning of organic electronic materials DeFranco, John A.; Schmidt, Bradley S.; Lipson, Michal Organic Electronics, Vol. 7, Issue 1 https://doi.org/10.1016/j.orgel.2005.10.002	journal	February 2006
Patterning devices using fluorinated compounds Katz, Howard Edan; Dhar, Bal Mukund https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9806259 US Patent Document 9,806,259	patent	October 2017
Flexible active-matrix displays and shift registers based on solution-processed organic transistors Gelinck, Gerwin H.; Huitema, H. Edzer A.; van Veenendaal, Erik Nature Materials, Vol. 3, Issue 2, p. 106-110 https://doi.org/10.1038/nmat1061	journal	January 2004
Electric device Takimoto, Kiyoshi; Kawada, Haruki; Sakai, Kunihiro https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4780790 US Patent Document 4,780,790	patent	October 1988
Patterning pentacene organic thin film transistors Kymissis, Ioannis; Dimitrakopoulos, Christos D.; Purushothaman, Sampath Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 3 https://doi.org/10.1116/1.1477427	journal	January 2002

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