Fundamental understanding of chemical processes in extreme ultraviolet resist materials

Kostko, Oleg; Xu, Bo; Ahmed, Musahid; Slaughter, Daniel S.; Ogletree, D. Frank; Closser, Kristina D.; Prendergast, David G.; Naulleau, Patrick; Olynick, Deirdre L.; Ashby, Paul D.; Liu, Yi; Hinsberg, William D.; Wallraff, Gregory M.

doi:10.1063/1.5046521

Title: Fundamental understanding of chemical processes in extreme ultraviolet resist materials

Journal Article · Fri Oct 19 00:00:00 EDT 2018 · Journal of Chemical Physics

DOI:https://doi.org/10.1063/1.5046521· OSTI ID:1506372

^[1]; Xu, Bo ^[1];

^[1];

^[2]; Closser, Kristina D. ^[2]; Prendergast, David G. ^[2]; Naulleau, Patrick ^[3]; Olynick, Deirdre L. ^[2];

^[2]; Liu, Yi ^[2]; Hinsberg, William D. ^[4]; Wallraff, Gregory M. ^[5]

Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Chemical Sciences Division
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Center for X-Ray Optics
Columbia Hill Technical Consulting, Fremont, CA (United States)
IBM Almaden, San Jose, CA (United States)

New photoresists are needed to advance extreme ultraviolet (EUV) lithography. The tailored design of efficient photoresists is enabled by a fundamental understanding of EUV induced chemistry. Processes that occur in the resist film after absorption of an EUV photon are discussed, and a new approach to study these processes on a fundamental level is described. The processes of photoabsorption, electron emission, and molecular fragmentation were studied experimentally in the gas-phase on analogs of the monomer units employed in chemically amplified EUV resists. To demonstrate the dependence of the EUV absorption cross section on selective light harvesting substituents, halogenated methylphenols were characterized employing the following techniques. Photoelectron spectroscopy was utilized to investigate kinetic energies and yield of electrons emitted by a molecule. The emission of Auger electrons was detected following photoionization in the case of iodo-methylphenol. Mass-spectrometry was used to deduce the molecular fragmentation pathways following electron emission and atomic relaxation. To gain insight on the interaction of emitted electrons with neutral molecules in a condensed film, the fragmentation pattern of neutral gas-phase molecules, interacting with an electron beam, was studied and observed to be similar to EUV photon fragmentation. Below the ionization threshold, electrons were confirmed to dissociate iodo-methylphenol by resonant electron attachment.

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Research Organization:: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1506372

Alternate ID(s):: OSTI ID: 1478273

Journal Information:: Journal of Chemical Physics, Vol. 149, Issue 15; ISSN 0021-9606

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 12 works

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