Targets and processes for fabricating same

Adams, Jesse D.; Korgan, Grant; Malekos, Steven; Renard-Le Galloudec, Nathalie; Sentoku, Yasuhiko; Cowan, Thomas E.

Title: Targets and processes for fabricating same

Patent · Tue Aug 14 00:00:00 EDT 2018

OSTI ID:1469688

Adams, Jesse D.; Korgan, Grant; Malekos, Steven; Renard-Le Galloudec, Nathalie; Sentoku, Yasuhiko; Cowan, Thomas E.

In particular embodiments, the present disclosure provides targets including a metal layer and defining a hollow inner surface. The hollow inner surface has an internal apex. The distance between at least two opposing points of the internal apex is less than about 15 .mu.m. In particular examples, the distance is less than about 1 .mu.m. Particular implementations of the targets are free standing. The targets have a number of disclosed shaped, including cones, pyramids, hemispheres, and capped structures. The present disclosure also provides arrays of such targets. Also provided are methods of forming targets, such as the disclosed targets, using lithographic techniques, such as photolithographic techniques. In particular examples, a target mold is formed from a silicon wafer and then one or more sides of the mold are coated with a target material, such as one or more metals.

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Research Organization:: Board of Regents of the Nevada System of Higher Education, on Behalf of the University of Nevada, Reno, Reno, NV (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FC52-01NV14050

Assignee:: Board of Regents of the Nevada System of Higher Education, on Behalf of the University of Nevada, Reno (Reno, NV)

Patent Number(s):: 10,051,719

Application Number:: 15/142,628

OSTI ID:: 1469688

Resource Relation:: Patent File Date: 2016 Apr 29

Country of Publication:: United States

Language:: English

References (81)

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