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Title: A 5-μ m pitch charge-coupled device optimized for resonant inelastic soft X-ray scattering

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.4997727· OSTI ID:1436156
 [1];  [1];  [1];  [1];  [1];  [1]
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
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Here, we have developed a charge-coupled device (CCD) with 5 μm × 45 μm pixels on high-resistivity silicon. The fully depleted 200 μm-thick silicon detector is back-illuminated through a 10 nm-thick in situ doped polysilicon window and is thus highly efficient for soft through > 8 keV hard X-rays. The device described here is a 1.5 megapixel CCD with 2496 × 620 pixels. The pixel and camera geometry was optimized for Resonant Inelastic X-ray Scattering (RIXS) and is particularly advantageous for spectrometers with limited arm lengths. In this article, we describe the device architecture, construction and operation, and its performance during tests at the Advance Light Source (ALS) 8.0.1 RIXS beamline. The improved spectroscopic performance, when compared with a current standard commercial camera, is demonstrated with a ~280 eV (CK) X-ray beam on a graphite sample. Readout noise is typically 3-6 electrons and the point spread function for soft CK X-rays in the 5 μm direction is 4.0 μm ± 0.2 μm. Finally, the measured quantum efficiency of the CCD is greater than 75% in the range from 200 eV to 1 keV.

Research Organization:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
AC02-05CH11231; SC0011269
OSTI ID:
1436156
Alternate ID(s):
OSTI ID: 1374227
Journal Information:
Review of Scientific Instruments, Vol. 88, Issue 8; ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 4 works
Citation information provided by
Web of Science

References (7)

Development of low noise, back-side illuminated silicon photodiode arrays journal June 1997
NIH Image to ImageJ: 25 years of image analysis journal June 2012
X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92 journal July 1993
Development of a compact fast CCD camera and resonant soft x-ray scattering endstation for time-resolved pump-probe experiments journal July 2011
Definition of the Flexible Image Transport System (FITS) journal September 2001
Calculations of mean free paths and stopping powers of low energy electrons (⩽ 10 keV) in solids using a statistical model journal December 1976
Developing a CCD camera with high spatial resolution for RIXS in the soft X-ray range
  • Soman, M. R.; Hall, D. J.; Tutt, J. H.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 731 https://doi.org/10.1016/j.nima.2013.04.076
journal December 2013

Figures / Tables (9)

FIG. 1(p. 4)figure FIG. 1
FIG. 2(p. 4)figure FIG. 2
FIG. 3(p. 6)figure FIG. 3
FIG. 4(p. 6)figure FIG. 4
FIG. 5(p. 6)figure FIG. 5
FIG. 6(p. 7)figure FIG. 6
FIG. 7(p. 7)figure FIG. 7
FIG. 8(p. 8)figure FIG. 8
FIG. 9(p. 8)figure FIG. 9

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Related Subjects

36 MATERIALS SCIENCE