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Title: Illumination Source for Flat Panel Display Final Report CRADA No. TC-320-92-1

Technical Report ·
DOI:https://doi.org/10.2172/1431001· OSTI ID:1431001
 [1];  [2]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. MRS Technology Inc., Chelmsford, MA (United States)
+ Show Author Affiliations

The overall technical objective of this project was to collaboratively design, construct and integrate a prototype solid state UV laser into a flat panel lithography system.

Research Organization:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC52-07NA27344
OSTI ID:
1431001
Report Number(s):
LLNL-TR-748439
Country of Publication:
United States
Language:
English

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