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Title: Derivation of Multiple Covarying Material and Process Parameters Using Physics-Based Modeling of X-ray Data

Journal Article · · Macromolecules
 [1];  [2];  [3];  [3];  [3]; ORCiD logo [4];  [3];  [3]; ORCiD logo [5];  [6];  [6]; ORCiD logo [5];  [7];  [5]; ORCiD logo [8]; ORCiD logo [8]
  1. Mentor: A Siemens Business, Wilsonville, OR (United States)
  2. Univ. of Tennessee, Knoxville, TN (United States). Dept. of hemical and Biomolecular Engineering
  3. Univ. of Chicago, IL (United States). Inst. for Molecular Engineering
  4. Technion - Israel Inst. of Technology, Haifa (Israel). Dept. of Chemical Engineering
  5. National Inst. of Standards and Technology (NIST), Gaithersburg, MD (United States). Materials Science and Engineering Division
  6. Argonne National Lab. (ANL), Argonne, IL (United States)
  7. Imec, Kapeldreef, Leuven (Belgium)
  8. Univ. of Chicago, IL (United States). Inst. for Molecular Engineering; Argonne National Lab. (ANL), Argonne, IL (United States)
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There is considerable interest in developing multimodal characterization frameworks capable of probing critical properties of complex materials by relying on distinct, complementary methods or tools. Any such framework should maximize the amount of information that is extracted from any given experiment and should be sufficiently powerful and efficient to enable on-the-fly analysis of multiple measurements in a self-consistent manner. Such a framework is demonstrated in this work in the context of self-assembling polymeric materials, where theory and simulations provide the language to seamlessly mesh experimental data from two different scattering measurements. Specifically, the samples considered here consist of diblock copolymers (BCP) that are self-assembled on chemically nanopatterned surfaces. The copolymers microphase separate into ordered lamellae with characteristic dimensions on the scale of tens of nanometers that are perfectly aligned by the substrate over macroscopic areas. These aligned lamellar samples provide ideal standards with which to develop the formalism introduced in this work and, more generally, the concept of high-information-content, multimodal experimentation. In conclusion, the outcomes of the proposed analysis are then compared to images generated by 3D scanning electron microscopy tomography, serving to validate the merit of the framework and ideas proposed here.

Research Organization:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES); National Institute of Standards and Technology (NIST)
Grant/Contract Number:
AC02-06CH11357; AC02-05CH11231
OSTI ID:
1419959
Journal Information:
Macromolecules, Vol. 50, Issue 19; ISSN 0024-9297
Publisher:
American Chemical SocietyCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 22 works
Citation information provided by
Web of Science

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Cited By (4)

Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering journal January 2020
Inverting the design path for self-assembled block copolymers journal January 2017
Optimizing self-consistent field theory block copolymer models with X-ray metrology journal January 2018
New frontiers for the materials genome initiative journal April 2019

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