Thermal history-based etching

Simpson, John T.

Title: Thermal history-based etching

Patent · Tue Nov 28 00:00:00 EST 2017

OSTI ID:1410558

Simpson, John T.

A method for adjusting an etchability of a first borosilicate glass by heating the first borosilicate glass; combining the first borosilicate glass with a second borosilicate glass to form a composite; and etching the composite with an etchant. A material having a protrusive phase and a recessive phase, where the protrusive phase protrudes from the recessive phase to form a plurality of nanoscale surface features, and where the protrusive phase and the recessive phase have the same composition.

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC05-00OR22725

Assignee:: UT-BATTELLE, LLC (Oak Ridge, TN)

Patent Number(s):: 9,828,284

Application Number:: 14/229,385

OSTI ID:: 1410558

Resource Relation:: Patent File Date: 2014 Mar 28

Country of Publication:: United States

Language:: English

References (131)

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Method for Producing Microchannels in Drawn Material D'urso, Brian R.; Simpson, John T. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080026188 US Patent Application 11/460658; 20080026188	patent-application	January 2008
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Nano-Structured Substrates, Articles, and Methods Thereof Baker, David; Ponader, Carl; Potuzak, Marcel https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110128535 US Patent Application 12/952904; 20110128535	patent-application	June 2011
Optical Member and Imaging Apparatus Sugiyama, Akira; Zhang, Zuyi; Kotani, Yoshinori https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130216775 US Patent Application 13/881006; 20130216775	patent-application	August 2013
Nanofiber optic sensor based on the excitation of surface plasmon wave near fiber tip Chang, Yu-Jen; Chen, Yi-Chun; Kuo, Hui-Ling Journal of Biomedical Optics, Vol. 11, Issue 1, Article No. 014032 https://doi.org/10.1117/1.2165171	journal	January 2006
Transformation of a Simple Plastic into a Superhydrophobic Surface Erbil, H. Y.; Demirel, A. Levent; Avcl, Yonca Science, Vol. 299, Issue 5611, p. 1377-1380 https://doi.org/10.1126/science.1078365	journal	February 2003
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Tunable Superhydrophobic Surfaces Fabricated by Nanosphere Lithography Litvinova, Ekaterina A. MRS Bulletin, Vol. 29, Issue 4, p. 229-230 https://doi.org/10.1557/mrs2004.70	journal	April 2004
Fabrication of Anodic-Alumina Films with Custom-Designed Arrays of Nanochannels Liu, N.-W.; Datta, A.; Liu, C.-Y. Advanced Materials, Vol. 17, Issue 2, p. 222-225 https://doi.org/10.1002/adma.200400380	journal	January 2005
Microfabricated needles for transdermal delivery of macromolecules and nanoparticles: Fabrication methods and transport studies McAllister, D. V.; Wang, P. M.; Davis, S. P. Proceedings of the National Academy of Sciences, Vol. 100, Issue 24, p. 13755-13760 https://doi.org/10.1073/pnas.2331316100	journal	November 2003
Silicon micromachining using a high-density plasma source McAuley, S. A.; Ashraf, H.; Atabo, L. Journal of Physics D: Applied Physics, Vol. 34, Issue 18, p. 2769-2774 https://doi.org/10.1088/0022-3727/34/18/309	journal	September 2001
Modeling of subwavelength-diameter optical wire waveguides for optical sensing applications Tong, Limin; Lou, Jingyi; Mazur, Eric Photonics Asia 2004 https://doi.org/10.1117/12.575626	conference	February 2005
Optical silica nanowires for nanophotonics Tong, Limin; Lou, Jingyi; Ma, Zhe SPIE Proceedings https://doi.org/10.1117/12.667671	conference	February 2012
Submicron and nano-diameter silica wires for optical wave guiding Tong, Limin; Gattass, R. R.; Lou, Jingyi Photonics Asia 2002 https://doi.org/10.1117/12.481726	conference	September 2002
Subwavelength-diameter silica wires for microscale optical components Tong, Limin; Mazur, Eric; Jiang, Shibin Integrated Optoelectronic Devices 2005 https://doi.org/10.1117/12.590677	conference	April 2005
Nanochannel Array Glass Tonucci, R. J.; Justus, B. L.; Campillo, A. J. Science, Vol. 258, Issue 5083, p. 783-785 https://doi.org/10.1126/science.258.5083.783	journal	October 1992

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