Microwave Sintering of Ceramic Materials for Industrial Application Final Report CRADA No. TC-1116-95
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
The goal of this project was to develop the commercial capability in the US to sinter alumina oxide ceramic parts for the semiconductor manufacturing equipment industry. We planned to use the millimeter microwave (30 GHz) sintering system first developed by IAP in Russia.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC52-07NA27344
- OSTI ID:
- 1406412
- Report Number(s):
- LLNL-TR-740367; UCRL-ID-145620
- Country of Publication:
- United States
- Language:
- English
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