Defect reduction in seeded aluminum nitride crystal growth

Bondokov, Robert T.; Morgan, Kenneth E.; Schowalter, Leo J.; Slack, Glen A.

Title: Defect reduction in seeded aluminum nitride crystal growth

Patent · Tue Jun 06 00:00:00 EDT 2017

OSTI ID:1361546

Bondokov, Robert T.; Morgan, Kenneth E.; Schowalter, Leo J.; Slack, Glen A.

Bulk single crystal of aluminum nitride (AlN) having an areal planar defect density .ltoreq.100 cm.sup.-2. Methods for growing single crystal aluminum nitride include melting an aluminum foil to uniformly wet a foundation with a layer of aluminum, the foundation forming a portion of an AlN seed holder, for an AlN seed to be used for the AlN growth. The holder may consist essentially of a substantially impervious backing plate.

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Research Organization:: CRYSTAL IS, INC. Green Island, NY (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: 70NANB4H3051

Assignee:: CRYSTAL IS, INC.

Patent Number(s):: 9,670,591

Application Number:: 14/458,825

OSTI ID:: 1361546

Resource Relation:: Patent File Date: 2014 Aug 13

Country of Publication:: United States

Language:: English

References (308)

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Methods for controllable doping of aluminum nitride bulk crystals Morgan, Kenneth E.; Schowalter, Leo J.; Slack, Glen A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8012257 US Patent Document 8,012,257	patent	September 2011
Thick pseudomorphic nitride epitaxial layers Grandusky, James R.; Schowalter, Leo J.; Gibb, Shawn R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8080833 US Patent Document 8,080,833	patent	December 2011
Deep-eutectic melt growth of nitride crystals Slack, Glen A.; Schujman, Sandra B. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8088220 US Patent Document 8,088,220	patent	January 2012
Method and apparatus for producing large, single-crystals of aluminum nitride Schowalter, Leo J.; Slack, Glen A.; Rojo, J. Carlos https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8123859 US Patent Document 8,123,859	patent	February 2012
Nitride semiconductor heterostructures and related methods Schowalter, Leo J.; Smart, Joseph A.; Liu, Shiwen https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8222650 US Patent Document 8,222,650	patent	July 2012
Defect reduction in seeded aluminum nitride crystal growth Bondokov, Robert T.; Morgan, Kenneth E.; Schowalter, Leo J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8323406 US Patent Document 8,323,406	patent	December 2012
Large aluminum nitride crystals with reduced defects and methods of making them Bondokov, Robert T.; Morgan, Kenneth E.; Slack, Glen A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8349077 US Patent Document 8,349,077	patent	January 2013
Method and apparatus for producing large, single-crystals of aluminum nitride Schowalter, Leo J.; Slack, Glen A.; Rojo, J. Carlos https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8545629 US Patent Document 8,545,629	patent	October 2013
Large aluminum nitride crystals with reduced defects and methods of making them Bondokov, Robert T.; Morgan, Kenneth E.; Slack, Glen A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8580035 US Patent Document 8,580,035	patent	November 2013
Doped aluminum nitride crystals and methods of making them Slack, Glen A.; Schowalter, Leo J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8747552 US Patent Document 8,747,552	patent	June 2014
Defect reduction in seeded aluminum nitride crystal growth Bondokov, Robert T.; Morgan, Kenneth E.; Schowalter, Leo J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8834630 US Patent Document 8,834,630	patent	September 2014
Method and apparatus for producing large, single-crystals of aluminum nitride Schowalter, Leo J.; Slack, Glen A.; Rojo, Juan Carlos https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8896020 US Patent Document 8,896,020	patent	November 2014
Photon extraction from nitride ultraviolet light-emitting devices Schowalter, Leo J.; Chen, Jianfeng; Grandusky, James R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8962359 US Patent Document 8,962,359	patent	February 2015
Led having angled sides for increased side light extraction Krames, Michael R.; Kish Jr., Fred A.; Tan, Tun S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20010000209 US Patent Application 09/732326; 20010000209	patent-application	April 2001
Method for growing nitride semiconductor crystals, nitride semiconductor device, and method for fabricating the same Itoh, Kunio; Ishida, Masahiro https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20010005023 US Patent Application 09/758287; 20010005023	patent-application	June 2001
Semiconductor device and method and apparatus for manufacturing semiconductor device Yagi, Shigeru https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20010024871 US Patent Application 09/772863; 20010024871	patent-application	September 2001
Use of CSOH in a Dielectric CMP Slurry Francis, Alicia F.; Mueller, Brian L.; Dirksen, James A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20010051433 US Patent Application 09/428965; 20010051433	patent-application	December 2001
Light emitting diodes with improved light extraction efficiency Camras, Michael D.; Krames, Michael R.; Snyder, Wayne L. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020030194 US Patent Application 09/880204; 20020030194	patent-application	March 2002
Method and apparatus for growing aluminum nitride monocrystals Vodakov, Yury Alexandrovich; Karpov, Sergei Yurievich; Makarov, Yury Nikolaevich https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020170490 US Patent Application 10/067631; 20020170490	patent-application	November 2002
Passivated nanoparticles, method of fabrication thereof, and devices incorporating nanoparticles Dutta, Partha https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030047816 US Patent Application 10/233587; 20030047816	patent-application	March 2003
FCSEL that frequency doubles its output emissions using sum-frequency generation Henrichs, Joseph Reid https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030160254 US Patent Application 10/350512; 20030160254	patent-application	August 2003
Method and apparatus for producing large, single-crystals of aluminum nitride Schowalter, Leo J.; Slack, Glen A.; Rojo, J. Carlos https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030168003 US Patent Application 10/324998; 20030168003	patent-application	September 2003
III-V Nitride homoepitaxial material of improved MOVPE epitaxial quality (surface texture and defect density) formed on free-standing (Al,In,Ga)N substrates, and opto-electronic and electronic devices comprising same Flynn, Jeffrey S.; Brandes, George R.; Vaudo, Robert P. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030213964 US Patent Application 10/313561; 20030213964	patent-application	November 2003
Light-emitting gallium nitride-based compound semiconductor device Nakamura, Shuji; Mukai, Takashi; Iwasa, Naruhito https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030216011 US Patent Application 10/456475; 20030216011	patent-application	November 2003
Method for polishing a substrate surface Schowalter, Leo J.; Lopez, Javier Martinez; Rojo, Juan Carlos https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040033690 US Patent Application 10/300481; 20040033690	patent-application	February 2004
Drain/source extension structure of a field effect transistor including doped high-k sidewall spacers Feudel, Thomas; Horstmann, Manfred; Wieczorek, Karsten https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040104442 US Patent Application 10/442745; 20040104442	patent-application	June 2004
Gallium nitride material devices and methods of forming the same Weeks, T. Warren; Linthicum, Kevin J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040130002 US Patent Application 10/650122; 20040130002	patent-application	July 2004
Method of fabricating monocrystalline crystals Letertre, Fabrice https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040187766 US Patent Application 10/716451; 20040187766	patent-application	September 2004
Strain compensated semiconductor structures Saxler, Adam William https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040206978 US Patent Application 10/839593; 20040206978	patent-application	October 2004
Nitride Semiconductor Layer Structure and a Nitride Semiconductor Laser Incorporating a Portion of Same Amano, Hiroshi; Akasaki, Isamu; Kaneko, Yawara https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040213309 US Patent Application 10/040328; 20040213309	patent-application	October 2004
Methods of growing nitride-based film using varying pulses Fareed, Ohalid; Gaska, Remigijus; Shur, Michael https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040224484 US Patent Application 10/713326; 20040224484	patent-application	November 2004
Methods for machining ceramics Laconto, Ronald W.; Ward, Douglas E. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040226917 US Patent Application 10/423283; 20040226917	patent-application	November 2004
Homoepitaxial gallium-nitride-based light emitting device and method for producing D'Evelyn, Mark Philip; Evers, Nicole Andrea; LeBoeuf, Steven Francis https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040245535 US Patent Application 10/831865; 20040245535	patent-application	December 2004
Light emitting element structure using nitride bulk single crystal layer Dwilinski, Robert; Doradzinski, Roman; Garczynski, Jerzy https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040251471 US Patent Application 10/493594; 20040251471	patent-application	December 2004
Discharge electrode, a discharge lamp and a method for manufacturing the discharge electrode Sakai, Tadashi; Ono, Tomio; Sakuma, Naoshi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050062392 US Patent Application 10/899153; 20050062392	patent-application	March 2005
Group-III nitride semiconductor device Sasaoka, Chiaki https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050072986 US Patent Application 10/991544; 20050072986	patent-application	April 2005
Large area, uniformly low dislocation density GaN substrate and process for making the same Xu, Xueping; Vaudo, Robert P. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050103257 US Patent Application 10/712351; 20050103257	patent-application	May 2005
Method and apparatus for fabricating crack-free Group III nitride semiconductor materials Dmitriev, Vladimir A.; Melnik, Yuri V. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050142391 US Patent Application 10/778633; 20050142391	patent-application	June 2005
Al_xIn_yGa_1-x-yN mixture crystal substrate, method of growing same and method of producing same Nakahata, Seiji; Hirota, Ryu; Motoki, Kensaku https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050161697 US Patent Application 11/041202; 20050161697	patent-application	July 2005
Bulk GaN and AlGaN single crystals Melnik, Yuri V.; Soukhoveev, Vitali; Ivantsov, Vladimir https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050164044 US Patent Application 11/083609; 20050164044	patent-application	July 2005
Fabrication of nonpolar indium gallium nitride thin films, heterostructures and devices by metalorganic chemical vapor deposition Chakraborty, Arpan; Haskell, Benjamin A.; Keller, Stacia https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050214992 US Patent Application 11/123805; 20050214992	patent-application	September 2005
Surface treatment method and surface treatment device Ueda, Tetsuzo; Ueda, Daisuke https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050269577 US Patent Application 11/146036; 20050269577	patent-application	December 2005
Nitride single crystal and producing method thereof Uematsu, Koji; Nakahata, Seiji https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050277214 US Patent Application 10/866007; 20050277214	patent-application	December 2005
Gallium nitride materials and methods associated with the same Piner, Edwin Lanier; Roberts, John C.; Rajagopal, Pradeep https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050285141 US Patent Application 10/879703; 20050285141	patent-application	December 2005
Method and apparatus for producing large, single-crystals of aluminum nitride Schowalter, Leo J.; Slack, Glen A.; Rojo, J. Carlos https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060005763 US Patent Application 10/910162; 20060005763	patent-application	January 2006
High surface quality GaN wafer and method of fabricating same Xu, Xueping; Vaudo, Robert P. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060029832 US Patent Application 11/213535; 20060029832	patent-application	February 2006
Substrate for epitaxy and method of preparing the same Dwilinski, Robert; Doradzinski, Roman; Garczynski, Jerzy https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060054075 US Patent Application 10/538407; 20060054075	patent-application	March 2006
Nitride-based light emitting heterostructure Gaska, Remigijus; Zhang, Jianping; Shur, Michael https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060118820 US Patent Application 11/292519; 20060118820	patent-application	June 2006
Compensating liquid delivery system and method Sage Jr., Burton H. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060181695 US Patent Application 11/055643; 20060181695	patent-application	August 2006
Binary group III-nitride based high electron mobility transistors and methods of fabricating same Saxler, Adam William https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060244011 US Patent Application 11/118675; 20060244011	patent-application	November 2006
Bonded intermediate substrate and method of making same Pinnington, Thomas Henry; Zahler, James M.; Park, Young-Bae https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060255341 US Patent Application 11/408239; 20060255341	patent-application	November 2006
Method for manufacturing nitride-based semiconductor device Park, Hee Seok https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060281205 US Patent Application 11/448866; 20060281205	patent-application	December 2006
Polar surface preparation of nitride substrates Slack, Glen A.; Schujman, Sandra B.; Meyer, Nicholas R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060288929 US Patent Application 11/448595; 20060288929	patent-application	December 2006
Light emitting diodes with high light extraction and high reflectivity Beeson, Karl W.; Zimmerman, Scott M.; Livesay, William R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070018184 US Patent Application 11/389201; 20070018184	patent-application	January 2007
Photocrosslinked hydrogel surface coatings Huang, Wenxi; Agroskin, Yury; Boschetti, Egisto https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070082019 US Patent Application 10/546173; 20070082019	patent-application	April 2007
Method and apparatus for producing large, single-crystals of aluminum nitride Schowalter, Leo J.; Slack, Glen A.; Rojo, J. Carlos https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070101932 US Patent Application 11/431090; 20070101932	patent-application	May 2007
High light extraction efficiency light emitting diode (LED) DenBaars, Steven P.; Nakamura, Shuji; Masui, Hisashi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070102721 US Patent Application 11/593268; 20070102721	patent-application	May 2007
Doped aluminum nitride crystals and methods of making them Slack, Glen A.; Schowalter, Leo J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070131160 US Patent Application 11/633667; 2007013116	patent-application	June 2007
Large aluminum nitride crystals with reduced defects and methods of making them Bondokov, Robert T.; Morgan, Kenneth; Slack, Glen A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070134827 US Patent Application 11/605192; 20070134827	patent-application	June 2007
Water purifier Wang, Shun-Chung; Lee, Ren-Guey https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070151905 US Patent Application 11/319457; 20070151905	patent-application	July 2007
Method of Fabricating Light Emitting Device and Thus-Fabricated Light Emitting Device Ikeda, Hitoshi; Suzuki, Kingo; Nakamura, Akio https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070224714 US Patent Application 11/587632; 20070224714	patent-application	September 2007
Methods for controllable doping of aluminum nitride bulk crystals Morgan, Kenneth E.; Schowalter, Leo J.; Slack, Glen A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070243653 US Patent Application 11/731790; 20070243653	patent-application	October 2007
Seeded growth process for preparing aluminum nitride single crystals Schlesser, Raoul; Noveski, Vladimir; Sitar, Zlatko https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070257333 US Patent Application 11/399713; 20070257333	patent-application	November 2007
Method and apparatus for producing large, single-crystals of aluminum nitride Schowalter, Leo J.; Slack, Glen A.; Rojo, J. Carlos https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080006200 US Patent Application 11/265909; 20080006200	patent-application	January 2008
LED PACKAGE WITH CONVERGING EXTRACTOR Thielen, James A.; Leatherdale, Catherine A.; Ouderkirk, Andrew J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080012034 US Patent Application 11/778385; 20080012034	patent-application	January 2008
Light Emitting Devices with Improved Light Extraction Efficiency Camras, Michael D.; Krames, Michael R.; Snyder, Wayne L. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080023719 US Patent Application 11/868903; 20080023719	patent-application	January 2008
PULSED GROWTH OF CATALYST-FREE GROWITH OF GaN NANOWIRES AND APPLICATION IN GROUP III NITRIDE SEMICONDUCTOR BULK MATERIAL Hersee, Stephen D.; Wang, Xin; Sun, Xinyu https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080036038 US Patent Application 11/684264; 20080036038	patent-application	February 2008
Light emitting packages and methods of making same Reginelli, James; Aanegola, Srinath K.; Radkov, Emil https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080054280 US Patent Application 11/516533; 20080054280	patent-application	March 2008
Compound semiconductor modified surface by use of pulsed electron beam and ion implantation through a deposited metal layer Melas, Andreas A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080087984 US Patent Application 11/998961; 20080087984	patent-application	April 2008
Semiconductor Devices Having Low Threading Dislocations and Improved Light Extraction and Methods of Making the Same Bergmann, Michael John; Hansen, Jason; Emerson, David Todd https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080121910 US Patent Application 11/563712; 20080121910	patent-application	May 2008
Nitride light-emitting device Chua, Christopher L.; Yang, Zhihong; Johnson, Noble M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080123711 US Patent Application 11/516333; 20080123711	patent-application	May 2008
Spatial localization of light-generating portions in LEDs Pokrovskiy, Alexander L.; Lim, Michael; Nemchuk, Nikolay I. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080135861 US Patent Application 11/636380; 20080135861	patent-application	June 2008
CHIP-SCALE METHODS FOR PACKAGING LIGHT EMITTING DEVICES AND CHIP-SCALE PACKAGED LIGHT EMITTING DEVICES Ibbetson, James; Keller, Bernd; Parikh, Primit https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080142817 US Patent Application 12/027313; 20080142817	patent-application	June 2008
LIGHT EMITTING DEVICES WITH AN ELECTRICALLY ACTIVE TOP REFLECTOR CONTACT Chua, Christopher L.; Teepe, Mark R.; Knollenberg, Clifford https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080144688 US Patent Application 11/962861; 20080144688	patent-application	June 2008
SEMICONDUCTOR LIGHT EMITTING DEVICE, LIGHT EMITTING MODULE, LIGHTING APPARATUS, DISPLAY ELEMENT AND MANUFACTURING METHOD OF SEMICONDUCTOR LIGHT EMITTING DEVICE Nagai, Hideo https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080149945 US Patent Application 11/969102; 20080149945	patent-application	June 2008
LIGHT-EMITTING APPARATUS AND METHOD OF PRODUCING THE SAME Amo, Takahiro; Nishijima, Shinji; Okada, Satoshi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080149960 US Patent Application 11/963250; 20080149960	patent-application	June 2008
LIGHT-EMITTING DEVICES Erchak, Alexei A.; Lidorikis, Elefterios; Luo, Chiyan https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080157111 US Patent Application 11/944815; 20080157111	patent-application	July 2008
Self-luminous device Baba, Toshihiko; Morito, Kosuke https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080173887 US Patent Application 11/906074; 20080173887	patent-application	July 2008
DEFECT REDUCTION IN SEEDED ALUMINUM NITRIDE CRYSTAL GROWTH Bondokov, Robert T.; Morgan, Kenneth E.; Schowalter, Leo J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080182092 US Patent Application 12/015957; 20080182092	patent-application	July 2008
Thick Pseudomorphic Nitride Epitaxial Layers Schowalter, Leo J.; Smart, Joseph A.; Grandusky, James R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080187016 US Patent Application 12/020006; 20080187016	patent-application	August 2008
Methods of forming packaged semiconductor light emitting devices having front contacts by compression molding Medendorp, Nicholas W. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080191225 US Patent Application 11/705233; 20080191225	patent-application	August 2008
SEMICONDUCTOR LIGHT-EMITTING DEVICE Hsu, Chih Peng; Ma, Chih Pang; Chan, Shih Hsiung https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080246047 US Patent Application 12/031473; 20080246047	patent-application	October 2008
Semiconductor light-emitting device, method for manufacturing the same, and light-emitting apparatus including the same Kususe, Takeshi; Sakamoto, Takahiko https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080251808 US Patent Application 12/155841; 20080251808	patent-application	October 2008
Light emitting diode chip Zimmerman, Scott M.; Beeson, Karl W.; Livesay, William R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080258165 US Patent Application 12/148888; 20080258165	patent-application	October 2008
Semiconductor Light Emitting Device, Illumination Module, Illumination Apparatus, Method For Manufacturing Semiconductor Light Emitting Device, and Method For Manufacturing Semiconductor Light Emitting Element Nagai, Hideo https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090008654 US Patent Application 11/720258; 20090008654	patent-application	January 2009
PATTERNED LIGHT EMITTING DEVICES Erchak, Alexei A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090014742 US Patent Application 12/173293; 20090014742	patent-application	January 2009
Group III nitride-based compound semiconductor light emitting device Saito, Yoshiki; Yajima, Takayoshi; Ushida, Yasuhisa https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090039373 US Patent Application 12/219455; 20090039373	patent-application	February 2009
DEEP-EUTECTIC MELT GROWTH OF NITRIDE CRYSTALS Slack, Glen A.; Schujman, Sandra B. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090050050 US Patent Application 12/126334; 20090050050	patent-application	February 2009
WHITE LIGHT LED WITH MULTIPLE ENCAPSULATION LAYERS Yen, Jui-Kang; Chen, Yung-Wei; Liu, Tien-Min https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090065791 US Patent Application 11/851216; 20090065791	patent-application	March 2009
METHOD OF MAKING AN LED DEVICE HAVING A DOME LENS Thompson, D. Scott; Kecman, Fedja https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090065792 US Patent Application 11/851604; 20090065792	patent-application	March 2009
LIGHT EMITTING DEVICE Hoshina, Takaharu https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090078957 US Patent Application 12/278320; 20090078957	patent-application	March 2009
NITRIDE SEMICONDUCTOR ULTRAVIOLET LEDS WITH TUNNEL JUNCTIONS AND REFLECTIVE CONTACT Bour, David P.; Chua, Christopher L. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090090932 US Patent Application 12/337475; 20090090932	patent-application	April 2009
LED with current confinement structure and surface roughening Denbaars, Steven P.; Nakamura, Shuji; Batres, Max https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090121246 US Patent Application 12/079486; 20090121246	patent-application	May 2009
HIGH LIGHT EXTRACTION EFFICIENCY LIGHT EMITTING DIODE (LED) USING GLASS PACKAGING DenBaars, Steven P.; Nakamura, Shuji; Masui, Hisashi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090121250 US Patent Application 12/275136; 20090121250	patent-application	May 2009
Substrate-free light emitting diode chip Zimmerman, Scott M.; Beeson, Karl W.; Livesay, William R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090140279 US Patent Application 12/221304; 20090140279	patent-application	June 2009
LIGHT OUTPUT ENHANCED GALLIUM NITRIDE BASED THIN LIGHT EMITTING DIODE Sonoda, Junichi; Nakamura, Shuji; Iso, Kenji https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090141502 US Patent Application 12/325939; 20090141502	patent-application	June 2009
PROTECTION OF SIGE DURING ETCH AND CLEAN OPERATIONS Chakravarti, Ashima B.; Luo, Zhijiong; Mo, Renee https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090155969 US Patent Application 11/954802; 20090155969	patent-application	June 2009
NITRIDE SEMICONDUCTOR SUBSTRATE AND METHOD OF PRODUCING SAME Uematsu, Koji; Hirota, Ryu; Nakahata, Seiji https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090155989 US Patent Application 12/388983; 20090155989	patent-application	June 2009
LIGHT EMITTING DIODE STRUCTURE AND METHOD FOR FABRICATING THE SAME Lin, Hung-Cheng; Lee, Chia-Ming; Chyi, Jen-Inn https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090159910 US Patent Application 11/963558; 20090159910	patent-application	June 2009
LIGHT EMITTING DEVICE Yamada, Motokazu; Inobe, Mototaka; Izuno, Kunihiro https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090166657 US Patent Application 12/341189; 20090166657	patent-application	July 2009
LIGHT EMITTING DEVICES WITH HIGH EFFICIENCY PHOSPOR STRUCTURES Chakraborty, Arpan; Keller, Bernd https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090173958 US Patent Application 11/969508; 20090173958	patent-application	July 2009
Led with substrate modifications for enhanced light extraction and method of making same Batres, Max; Ibbetson, James; Li, Ting https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090233394 US Patent Application 12/384277; 20090233394	patent-application	September 2009
AlGaN SUBSTRATE AND PRODUCTION METHOD THEREOF Amano, Hiroshi; Bando, Akira https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090239357 US Patent Application 12/434916; 20090239357	patent-application	September 2009
LEDs using single crystalline phosphor and methods of fabricating same Chakraborty, Arpan https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090256163 US Patent Application 12/082444; 20090256163	patent-application	October 2009
SEMICONDUCTOR LIGHT EMITTING DEVICE AND METHOD FOR FABRICATING THE SAME Ueda, Tetsuzo https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090261372 US Patent Application 12/490200; 20090261372	patent-application	October 2009
SEMICONDUCTOR LIGHT EMITTING DEVICE Choi, Sung Min https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090267098 US Patent Application 12/428868; 20090267098	patent-application	October 2009
LIGHT-EMITTING DIODE AND METHOD FOR FABRICATION THEREOF Nabekura, Wataru; Takeuchi, Ryouichi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090278148 US Patent Application 12/158914; 20090278148	patent-application	November 2009
NITRIDE SEMICONDUCTOR HETEROSTRUCTURES AND RELATED METHODS Schowalter, Leo J.; Smart, Joseph A.; Liu, Shiwen https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090283028 US Patent Application 11/503660; 20090283028	patent-application	November 2009
Light emitting elements, light emitting devices including light emitting elements and methods of manufacturing such light emitting elements and/or devices Kim, Yu-Sik; Lee, Seung-Jae https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090315054 US Patent Application 12/457177; 20090315054	patent-application	December 2009
LED WITH IMPROVED EXTERNAL LIGHT EXTRACTION EFFICIENCY LIU, WEN-HUANG; Dan, Chung-Che https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090321758 US Patent Application 12/146142; 20090321758	patent-application	December 2009
SEMICONDUCTOR LIGHT-EMITTING DEVICE Hattori, Yasushi; Saito, Shinji; Hiramatsu, Ryosuke https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090321771 US Patent Application 12/493585; 20090321771	patent-application	December 2009
LIGHT EMITTING DEVICE Lee, Jong Lam; Lee, Jae Ho; Yoon, Yeo Jin https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100006870 US Patent Application 12/568630; 20100006870	patent-application	January 2010
Diode having high brightness and method thereof Yoo, Myung Cheol https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100012956 US Patent Application 12/461681; 20100012956	patent-application	January 2010
HIGHLY EFFICIENT GALLIUM NITRIDE BASED LIGHT EMITTING DIODES VIA SURFACE ROUGHENING Fujii, Tetsuo; Gao, Yan; Hu, Evelyn L. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100025717 US Patent Application 12/576122; 20100025717	patent-application	February 2010
BOND PAD DESIGN FOR ENHANCING LIGHT EXTRACTION FROM LED CHIPS Li, Ting https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100025719 US Patent Application 12/185031; 20100025719	patent-application	February 2010
NITRIDE SEMICONDUCTOR HETEROSTRUCTURES AND RELATED METHODS Schowalter, Leo J.; Smart, Joseph A.; Liu, Shiwen https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100135349 US Patent Application 12/617150; 20100135349	patent-application	June 2010
Doped Aluminum Nitride Crystals and Methods of Making Them Slack, Glen A.; Schowalter, Leo J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100187541 US Patent Application 12/642182; 20100187541	patent-application	July 2010
THICK PSEUDOMORPHIC NITRIDE EPITAXIAL LAYERS Grandusky, James R.; Schowalter, Leo J.; Gibb, Shawn R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100264460 US Patent Application 12/764584; 20100264460	patent-application	October 2010
In-line Fluid Treatment by UV Radiation Bettles, Timothy J.; Berger, Steven; Schujman, Sandra B. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100314551 US Patent Application 12/813293; 20100314551	patent-application	December 2010
ALUMINUM NITRIDE BULK CRYSTALS HAVING HIGH TRANSPARENCY TO ULTRAVIOLET LIGHT AND METHODS OF FORMING THEM Schujman, Sandra B.; Rao, Shailaja P.; Bondokov, Robert T. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110008621 US Patent Application 12/827507; 20110008621	patent-application	January 2011
LIGHT EMITTING DIODES WITH SMOOTH SURFACE FOR REFLECTIVE ELECTRODE Lin, Chao-Kun; Liu, Heng https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110008923 US Patent Application 12/834747; 20110008923	patent-application	January 2011
METHOD AND APPARATUS FOR PRODUCING LARGE, SINGLE-CRYSTALS OF ALUMINUM NITRIDE Schowalter, Leo J.; Slack, Glen A.; Rojo, J. Carlos https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110011332 US Patent Application 12/841350; 20110011332	patent-application	January 2011
GROWTH OF LARGE ALUMINUM NITRIDE SINGLE CRYSTALS WITH THERMAL-GRADIENT CONTROL Bondokov, Robert T.; Rao, Shailaja P.; Gibb, Shawn Robert https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120000414 US Patent Application 13/173213; 20120000414	patent-application	January 2012
POLYCRYSTALLINE ALUMINUM NITRIDE MATERIAL AND METHOD OF PRODUCTION THEREOF Moody, Baxter; Dalmau, Rafael; Henshall, David https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120021175 US Patent Application 13/185544; 20120021175	patent-application	January 2012
THICK PSEUDOMORPHIC NITRIDE EPITAXIAL LAYERS Grandusky, James R.; Schowalter, Leo J.; Gibb, Shawn R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120104355 US Patent Application 13/298570; 20120104355	patent-application	May 2012
P-CONTACT AND LIGHT-EMITTING DIODE FOR THE ULTRAVIOLET SPECTRAL RANGE Kneissl, Michael; Weyers, Markus; Einfeldt, Sven https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120146047 US Patent Application 13/384208; 20120146047	patent-application	June 2012
LIGHT EMITTING DEVICES, SYSTEMS, AND METHODS OF MANUFACTURING Chen, Wenxin; Zhong, Zhibai; Leung, Charles Siu Huen https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130026525 US Patent Application 13/624937; 20130026525	patent-application	January 2013
ULTRAVIOLET LIGHT EMITTING DEVICES HAVING ENHANCED LIGHT EXTRACTION Northrup, John E.; Chua, Christopher L.; Kneissl, Michael https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130082237 US Patent Application 13/328783; 20130082237	patent-application	April 2013
ULTRAVIOLET LIGHT EMITTING DEVICE INCORPORTING OPTICALLY ABSORBING LAYERS Chua, Christopher L. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130099141 US Patent Application 13/096988; 20130099141	patent-application	April 2013
LARGE ALUMINUM NITRIDE CRYSTALS WITH REDUCED DEFECTS AND METHODS OF MAKING THEM Bondokov, Robert T.; Morgan, Kenneth E.; Slack, Glen A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130152852 US Patent Application 13/706966; 20130152852	patent-application	June 2013
DEFECT REDUCTION IN SEEDED ALUMINUM NITRIDE CRYSTAL GROWTH Bondokov, Robert T.; Morgan, Kenneth E.; Schowalter, Leo https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130157442 US Patent Application 13/669630; 20130157442	patent-application	June 2013
METHOD AND APPARATUS FOR PRODUCING LARGE, SINGLE-CRYSTALS OF ALUMINUM NITRIDE Schowalter, Leo; Slack, Glen A.; Rojo, Juan Carlos https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140061666 US Patent Application 13/974710; 20140061666	patent-application	March 2014
LARGE ALUMINUM NITRIDE CRYSTALS WITH REDUCED DEFECTS AND METHODS OF MAKING THEM Bondokov, Robert; Morgan, Kenneth E.; Slack, Glen A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140093671 US Patent Application 14/051566; 20140093671	patent-application	April 2014
PHOTON EXTRACTION FROM NITRIDE ULTRAVIOLET LIGHT-EMITTING DEVICES Schowalter, Leo J.; Chen, Jianfeng; Grandusky, James R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140203311 US Patent Application 13/553093; 20140203311	patent-application	July 2014
DOPED ALUMINUM NITRIDE CRYSTALS AND METHODS OF MAKING THEM Slack, Glen A.; Schowalter, Leo J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140231725 US Patent Application 14/225999; 20140231725	patent-application	August 2014
PSEUDOMORPHIC ELECTRONIC AND OPTOELECTRONIC DEVICES HAVING PLANAR CONTACTS Grandusky, James R.; Schowalter, Leo J.; Jamil, Muhammad https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140264263 US Patent Application 14/208379; 20140264263	patent-application	September 2014
DEFECT REDUCTION IN SEEDED ALUMINUM NITRIDE CRYSTAL GROWTH Bondokov, Robert T.; Morgan, Kenneth E.; Schowalter, Leo J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20150020731 US Patent Application 14/458861; 20150020731	patent-application	January 2015
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