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Title: Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale

Patent ·
OSTI ID:1349672
; ; ; ; ; ; ; ;

An enhanced mechanical design of multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale is provided. The precision alignment apparatus includes a zone plate alignment base frame; a plurality of zone plates; and a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing. At least one respective positioning stage drives and positions each respective zone plate holder. Each respective positioning stage is mounted on the zone plate alignment base frame. A respective linkage component connects each respective positioning stage and the respective zone plate holder. The zone plate alignment base frame, each zone plate holder and each linkage component is formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus.

Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-06CH11357
Assignee:
UChicago Argonne LLC
Patent Number(s):
9,613,729
Application Number:
14/282,281
OSTI ID:
1349672
Resource Relation:
Patent File Date: 2014 May 20
Country of Publication:
United States
Language:
English

References (9)

Optical system for high resolution spectrometer/monochromator patent October 1988
Air bag deployment trigger sensor with sacrificial waveguide patent October 1998
Optical design for laser encoder resolution extension and angular measurement patent April 1999
Redundantly constrained laminar structure as weak-link mechanisms patent August 2003
Redundantly constrained laminar structure as weak-link mechanisms patent January 2006
Multidimensional alignment apparatus for hard x-ray focusing with two multilayer laue lenses patent October 2009
Instrument for endoscope and instrument system for endoscope patent June 2010
Mechanical design of laminar weak-link rotary mechanisms with ten-degree-level travel range and ten-nanoradian-level positioning resolution patent January 2012
Compound X-ray lens having multiple aligned zone plates patent September 2013

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