Enhanced dielectric and piezoelectric responses in Zn1-xMgxO thin films near the phase separation boundary
Abstract
Dielectric and piezoelectric properties for Zn1-xMgxO (ZMO) thin films are reported as a function of MgO composition up to and including the phase separation region. Zn1-xMgxO (0.25 ≤ x ≤ 0.5) thin films with c-axis textures were deposited by pulsed laser deposition on platinized sapphire substrates. The films were phase pure wurtzite for MgO concentrations up to 40%; above that limit, a second phase with rocksalt structure evolves with strong {100} texture. With increasing MgO concentration, the out-of-plane (d33,f) and in-plane (e31,f) piezoelectric coefficients increase by 360% and 290%, respectively. The increase in piezoelectric coefficients is accompanied by a 35% increase in relative permittivity. Loss tangent values fall monotonically with increasing MgO concentration, reaching a minimum of 0.001 for x ≥ 0.30, at which point the band gap is reported to be 4 eV. As a result, the enhanced piezoelectric response, the large band gap, and the low dielectric loss make Zn1-xMgxO an interesting candidate for thin film piezoelectric devices, and demonstrate that compositional phase transformations provide opportunities for property engineering.
- Authors:
-
- North Carolina State Univ., Raleigh, NC (United States)
- Pennsylvania State Univ., University Park, PA (United States)
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1346412
- Report Number(s):
- SAND-2017-2113J
Journal ID: ISSN 0003-6951; 651146; TRN: US1700950
- Grant/Contract Number:
- AC04-94AL85000
- Resource Type:
- Journal Article: Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 110; Journal Issue: 4; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Kang, Xiaoyu, Shetty, Smitha, Garten, Lauren, Ihlefeld, Jon F., Trolier-McKinstry, Susan, and Maria, Jon -Paul. Enhanced dielectric and piezoelectric responses in Zn1-xMgxO thin films near the phase separation boundary. United States: N. p., 2017.
Web. doi:10.1063/1.4973756.
Kang, Xiaoyu, Shetty, Smitha, Garten, Lauren, Ihlefeld, Jon F., Trolier-McKinstry, Susan, & Maria, Jon -Paul. Enhanced dielectric and piezoelectric responses in Zn1-xMgxO thin films near the phase separation boundary. United States. https://doi.org/10.1063/1.4973756
Kang, Xiaoyu, Shetty, Smitha, Garten, Lauren, Ihlefeld, Jon F., Trolier-McKinstry, Susan, and Maria, Jon -Paul. 2017.
"Enhanced dielectric and piezoelectric responses in Zn1-xMgxO thin films near the phase separation boundary". United States. https://doi.org/10.1063/1.4973756. https://www.osti.gov/servlets/purl/1346412.
@article{osti_1346412,
title = {Enhanced dielectric and piezoelectric responses in Zn1-xMgxO thin films near the phase separation boundary},
author = {Kang, Xiaoyu and Shetty, Smitha and Garten, Lauren and Ihlefeld, Jon F. and Trolier-McKinstry, Susan and Maria, Jon -Paul},
abstractNote = {Dielectric and piezoelectric properties for Zn1-xMgxO (ZMO) thin films are reported as a function of MgO composition up to and including the phase separation region. Zn1-xMgxO (0.25 ≤ x ≤ 0.5) thin films with c-axis textures were deposited by pulsed laser deposition on platinized sapphire substrates. The films were phase pure wurtzite for MgO concentrations up to 40%; above that limit, a second phase with rocksalt structure evolves with strong {100} texture. With increasing MgO concentration, the out-of-plane (d33,f) and in-plane (e31,f) piezoelectric coefficients increase by 360% and 290%, respectively. The increase in piezoelectric coefficients is accompanied by a 35% increase in relative permittivity. Loss tangent values fall monotonically with increasing MgO concentration, reaching a minimum of 0.001 for x ≥ 0.30, at which point the band gap is reported to be 4 eV. As a result, the enhanced piezoelectric response, the large band gap, and the low dielectric loss make Zn1-xMgxO an interesting candidate for thin film piezoelectric devices, and demonstrate that compositional phase transformations provide opportunities for property engineering.},
doi = {10.1063/1.4973756},
url = {https://www.osti.gov/biblio/1346412},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 4,
volume = 110,
place = {United States},
year = {Mon Jan 23 00:00:00 EST 2017},
month = {Mon Jan 23 00:00:00 EST 2017}
}
Web of Science
Works referenced in this record:
Multifunctional ZnO-Based Thin-Film Bulk Acoustic Resonator for Biosensors
journal, April 2009
- Chen, Ying; Reyes, Pavel I.; Duan, Ziqing
- Journal of Electronic Materials, Vol. 38, Issue 8
Microstructure and polarity of epitaxial ZnO films grown on LSAT(111) substrate studied by transmission electron microscopy
journal, May 2005
- Liu, Yu-Zi; Ying, M. J.; Du, X. L.
- Physics Letters A, Vol. 339, Issue 6
Increased electromechanical coupling in w−ScxAl1−xN
journal, September 2010
- Wingqvist, Gunilla; Tasnádi, Ferenc; Zukauskaite, Agne
- Applied Physics Letters, Vol. 97, Issue 11
Electrode size dependence of piezoelectric response of lead zirconate titanate thin films measured by double beam laser interferometry
journal, September 2013
- Sivaramakrishnan, S.; Mardilovich, P.; Mason, A.
- Applied Physics Letters, Vol. 103, Issue 13
a-plane MgxZn1−xO films deposited on r-sapphire and its surface acoustic wave characteristics
journal, July 2007
- Chen, Ying; Saraf, Gaurav; Lu, Yicheng
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 25, Issue 4
Improvement in the crystallinity of ZnO thin films by introduction of a buffer layer
journal, May 2002
- Nakamura, Toshiyuki; Yamada, Yasusei; Kusumori, Takeshi
- Thin Solid Films, Vol. 411, Issue 1
Preparation of Zn1−xMgxO films by radio frequency magnetron sputtering
journal, September 2000
- Minemoto, Takashi; Negami, Takayuki; Nishiwaki, Shiro
- Thin Solid Films, Vol. 372, Issue 1-2
Infrared optical properties of MgxZn1−xO thin films (0⩽x⩽1): Long-wavelength optical phonons and dielectric constants
journal, June 2006
- Bundesmann, C.; Rahm, A.; Lorenz, M.
- Journal of Applied Physics, Vol. 99, Issue 11
A sensitive double beam laser interferometer for studying high‐frequency piezoelectric and electrostrictive strains
journal, August 1989
- Pan, W. Y.; Cross, L. E.
- Review of Scientific Instruments, Vol. 60, Issue 8
Piezoelectric Al 1−x Sc x N thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors
journal, April 2013
- Matloub, R.; Hadad, M.; Mazzalai, A.
- Applied Physics Letters, Vol. 102, Issue 15
Origin of the Anomalous Piezoelectric Response in Wurtzite Alloys
journal, April 2010
- Tasnádi, Ferenc; Alling, Björn; Höglund, Carina
- Physical Review Letters, Vol. 104, Issue 13
Characteristics of Mg/sub x/Zn/sub 1-x/O thin film bulk acoustic wave devices
journal, October 2003
- Wittstruck, R. H.; Emanetoglu, N. W.
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 50, Issue 10
Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
journal, December 2008
- Akiyama, Morito; Kamohara, Toshihiro; Kano, Kazuhiko
- Advanced Materials, Vol. 21, Issue 5
Determination of crystallographic polarity of ZnO layers
journal, October 2005
- Tampo, H.; Fons, P.; Yamada, A.
- Applied Physics Letters, Vol. 87, Issue 14
Crystalline coherence length effects on the thermal conductivity of MgO thin films
journal, August 2016
- Meyer, Kelsey E.; Cheaito, Ramez; Paisley, Elizabeth
- Journal of Materials Science, Vol. 51, Issue 23
Bandgap in Al 1− x Sc x N
journal, March 2013
- Deng, Ruopeng; Evans, Sarah R.; Gall, Daniel
- Applied Physics Letters, Vol. 102, Issue 11
Chemically Homogeneous Complex Oxide Thin Films Via Improved Substrate Metallization
journal, March 2012
- Shelton, Christopher T.; Kotula, Paul G.; Brennecka, Geoff L.
- Advanced Functional Materials, Vol. 22, Issue 11
Reactive magnetron sputtering of ZnO
journal, July 1981
- Khuri‐Yakub, B. T.; Smits, J. G.; Barbee, T.
- Journal of Applied Physics, Vol. 52, Issue 7
Studies on Mg/sub x/Zn/sub 1-x/O thin film resonator for mass sensor application
conference, January 2005
- Ying Chen, ; Saraf, G.; Wittstruck, R. H.
- Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005.
Wafer mapping of the transverse piezoelectric coefficient, e31,f, using the wafer flexure technique with sputter deposited Pt strain gauges
journal, January 2012
- Wilke, Rudeger H. T.; Moses, Paul J.; Jousse, Pierre
- Sensors and Actuators A: Physical, Vol. 173, Issue 1
Thin Film Piezoelectrics for MEMS
journal, January 2004
- Trolier-McKinstry, S.; Muralt, P.
- Journal of Electroceramics, Vol. 12, Issue 1/2
Mg/sub x/Zn/sub 1-x/O: a new piezoelectric material
journal, May 2003
- Emanetoglu, N. W.; Muthukumar, S. N.
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 50, Issue 5
Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications
journal, July 2011
- Moreira, Milena; Bjurström, Johan; Katardjev, Ilia
- Vacuum, Vol. 86, Issue 1
Acoustic investigation of the elastic properties of ZnO films
journal, December 1987
- Carlotti, G.; Socino, G.; Petri, A.
- Applied Physics Letters, Vol. 51, Issue 23
MgxZn1−xO as a II–VI widegap semiconductor alloy
journal, May 1998
- Ohtomo, A.; Kawasaki, M.; Koida, T.
- Applied Physics Letters, Vol. 72, Issue 19
Molecular Beam Epitaxy of High Magnesium Content Single-Phase Wurzite Mg x Zn 1-x O Alloys ($x\simeq 0.5$) and Their Application to Solar-Blind Region Photodetectors
journal, April 2003
- Takagi, Tsuyoshi; Tanaka, Hiroshi; Fujita, Shizuo
- Japanese Journal of Applied Physics, Vol. 42, Issue Part 2, No. 4B
Theoretical study of the relative stability of wurtzite and rocksalt phases in MgO and GaN
journal, February 2001
- Limpijumnong, Sukit; Lambrecht, Walter R. L.
- Physical Review B, Vol. 63, Issue 10
A morphotropic phase boundary system based on polarization rotation and polarization extension
journal, August 2010
- Damjanovic, Dragan
- Applied Physics Letters, Vol. 97, Issue 6
Works referencing / citing this record:
Enhanced piezoelectric response of AlN via CrN alloying
text, January 2017
- Manna, Sukriti; Talley, Kevin R.; Gorai, Prashun
- arXiv