skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Enhanced metallic properties of SrRuO3 thin films via kinetically controlled pulsed laser epitaxy

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4964882· OSTI ID:1339394
 [1];  [2];  [2];  [3];  [1]; ORCiD logo [1];  [1];  [4];  [4];  [3];  [2]; ORCiD logo [5];  [1]
  1. Univ. of Kentucky, Lexington, KY (United States). Dept. of Physics and Astronomy
  2. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Materials Science and Technology Division
  3. Korea Advanced Inst. of Science and Technology (KAIST), Daejeon (Korea, Republic of). Dept. of Physics
  4. The Ohio State Univ., Columbus, OH (United States). Dept. of Materials Science and Engineering
  5. Ewha Womans Univ., Seoul (Korea, Republic of). Dept. of Physics

Metal electrodes are a universal element of all electronic devices. Conducting SrRuO3 (SRO) epitaxial thin films have been extensively used as electrodes in complex-oxide heterostructures due to good lattice mismatches with perovskite substrates. However, when compared to SRO single crystals, SRO thin films have shown reduced conductivity and Curie temperatures (TC), which can lead to higher Joule heating and energy loss in the devices. In this paper, we report that high-quality SRO thin films can be synthesized by controlling the plume dynamics and growth rate of pulsed laser epitaxy (PLE) with real-time optical spectroscopic monitoring. The SRO thin films grown under the kinetically controlled conditions, down to ca. 16 nm in thickness, exhibit both enhanced conductivity and TC as compared to bulk values, due to their improved stoichiometry and a strain-mediated increase of the bandwidth of Ru 4d electrons. Finally, this result provides a direction for enhancing the physical properties of PLE-grown thin films and paves a way to improved device applications.

Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States); Univ. of Kentucky, Lexington, KY (United States); Korea Advanced Inst. of Science and Technology (KAIST), Daejeon (Korea, Republic of)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF); National Research Foundation of Korea (NRF); Korea Inst. of Science and Technology Information (KISTI) (Korea, Republic of)
Contributing Organization:
Ewha Womans Univ., Seoul (Korea, Republic of); The Ohio State Univ., Columbus, OH (United States)
Grant/Contract Number:
AC05-00OR22725; DMR-1454200; 2014R1A1A2057202; KSC-2014-C2-046
OSTI ID:
1339394
Alternate ID(s):
OSTI ID: 1420535
Journal Information:
Applied Physics Letters, Vol. 109, Issue 16; ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 18 works
Citation information provided by
Web of Science

References (34)

Epitaxial thin films of isotropic conductive oxides for devices journal March 1997
Recent progress in transparent oxide semiconductors: Materials and device application journal May 2007
Magnetic anisotropy of large floating-zone-grown single-crystals of SrRuO 3 : Magnetic anisotropy of large floating-zone-grown single-crystals of SrRuO journal March 2016
Research Update: Interface-engineered oxygen octahedral tilts in perovskite oxide heterostructures journal June 2015
Critical thickness for itinerant ferromagnetism in ultrathin films of SrRuO 3 journal April 2009
Single-Crystal Growth of a Perovskite Ruthenate SrRuO 3 by the Floating-Zone Method journal October 2015
Thickness-dependent electronic structure of ultrathin SrRuO3 films studied by in situ photoemission spectroscopy journal October 2005
Resistive Random Access Memory (ReRAM) Based on Metal Oxides journal December 2010
Enhanced Local Magnetization by Interface Engineering in Perovskite-Type Correlated Oxide Heterostructures journal January 2015
From ultrasoft pseudopotentials to the projector augmented-wave method journal January 1999
Understanding Oxide-Metal Interfaces journal October 1988
Silicon CMOS devices beyond scaling journal July 2006
Tunnel junctions with multiferroic barriers journal March 2007
Restoring the Density-Gradient Expansion for Exchange in Solids and Surfaces journal April 2008
Structure, physical properties, and applications of SrRuO 3 thin films journal March 2012
Correlation among disorder, electronic and magnetic phases of SrRuO 3 journal February 2015
Growth control of oxygen stoichiometry in homoepitaxial SrTiO3 films by pulsed laser epitaxy in high vacuum journal January 2016
Optical investigation of the electronic structures of Y 2 Ru 2 O 7 , CaRuO 3 , SrRuO 3 , and Bi 2 Ru 2 O 7 journal December 2001
Emergent phenomena at oxide interfaces journal January 2012
Current Development Status and Future Challenges of Ferroelectric Random Access Memory Technologies journal April 2006
Sensitivity to Disorder of the Metallic State in the Ruthenates journal February 2002
Fundamental Thickness Limit of Itinerant Ferromagnetic SrRuO 3 Thin Films journal July 2009
The Promise of Nanomagnetics and Spintronics for Future Logic and Universal Memory journal December 2010
Stabilization of spin-zero Ru 4 + through epitaxial strain in SrRuO 3 thin films journal December 2013
Alleviating polarity-conflict at the heterointerfaces of KTaO 3 /GdScO 3 polar complex-oxides journal September 2014
Nanopiezotronics journal March 2007
Reduced ferromagnetic transition temperatures in Sr Ru 1 v O 3 perovskites from Ru-site vacancies journal July 2004
A fast, high-endurance and scalable non-volatile memory device made from asymmetric Ta2O5−x/TaO2−x bilayer structures journal July 2011
Thickness-Dependent Structure-Property Relationships in Strained (110) SrRuO 3 Thin Films journal October 2012
High-Speed, Low-Voltage, and Environmentally Stable Operation of Electrochemically Gated Zinc Oxide Nanowire Field-Effect Transistors journal November 2012
Epitaxial strain effect in tetragonal SrRuO 3 thin films journal May 2013
Pulsed laser deposition with simultaneous in situ real-time monitoring of optical spectroscopic ellipsometry and reflection high-energy electron diffraction journal April 2013
Magnetic Oxide Heterostructures journal July 2014
Transport properties, thermodynamic properties, and electronic structure of SrRuO 3 journal February 1996

Cited By (8)

Magnetic ground state of SrRuO3 thin film and applicability of standard first-principles approximations to metallic magnetism journal July 2017
Enhanced magnetic and thermoelectric properties in epitaxial polycrystalline SrRuO 3 thin films journal January 2018
Tailoring the electronic properties of Ca 2 RuO 4 via epitaxial strain journal January 2018
Epitaxial integration and properties of SrRuO 3 on silicon journal August 2018
Machine-learning-assisted thin-film growth: Bayesian optimization in molecular beam epitaxy of SrRuO 3 thin films journal October 2019
Magnetic ground state of SrRuO$_3$ thin film and applicability of standard first-principles approximations to metallic magnetism text January 2017
Tailoring the electronic properties of Ca$_2$RuO$_4$ via epitaxial strain text January 2017
Enhanced magnetic and thermoelectric properties in epitaxial polycrystalline SrRuO3 thin film text January 2018