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Title: Capacitive microelectromechanical switches with dynamic soft-landing

Patent ·
OSTI ID:1338054
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A microelectromechanical system (MEMS)-based electrical switch. The electrical switch includes a moveable electrode, a dielectric layer positioned adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the moveable electrode is in an inactivated position and in contact with the moveable electrode when the moveable electrode is in an activated position, and a substrate attached to the dielectric layer on a second side opposite to the first side, the moveable electrode is configured to brake prior to coming in contact with the dielectric layer when the moveable electrode is switched between the inactivated state and the activated state.

Research Organization:
Purdue Univ., West Lafayette, IN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FC52-08NA28617
Assignee:
PURDUE RESEARCH FOUNDATION (West Lafayette, IN)
Patent Number(s):
9,536,692
Application Number:
14/881,185
OSTI ID:
1338054
Resource Relation:
Patent File Date: 2015 Oct 13
Country of Publication:
United States
Language:
English

References (5)

State indicating relay patent November 1992
Micro-electromechanical relays patent July 2000
Contact unit for electromagnetic relays patent October 2001
Capacitive RF-MEMS device with integrated decoupling capacitor patent August 2012
MEMs devices patent December 2012

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