Three-dimensional patterning methods and related devices

Putnam, Morgan C.; Kelzenberg, Michael D.; Atwater, Harry A.; Boettcher, Shannon W.; Lewis, Nathan S.; Spurgeon, Joshua M.; Turner-Evans, Daniel B.; Warren, Emily L.

Title: Three-dimensional patterning methods and related devices

Patent · Tue Dec 27 00:00:00 EST 2016

OSTI ID:1337625

Putnam, Morgan C.; Kelzenberg, Michael D.; Atwater, Harry A.; Boettcher, Shannon W.; Lewis, Nathan S.; Spurgeon, Joshua M.; Turner-Evans, Daniel B.; Warren, Emily L.

Three-dimensional patterning methods of a three-dimensional microstructure, such as a semiconductor wire array, are described, in conjunction with etching and/or deposition steps to pattern the three-dimensional microstructure.

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Research Organization:: The California Institute of Technology, Pasadena, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: SC0001293; FG02-07ER46405

Assignee:: The California Institute of Technology (Pasadena, CA)

Patent Number(s):: 9,530,912

Application Number:: 12/956,422

OSTI ID:: 1337625

Resource Relation:: Patent File Date: 2010 Nov 30

Country of Publication:: United States

Language:: English

References (177)

High speed edge illumination photodetector Childs, Richard B.; Zory, Jr., Peter S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4358676 US Patent Document 4,358,676	patent	November 1982
Method for the controlled growth of crystal whiskers and application thereof to the making of tip microcathodes Pribat, Didier; Leclerc, Pierre; Legagneux, Pierre https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5314569 US Patent Document 5,314,569	patent	May 1994
Composite article comprising oriented microstructures Debe, Mark K. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5336558 US Patent Document 5,336,558	patent	August 1994
Nanostructured imaging transfer element Debe, Mark K.; Kam, Kam K.; Poirier, Richard J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5352651 US Patent Document 5,352,651	patent	October 1994
Photovoltaic conversion device and method for producing same Ishikawa, Nobuyuki; Saito, Keishi; Kawakami, Soichiro https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5656098 US Patent Document 5,656,098	patent	August 1997
Method of making silicon quantum wires on a substrate Westwater, Jonathan; Gosain, Dharam Pal; Nakagoe, Miyako https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5976957 US Patent Document 5,976,957	patent	November 1999
Method and apparatus for growing oriented whisker arrays Givargizov, Evgeny Invievich https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6306734 US Patent Document 6,306,734	patent	October 2001
Silicon structure, method for producing the same, and solar battery using the silicon structure Shibuya, Munehiro; Kitagawa, Masatoshi; Mukai, Yuuji https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6518494 US Patent Document 6,518,494	patent	February 2003
Photoelectric conversion device and method of production thereof Den, Tohru; Okura, Hiroshi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6649824 US Patent Document 6,649,824	patent	November 2003
Nanofiber surface based capacitors Chow, Calvin Y. H.; Dubrow, Robert S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7057881 US Patent Document 7,057,881	patent	June 2006
Systems and methods for nanowire growth and harvesting Pan, Yaoling; Duan, Xiangfeng; Dubrow, Robert S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7105428 US Patent Document 7,105,428	patent	September 2006
Method of making an enhanced optical absorption and radiation tolerance in thin-film solar cells and photodetectors Zaidi, Saleem H. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7109517 US Patent Document 7,109,517	patent	September 2006
Nanofiber surface based capacitors Chow, Calvin Y. H.; Dubrow, Robert S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7116546 US Patent Document 7,116,546	patent	October 2006
GaP/silicon tandem solar cell with extended temperature range Landis, Geoffrey A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7148417 US Patent Document 7,148,417	patent	December 2006
Controlled nanowire growth in permanent, integrated nano-templates and methods of fabricating sensor and transducer structures Fonash, Stephen J.; Shan, Yinghui; Peng, Chih-Yi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7238594 US Patent Document 7,238,594	patent	July 2007
Molding technique for fabrication of optoelectronic devices Roscheisen, Martin R.; Sager, Brian M.; Fidanza, Jacqueline https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7253017 US Patent Document 7,253,017	patent	August 2007
Thermal interface material with carbon nanotubes Huang, Hua; Liu, Chang-Hong; Fan, Shou-Shan https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7253442 US Patent Document 7,253,442	patent	August 2007
Use of sacrificial layers in the manufacture of high performance systems on tailored substrates Fonash, Stephen J.; Li, Handong; Lee, Youngchul https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7309620 US Patent Document 7,309,620	patent	December 2007
Growth of single crystal nanowires Hanrath, Tobias; Lu, Xianmao; Johnston, Keith P. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7335259 US Patent Document 7,335,259	patent	February 2008
Nanowire horizontal growth and substrate removal Romano, Linda; Mostarshed, Shahriar https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7560366 US Patent Document 7,560,366	patent	July 2009
Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices Lieber, Charles M.; Cui, Yi; Duan, Xiangfeng https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7666708 US Patent Document 7,666,708	patent	February 2010
Methods of fabricating nanostructures and nanowires and devices fabricated therefrom Majumdar, Arun; Shakouri, Ali; Sands, Timothy D. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020172820 US Patent Document 10/112698; 20020172820	patent-application	November 2002
Nanoscale coherent optical components Lieber, Charles M.; Duan, Xiangfeng; Huang, Yu https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040213307 US Patent Document 10/734086; 20040213307	patent-application	October 2004
Photovoltaic devices fabricated from nanostructured template Roscheisen, Martin; Sager, Brian; Pichler, Karl https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050098204 US Patent Application 10/771092; 20050098204	patent-application	May 2005
Silicon optoelectronic device using silicon nanowire and method for preparing the same Choi, Heon Jin; Lee, Jung-Chul; Park, Young Ju https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050253138 US Patent Document 11/012698; 20050253138	patent-application	November 2005
Systems and methods for nanowire growth and manufacturing Niu, Chunming; Goldman, Jay L.; Duan, Xiangfeng https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050279274 US Patent Document 11/103642; 20050279274	patent-application	December 2005
Thermal interface material and method for manufacturing same Leu, Charles; Yu, Tai-Cheng; Chen, Ga-Lane https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060118791 US Patent Document 11/021923; 20060118791	patent-application	June 2006
High efficiency inorganic nanorod-enhanced photovoltaic devices Tsakalakos, Loucas; Lee, Ji-Ung; Korman, Charles https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060207647 US Patent Application 11/081967; 20060207647	patent-application	September 2006
Nanowire device and method of fabricating the same Lee, Hyo-sug; Lee, Sung-hoon; Jin, Young-gu https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070032076 US Patent Document 11/406255; 20070032076	patent-application	February 2007
Nanochannel apparatus and method of fabricating Li, Zhiyong; Islam, M. Saif; Wang, Shih-Yuan https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070122313 US Patent Application 11/291019; 20070122313	patent-application	May 2007
Method of synthesizing silicon wires Yao, Yuan; Xu, Li-Guo; Fan, Shou-Shan https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070166899 US Patent Document 11/525440; 20070166899	patent-application	July 2007
Method of manufacturing silicon nanowires using porous glass template and device comprising silicon nanowires formed by the same Lee, Eun Kyung; Choi, Byoung Lyong; Kwon, Soon Jae https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070232028 US Patent Document 11/444115; 20070232028	patent-application	October 2007
Optoelectronic devices utilizing materials having enhanced electronic transitions Black, Marcie R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070278476 US Patent Document 11/712128; 20070278476	patent-application	December 2007
Photovoltaic And Photosensing Devices Based On Arrays Of Aligned Nanostructures Bettge, Martin; Burdin, Stephan; MacLaren, Scott https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080006319 US Patent Application 11/758599; 20080006319	patent-application	January 2008
Nanowires in thin-film silicon solar cells Korevaar, Bastiaan Arie; Tsakalakos, Loucas https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080047604 US Patent Document 11/509886; 20080047604	patent-application	February 2008
Nanosized,dye-sensitized photovoltaic cell Liang, Yong; Candelaria, Jon J.; Eisenbeiser, Kurt W. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080072961 US Patent Document 11/528124; 20080072961	patent-application	March 2008
Nanostructure-reinforced composite articles and methods Wardle, Brian L.; Hart, Anastasios John; Garcia, Enrique J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080075954 US Patent Document 11/895621; 20080075954	patent-application	March 2008
Amorphous-crystalline tandem nanostructured solar cells Tsakalakos, Loucas; Korevaar, Bastiaan Arie https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080110486 US Patent Document 11/599677; 20080110486	patent-application	May 2008
Computer-Assisted Web Services Access Application Program Generation Adachi, Hisatoshi; Hara, Masao; Inoue, Motoharu https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080134089 US Patent Document 11/942870; 20080134089	patent-application	June 2008
Multilayered Film-Nanowire Composite, Bifacial, and Tandem Solar Cells Korevaar, Bastiaan Arie; Tsakalakos, Loucas https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080169017 US Patent Document 11/622275; 20080169017	patent-application	July 2008
Nanostructured Solar Cells Flood, Dennis J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080276987 US Patent Application 12/108500; 20080276987	patent-application	November 2008
Nanowire vias Weber, Walter M.; Kreupl, Franz; Unger, Eugen https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080315430 US Patent Document 11/767066; 20080315430	patent-application	December 2008
Structures of Ordered Arrays of Semiconductors Atwater, Harry A.; Kayes, Brendan M.; Lewis, Nathan S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090020150 US Patent Document 12/176057; 20090020150	patent-application	January 2009
Structures of and Methods for Forming Vertically Aligned Si Wire Arrays Kayes, Brendan M.; Filler, Michael A.; Lewis, Nathan S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090020853 US Patent Document 12/176099; 20090020853	patent-application	January 2009
Photovoltaic Device Using Nanostructured Material Habib, Youssef https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090050204 US Patent Document 12/185773; 20090050204	patent-application	February 2009
Polymer-Embedded Semiconductor Rod Arrays Lewis, Nathan S.; Plass, Katherine E.; Spurgeon, Joshua M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090057839 US Patent Document 12/176065; 20090057839	patent-application	March 2009
Systems and Methods for Nanowire Growth Taylor, David https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090127540 US Patent Document 11/935884; 20090127540	patent-application	May 2009
Method for producing catalyst-free single crystal silicon nanowires, nanowires produced by the method and nanodevice comprising the nanowires Lee, Eun Kyung; Whang, Dongmok; Choi, Byoung Lyong https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090152527 US Patent Document 12/128362; 20090152527	patent-application	June 2009
Photovoltaic Wire Habib, Youssef; Steinbeck, John https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090266411 US Patent Document 11/917505; 20090266411	patent-application	October 2009
Techniques for Use of Nanotechnology in Photovoltaics Guha, Supratik; Hamann, Hendrik; Tutuc, Emanuel https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100108131 US Patent Application 12/544066; 20100108131	patent-application	May 2010
Nanowire Multijunction Solar Cell Karg, Siegfried https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100175748 US Patent Application 12/404406; 20100175748	patent-application	July 2010
Nanowire Photodiodes Bratkovski, Alexandre; Osipov, Viatcheslav https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110096218 US Patent Application 12/606947; 20110096218	patent-application	April 2011
Flexible Polymer-Embedded Si Wire Arrays Plass, Katherine E.; Filler, Michael A.; Spurgeon, Joshua M. Advanced Materials, Vol. 21, Issue 3, p. 325-328 https://doi.org/10.1002/adma.200802006	journal	January 2009
Silicon Nanowire Radial p−n Junction Solar Cells Garnett, Erik C.; Yang, Peidong Journal of the American Chemical Society, Vol. 130, Issue 29, p. 9224-9225 https://doi.org/10.1021/ja8032907	journal	June 2008
High Aspect Ratio Silicon Wire Array Photoelectrochemical Cells Maiolo, James R.; Kayes, Brendan M.; Filler, Michael A. Journal of the American Chemical Society, Vol. 129, Issue 41, p. 12346-12347 https://doi.org/10.1021/ja074897c	journal	October 2007
Comparison of the device physics principles of planar and radial p-n junction nanorod solar cells Kayes, Brendan M.; Atwater, Harry A.; Lewis, Nathan S. Journal of Applied Physics, Vol. 97, Issue 11, Article No. 114302 https://doi.org/10.1063/1.1901835	journal	June 2005
Growth of vertically aligned Si wire arrays over large areas (>1cm²) with Au and Cu catalysts Kayes, Brendan M.; Filler, Michael A.; Putnam, Morgan C. Applied Physics Letters, Vol. 91, Issue 10, 103110 https://doi.org/10.1063/1.2779236	journal	September 2007
Single-nanowire Si solar cells Kelzenberg, M. D.; Turner-Evans, D. B.; Kayes, B. M. 2008 33rd IEEE Photovolatic Specialists Conference (PVSC) https://doi.org/10.1109/PVSC.2008.4922736	conference	May 2008
Predicted efficiency of Si wire array solar cells Kelzenberg, M. D.; Putnam, M. C.; Turner-Evans, D. B. 2009 34th IEEE Photovoltaic Specialists Conference (PVSC) https://doi.org/10.1109/PVSC.2009.5411542	conference	June 2009
Validation of a Photovoltaic Module Energy Ratings Procedure at NREL Marion, B.; Kroposki, B.; Emery, K. https://doi.org/10.2172/12187 NREL/TP-520-26909	report	August 1999
10 μm minority-carrier diffusion lengths in Si wires synthesized by Cu-catalyzed vapor-liquid-solid growth Putnam, Morgan C.; Turner-Evans, Daniel B.; Kelzenberg, Michael D. Applied Physics Letters, Vol. 95, Issue 16, 163116 https://doi.org/10.1063/1.3247969	journal	October 2009
Limiting efficiency of silicon solar cells Tiedje, T.; Yablonovitch, E.; Cody, G.D. IEEE Transactions on Electron Devices, Vol. 31, Issue 5, p. 711-716 https://doi.org/10.1109/T-ED.1984.21594	journal	May 1984
Unusually Low Surface-Recombination Velocity on Silicon and Germanium Surfaces Yablonovitch, E.; Allara, D. L.; Chang, C. C. Physical Review Letters, Vol. 57, Issue 2, p. 249-252 https://doi.org/10.1103/PhysRevLett.57.249	journal	July 1986
Statistical ray optics Yablonovitch, Eli Journal of the Optical Society of America, Vol. 72, Issue 7, p. 899-907 https://doi.org/10.1364/JOSA.72.000899	journal	July 1982
Impurity effects in silicon for high efficiency solar cells Hopkins, R. H.; Rohatgi, A. Journal of Crystal Growth, Vol. 75, Issue 1, p. 67-79 https://doi.org/10.1016/0022-0248(86)90226-5	journal	May 1986
Analysis of Optical Absorption in Silicon Nanowire Arrays for Photovoltaic Applications Hu, Lu; Chen, Gang Nano Letters, Vol. 7, Issue 11, p. 3249-3252 https://doi.org/10.1021/nl071018b	journal	October 2007
Fabrication of Silicon Nanowire Arrays with Controlled Diameter, Length, and Density Huang, Z.; Fang, H.; Zhu, J. Advanced Materials, Vol. 19, Issue 5, p. 744-748 https://doi.org/10.1002/adma.200600892	journal	March 2007
Hybrid Nanorod-Polymer Solar Cells Huynh, W. U.; Dittmer, Janke J.; Alivisatos, A. Paul Science, Vol. 295, Issue 5564, p. 2425-2427 https://doi.org/10.1126/science.1069156	journal	March 2002
Hydrogen gas production for electronic-grade polycrystalline silicon growth Ismail, H.; Hashim, U.; Ehsan, A.A. ICSE 2002. IEEE International Conference on Semiconductor Electronics https://doi.org/10.1109/SMELEC.2002.1217774	conference	January 2002
A review of some charge transport properties of silicon Jacoboni, C.; Canali, C.; Ottaviani, G. Solid-State Electronics, Vol. 20, Issue 2, p. 77-89 https://doi.org/10.1016/0038-1101(77)90054-5	journal	February 1977
Semiconducting Cadmium Telluride Jenny, Dietrich A.; Bube, Richard H. Physical Review, Vol. 96, Issue 5, p. 1190-1191 https://doi.org/10.1103/PhysRev.96.1190	journal	December 1954
Aligned Carbon Nanotube−Polymer Hybrid Architectures for Diverse Flexible Electronic Applications Jung, Yung Joon; Kar, Swastik; Talapatra, Saikat Nano Letters, Vol. 6, Issue 3, p. 413-418 https://doi.org/10.1021/nl052238x	journal	February 2006
Hybrid solar cells with vertically aligned CdTe nanorods and a conjugated polymer Kang, Yoonmook; Park, Nam-Gyu; Kim, Donghwan Applied Physics Letters, Vol. 86, Issue 11, 113101 https://doi.org/10.1063/1.1883319	journal	March 2005
Well-aligned CdS nanorod/conjugated polymer solar cells Kang, Yoonmook; Kim, Donghwan Solar Energy Materials and Solar Cells, Vol. 90, Issue 2, p. 166-174 https://doi.org/10.1016/j.solmat.2005.03.001	journal	April 2005
Fabrication and properties of ultrasmall Si wire arrays with circuits by vapor–liquid–solid growth Kawano, Takeshi; Kato, Yoshiko; Futagawa, Masato Sensors and Actuators A: Physical, Vol. 97-98, p. 709-715 https://doi.org/10.1016/S0924-4247(02)00008-0	journal	April 2002
Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells Kelzenberg, Michael D.; Turner-Evans, Daniel B.; Kayes, Brendan M. Nano Letters, Vol. 8, Issue 2, p. 710-714 https://doi.org/10.1021/nl072622p	journal	February 2008
Enhanced absorption and carrier collection in Si wire arrays for photovoltaic applications Kelzenberg, Michael D.; Boettcher, Shannon W.; Petykiewicz, Jan A. Nature Materials, Vol. 9, Issue 3, p. 239-244 https://doi.org/10.1038/nmat2635	journal	February 2010
Single and Tandem Axial p-i-n Nanowire Photovoltaic Devices Kempa, Thomas J.; Tian, Bozhi; Kim, Dong Rip Nano Letters, Vol. 8, Issue 10, p. 3456-3460 https://doi.org/10.1021/nl8023438	journal	September 2008
Stretchable and Foldable Silicon Integrated Circuits Kim, D.-H.; Ahn, J.-H.; Choi, W. M. Science, Vol. 320, Issue 5875, p. 507-511 https://doi.org/10.1126/science.1154367	journal	April 2008
Synthesis of stoichiometric cadmium selenide films via sequential monolayer electrodeposition Kressin, Ann M.; Doan, Vincent V.; Klein, Jonathan D. Chemistry of Materials, Vol. 3, Issue 6, p. 1015-1020 https://doi.org/10.1021/cm00018a014	journal	November 1991
Dispersion, Wave Propagation and Efficiency Analysis of Nanowire Solar Cells Kupec, J.; Witzigmann, B. Optics Express, Vol. 17, Issue 12, p. 10399-10410 https://doi.org/10.1364/OE.17.010399	journal	June 2009
Epitaxial core–shell and core–multishell nanowire heterostructures Lauhon, Lincoln J.; Gudiksen, Mark S.; Wang, Deli Nature, Vol. 420, Issue 6911, p. 57-61 https://doi.org/10.1038/nature01141	journal	November 2002
SEMICONDUCTOR NANOWIRES AND NANOTUBES Law, Matt; Goldberger, Joshua; Yang, Peidong Annual Review of Materials Research, Vol. 34, Issue 1, p. 83-122 https://doi.org/10.1146/annurev.matsci.34.040203.112300	journal	August 2004
Nanowire dye-sensitized solar cells Law, Matt; Greene, Lori E.; Johnson, Justin C. Nature Materials, Vol. 4, Issue 6, p. 455-459 https://doi.org/10.1038/nmat1387	journal	May 2005
Solvent Compatibility of Poly(dimethylsiloxane)-Based Microfluidic Devices Lee, Jessamine Ng; Park, Cheolmin; Whitesides, George M. Analytical Chemistry, Vol. 75, Issue 23, p. 6544-6554 https://doi.org/10.1021/ac0346712	journal	October 2003
New Facets of CdTe Electrodeposition in Acidic Solutions with Higher Tellurium Concentrations Lepiller, Catherine; Lincot, Daniel Journal of The Electrochemical Society, Vol. 151, Issue 5, p. C348-C357 https://doi.org/10.1149/1.1690290	journal	January 2004
Efficient photoinduced charge transfer in TiO₂ nanorod/conjugated polymer hybrid materials Lin, Yu-Ting; Zeng, Tsung-Wei; Lai, Wei-Zong Nanotechnology, Vol. 17, Issue 23, p. 5781-5785 https://doi.org/10.1088/0957-4484/17/23/012	journal	November 2006
Synthesis of High Density, Size-Controlled Si Nanowire Arrays via Porous Anodic Alumina Mask Lombardi, Ilaria; Hochbaum, Allon I.; Yang, Peidong Chemistry of Materials, Vol. 18, Issue 4, p. 988-991 https://doi.org/10.1021/cm052435x	journal	January 2006
Studies of minority carrier transport in ZnO Lopatiuk-Tirpak, Olena; Chernyak, Leonid Superlattices and Microstructures, Vol. 42, Issue 1-6, p. 201-205 https://doi.org/10.1016/j.spmi.2007.04.030	journal	July 2007
Macroporous Silicon as a Model for Silicon Wire Array Solar Cells Maiolo, James R.; Atwater, Harry A.; Lewis, Nathan S. The Journal of Physical Chemistry C, Vol. 112, Issue 15, p. 6194-6201 https://doi.org/10.1021/jp711340b	journal	April 2008
Fabrication of individually seeded nanowire arrays by vapour–liquid–solid growth Mårtensson, T; Borgström, M; Seifert, W Nanotechnology, Vol. 14, Issue 12, p. 1255-1258 https://doi.org/10.1088/0957-4484/14/12/004	journal	October 2003
Poly(dimethylsiloxane) as a Material for Fabricating Microfluidic Devices McDonald, J. Cooper; Whitesides, George M. Accounts of Chemical Research, Vol. 35, Issue 7, p. 491-499 https://doi.org/10.1021/ar010110q	journal	April 2002
Light-induced generation of hydrogen at CdS-monograin membranes Meissner, D.; Memming, R.; Kastening, B. Chemical Physics Letters, Vol. 96, Issue 1, p. 34-37 https://doi.org/10.1016/0009-2614(83)80112-2	journal	March 1983
Controlled growth of highly uniform, axial/radial direction-defined, individually addressable InP nanowire arrays Mohan, Premila; Motohisa, Junichi; Fukui, Takashi Nanotechnology, Vol. 16, Issue 12, p. 2903-2907 https://doi.org/10.1088/0957-4484/16/12/029	journal	October 2005
A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires Morales, Alfredo M.; Lieber, Charles M. Science, Vol. 279, Issue 5348, p. 208-211 https://doi.org/10.1126/science.279.5348.208	journal	January 1998
Biomimetic Assembly of Zinc Oxide Nanorods onto Flexible Polymers Morin, Stephen A.; Amos, Fairland F.; Jin, Song Journal of the American Chemical Society, Vol. 129, Issue 45, p. 13776-13777 https://doi.org/10.1021/ja074856g	journal	October 2007
Design of Light Scattering in Nanowire Materials for Photovoltaic Applications Muskens, Otto L.; Rivas, Jaime Gómez; Algra, Rienk E. Nano Letters, Vol. 8, Issue 9, p. 2638-2642 https://doi.org/10.1021/nl0808076	journal	September 2008
Silicon Nanowires: Preparation, Device Fabrication, and Transport Properties Yu, Jae-Young; Chung, Sung-Wook; Heath, James R. The Journal of Physical Chemistry B, Vol. 104, Issue 50, p. 11864-11870 https://doi.org/10.1021/jp002595q	journal	December 2000
Large-area blown bubble films of aligned nanowires and carbon nanotubes Yu, Guihua; Cao, Anyuan; Lieber, Charles M. Nature Nanotechnology, Vol. 2, Issue 6, p. 372-377 https://doi.org/10.1038/nnano.2007.150	journal	May 2007
Synthesis of Molybdenum Nanowires with Millimeter-Scale Lengths Using Electrochemical Step Edge Decoration Zach, M. P.; Inazu, K.; Ng, K. H. Chemistry of Materials, Vol. 14, Issue 7, p. 3206-3216 https://doi.org/10.1021/cm020249a	journal	June 2002
Optical Absorption Enhancement in Amorphous Silicon Nanowire and Nanocone Arrays Zhu, Jia; Yu, Zongfu; Burkhard, George F. Nano Letters, Vol. 9, Issue 1, p. 279-282 https://doi.org/10.1021/nl802886y	journal	December 2008
From light scattering to the microstructure of thin-film multilayers Amra, C. Applied Optics, Vol. 32, Issue 28, p. 5481-5491 https://doi.org/10.1364/AO.32.005481	journal	October 1993
Room temperature growth of CuO nanorod arrays on copper and their application as a cathode in dye-sensitized solar cells Anandan, Sambandam; Wen, Xiaogang; Yang, Shihe Materials Chemistry and Physics, Vol. 93, Issue 1, p. 35-40 https://doi.org/10.1016/j.matchemphys.2005.02.002	journal	September 2005
Recent improvements and arising challenges in dye-sensitized solar cells Anandan, Sambandam Solar Energy Materials and Solar Cells, Vol. 91, Issue 9, p. 843-846 https://doi.org/10.1016/j.solmat.2006.11.017	journal	May 2007
Patterning PDMS using a combination of wet and dry etching Balakrisnan, B; Patil, S; Smela, E Journal of Micromechanics and Microengineering, Vol. 19, Issue 4, Article No. 047002 https://doi.org/10.1088/0960-1317/19/4/047002	journal	March 2009
High‐efficiency electroplated heterojunction solar cell Basol, Bulent M. Journal of Applied Physics, Vol. 55, Issue 2, p. 601-603 https://doi.org/10.1063/1.333073	journal	January 1984
Electrodeposition of CdTe Thin Films Bhattacharya, R. N.; Rajeshwar, K. Journal of The Electrochemical Society, Vol. 131, Issue 9, p. 2032-2037 https://doi.org/10.1149/1.2116014	journal	January 1984
Energy-Conversion Properties of Vapor-Liquid-Solid-Grown Silicon Wire-Array Photocathodes Boettcher, S. W.; Spurgeon, J. M.; Putnam, M. C. Science, Vol. 327, Issue 5962, p. 185-187 https://doi.org/10.1126/science.1180783	journal	January 2010
Diameter-Controlled Synthesis of Silicon Nanowires Using Nanoporous Alumina Membranes Bogart, T. E.; Dey, S.; Lew, K.-K. Advanced Materials, Vol. 17, Issue 1, p. 114-117 https://doi.org/10.1002/adma.200400373	journal	January 2005
Impurity photovoltaic effect: Fundamental energy conversion efficiency limits Brown, Andrew S.; Green, Martin A. Journal of Applied Physics, Vol. 92, Issue 3, p. 1329-1336 https://doi.org/10.1063/1.1492016	journal	August 2002
Properties of gold in silicon Bullis, W. M. Solid-State Electronics, Vol. 9, Issue 2, p. 143-168 https://doi.org/10.1016/0038-1101(66)90085-2	journal	February 1966
The limiting efficiency of silicon solar cells under concentrated sunlight Campbell, P.; Green, M.A. IEEE Transactions on Electron Devices, Vol. 33, Issue 2, p. 234-239 https://doi.org/10.1109/T-ED.1986.22472	journal	February 1986
Gallium arsenide p-i-n radial structures for photovoltaic applications Colombo, C.; Heiβ, M.; Grätzel, M. Applied Physics Letters, Vol. 94, Issue 17, 173108 https://doi.org/10.1063/1.3125435	journal	April 2009
Impurities in silicon solar cells Davis, J.R.; Rohatgi, A.; Hopkins, R.H. IEEE Transactions on Electron Devices, Vol. 27, Issue 4, p. 677-687 https://doi.org/10.1109/T-ED.1980.19922	journal	April 1980
Coaxial Group III−Nitride Nanowire Photovoltaics Dong, Yajie; Tian, Bozhi; Kempa, Thomas J. Nano Letters, Vol. 9, Issue 5, p. 2183-2187 https://doi.org/10.1021/nl900858v	journal	April 2009
High Density Germanium Nanowire Assemblies: Contact Challenges and Electrical Characterization Erts, Donats; Polyakov, Boris; Daly, Brian The Journal of Physical Chemistry B, Vol. 110, Issue 2, p. 820-826 https://doi.org/10.1021/jp055309p	journal	January 2006
Semiconductor Nanowires: From Self-Organization to Patterned Growth Fan, Hong Jin; Werner, Peter; Zacharias, Margit Small, Vol. 2, Issue 6, p. 700-717 https://doi.org/10.1002/smll.200500495	journal	April 2006
Well-ordered ZnO nanowire arrays on GaN substrate fabricated via nanosphere lithography Fan, Hong Jin; Fuhrmann, Bodo; Scholz, Roland Journal of Crystal Growth, Vol. 287, Issue 1, p. 34-38 https://doi.org/10.1016/j.jcrysgro.2005.10.038	journal	January 2006
Three-dimensional nanopillar-array photovoltaics on low-cost and flexible substrates Fan, Zhiyong; Razavi, Haleh; Do, Jae-won Nature Materials, Vol. 8, Issue 8, p. 648-653 https://doi.org/10.1038/nmat2493	journal	July 2009
Long Germanium Nanowires Prepared by Electrochemical Etching Fang, C.; Föll, H.; Carstensen, J. Nano Letters, Vol. 6, Issue 7, p. 1578-1580 https://doi.org/10.1021/nl061060r	journal	June 2006
Optical dispersion relations for amorphous semiconductors and amorphous dielectrics Forouhi, A. R.; Bloomer, I. Physical Review B, Vol. 34, Issue 10, p. 7018-7026 https://doi.org/10.1103/PhysRevB.34.7018	journal	November 1986
High‐efficiency electrodeposited cadmium telluride solar cells Fulop, G.; Doty, M.; Meyers, P. Applied Physics Letters, Vol. 40, Issue 4, p. 327-328 https://doi.org/10.1063/1.93085	journal	February 1982
Light Trapping in Silicon Nanowire Solar Cells Garnett, Erik; Yang, Peidong Nano Letters, Vol. 10, Issue 3, p. 1082-1087 https://doi.org/10.1021/nl100161z	journal	January 2010
A 14% efficient nonaqueous semiconductor/liquid junction solar cell Gibbons, James F.; Cogan, George W.; Gronet, Chris M. Applied Physics Letters, Vol. 45, Issue 10, p. 1095-1097 https://doi.org/10.1063/1.95028	journal	November 1984
Silicon Nanowire Array Photoelectrochemical Cells Goodey, Adrian P.; Eichfeld, Sarah M.; Lew, Kok-Keong Journal of the American Chemical Society, Vol. 129, Issue 41, p. 12344-12345 https://doi.org/10.1021/ja073125d	journal	September 2007
Growth of Core–Shell InP Nanowires for Photovoltaic Application by Selective-Area Metal Organic Vapor Phase Epitaxy Goto, Hajime; Nosaki, Katsutoshi; Tomioka, Katsuhiro Applied Physics Express, Vol. 2, Issue 3, Article No. 035004 https://doi.org/10.1143/APEX.2.035004	journal	February 2009
Fabrication of densely packed, well-ordered, high-aspect-ratio silicon nanopillars over large areas using block copolymer lithography Gowrishankar, Vignesh; Miller, Nathaniel; McGehee, Michael D. Thin Solid Films, Vol. 513, Issue 1-2, p. 289-294 https://doi.org/10.1016/j.tsf.2006.01.064	journal	August 2006
n-Type silicon photoelectrochemistry in methanol: Design of a 10.1% efficient semiconductor/liquid junction solar cell Gronet, C. M.; Lewis, N. S.; Cogan, G. Proceedings of the National Academy of Sciences, Vol. 80, Issue 4, p. 1152-1156 https://doi.org/10.1073/pnas.80.4.1152	journal	February 1983
Effects of Interfacial Energetics on the Effective Surface Recombination Velocity of Si/Liquid Contacts Gstrein, Florian; Michalak, David J.; Royea, William J. The Journal of Physical Chemistry B, Vol. 106, Issue 11, p. 2950-2961 https://doi.org/10.1021/jp012997d	journal	March 2002
Quantitative Measurement of the Electron and Hole Mobility−Lifetime Products in Semiconductor Nanowires Gu, Yi; Romankiewicz, John P.; David, John K. Nano Letters, Vol. 6, Issue 5, p. 948-952 https://doi.org/10.1021/nl052576y	journal	April 2006
Characteristics of vapor–liquid–solid grown silicon nanowire solar cells Gunawan, Oki; Guha, Supratik Solar Energy Materials and Solar Cells, Vol. 93, Issue 8, p. 1388-1393 https://doi.org/10.1016/j.solmat.2009.02.024	journal	August 2009
Nanoimprint Lithography: Methods and Material Requirements Guo, L. J. Advanced Materials, Vol. 19, Issue 4, p. 495-513 https://doi.org/10.1002/adma.200600882	journal	February 2007
Photovoltaic Effect of Gold in Silicon Güttler, G.; Queisser, H. J. Journal of Applied Physics, Vol. 40, Issue 12, p. 4994-4995 https://doi.org/10.1063/1.1657337	journal	November 1969
Impurity photovoltaic effect in silicon Güttler, G.; Queisser, H. J. Energy Conversion, Vol. 10, Issue 2, p. 51-55 https://doi.org/10.1016/0013-7480(70)90068-9	journal	April 1970
Electrical Characteristics and Chemical Stability of Non-Oxidized, Methyl-Terminated Silicon Nanowires Haick, Hossam; Hurley, Patrick T.; Hochbaum, Allon I. Journal of the American Chemical Society, Vol. 128, Issue 28, p. 8990-8991 https://doi.org/10.1021/ja056785w	journal	June 2006
Semiconductors for Photoelectrolysis Harris, L. A.; Wilson, R. H. Annual Review of Materials Science, Vol. 8, Issue 1, p. 99-134 https://doi.org/10.1146/annurev.ms.08.080178.000531	journal	August 1978
Controlled Growth of Si Nanowire Arrays for Device Integration Hochbaum, Allon I.; Fan, Rong; He, Rongrui Nano Letters, Vol. 5, Issue 3, p. 457-460 https://doi.org/10.1021/nl047990x	journal	March 2005
Spectroscopic ellipsometry investigation of optical and interface properties of CdTe films deposited on metal foils Paulson, P. D.; Mathew, Xavier Solar Energy Materials and Solar Cells, Vol. 82, Issue 1-2, p. 279-290 https://doi.org/10.1016/j.solmat.2004.01.025	journal	May 2004
Fabrication of Large-Area Silicon Nanowire p–n Junction Diode Arrays Q. Peng, K.; P. Huang, Z.; Zhu, J. Advanced Materials, Vol. 16, Issue 1, p. 73-76 https://doi.org/10.1002/adma.200306185	journal	January 2004
Aligned Single-Crystalline Si Nanowire Arrays for Photovoltaic Applications Peng, Kuiqing; Xu, Ying; Wu, Yin Small, Vol. 1, Issue 11, p. 1062-1067 https://doi.org/10.1002/smll.200500137	journal	September 2005
Flexible energy storage devices based on nanocomposite paper Pushparaj, Victor L.; Shaijumon, Manikoth M.; Kumar, Ashavani Proceedings of the National Academy of Sciences, Vol. 104, Issue 34, p. 13574-13577 https://doi.org/10.1073/pnas.0706508104	journal	August 2007
Secondary Ion Mass Spectrometry of Vapor−Liquid−Solid Grown, Au-Catalyzed, Si Wires Putnam, Morgan C.; Filler, Michael A.; Kayes, Brendan M. Nano Letters, Vol. 8, Issue 10, p. 3109-3113 https://doi.org/10.1021/nl801234y	journal	September 2008
Embedded Carbon-Nanotube-Stiffened Polymer Surfaces Raravikar, Nachiket R.; Vijayaraghavan, Aravind S.; Keblinski, Pawel Small, Vol. 1, Issue 3, p. 317-320 https://doi.org/10.1002/smll.200400064	journal	January 2005
630‐mV open circuit voltage, 12% efficient n ‐Si liquid junction Rosenbluth, Mary L.; Lieber, Charles M.; Lewis, Nathan S. Applied Physics Letters, Vol. 45, Issue 4, p. 423-425 https://doi.org/10.1063/1.95244	journal	August 1984
Kinetic studies of carrier transport and recombination at the n-silicon methanol interface Rosenbluth, Mary L.; Lewis, Nathan S. Journal of the American Chemical Society, Vol. 108, Issue 16, p. 4689-4695 https://doi.org/10.1021/ja00276a001	journal	August 1986
"Ideal" behavior of the open circuit voltage of semiconductor/liquid junctions Rosenbluth, Mary L.; Lewis, Nathan S. The Journal of Physical Chemistry, Vol. 93, Issue 9, p. 3735-3740 https://doi.org/10.1021/j100346a072	journal	May 1989
Electrochemical Fabrication of CdS Nanowire Arrays in Porous Anodic Aluminum Oxide Templates Routkevitch, Dmitri; Bigioni, Terry; Moskovits, Martin The Journal of Physical Chemistry, Vol. 100, Issue 33, p. 14037-14047 https://doi.org/10.1021/jp952910m	journal	January 1996
Nonlithographic nano-wire arrays: fabrication, physics, and device applications Routkevitch, D.; Tager, A.A.; Haruyama, J. IEEE Transactions on Electron Devices, Vol. 43, Issue 10, p. 1646-1658 https://doi.org/10.1109/16.536810	journal	January 1996
Controlled partial embedding of carbon nanotubes within flexible transparent layers Sansom, Elijah B.; Rinderknecht, Derek; Gharib, Morteza Nanotechnology, Vol. 19, Issue 3, Article No. 035302 https://doi.org/10.1088/0957-4484/19/03/035302	journal	December 2007
Determination of diffusion length in photovoltaic crystalline silicon by modelisation of light beam induced current Sayad, Y.; Kaminski, A.; Blanc, D. Superlattices and Microstructures, Vol. 45, Issue 4-5, p. 393-401 https://doi.org/10.1016/j.spmi.2008.11.002	journal	April 2009
Diameter-Dependent Growth Direction of Epitaxial Silicon Nanowires Schmidt, Volker; Senz, Stephan; Gösele, Ulrich Nano Letters, Vol. 5, Issue 5, p. 931-935 https://doi.org/10.1021/nl050462g	journal	April 2005
Characterization of haze‐forming precipitates in silicon Seibt, M.; Graff, K. Journal of Applied Physics, Vol. 63, Issue 9, p. 4444-4450 https://doi.org/10.1063/1.340164	journal	May 1988
Synthesis of Vertical High-Density Epitaxial Si(100) Nanowire Arrays on a Si(100) Substrate Using an Anodic Aluminum Oxide Template Shimizu, T.; Xie, T.; Nishikawa, J. Advanced Materials, Vol. 19, Issue 7, p. 917-920 https://doi.org/10.1002/adma.200700153	journal	April 2007
Detailed Balance Limit of Efficiency of p‐n Junction Solar Cells Shockley, William; Queisser, Hans J. Journal of Applied Physics, Vol. 32, Issue 3, p. 510-519 https://doi.org/10.1063/1.1736034	journal	March 1961
Silicon Nanowire-Based Solar Cells on Glass: Synthesis, Optical Properties, and Cell Parameters Sivakov, V.; Andrä, G.; Gawlik, A. Nano Letters, Vol. 9, Issue 4, p. 1549-1554 https://doi.org/10.1021/nl803641f	journal	March 2009
Repeated epitaxial growth and transfer of arrays of patterned, vertically aligned, crystalline Si wires from a single Si(111) substrate Spurgeon, Joshua M.; Plass, Katherine E.; Kayes, Brendan M. Applied Physics Letters, Vol. 93, Issue 3, 032112 https://doi.org/10.1063/1.2959184	journal	July 2008
Silicon nanowire-based solar cells Stelzner, Th; Pietsch, M; Andrä, G Nanotechnology, Vol. 19, Issue 29, Article No. 295203 https://doi.org/10.1088/0957-4484/19/29/295203	journal	June 2008
Solubility and Diffusivity of Gold, Iron, and Copper in Silicon Struthers, J. D. Journal of Applied Physics, Vol. 27, Issue 12, p. 1560-1560 https://doi.org/10.1063/1.1722310	journal	December 1956
Microwave assisted patterning of vertically aligned carbon nanotubes onto polymer substrates Sunden, Erik; Moon, Jack K.; Wong, C. P. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 4, p. 1947-1950 https://doi.org/10.1116/1.2221320	journal	January 2006
Topographical Micropatterning of Poly(dimethylsiloxane) Using Laminar Flows of Liquids in Capillaries Takayama, S.; Ostuni, E.; Qian, X. Advanced Materials, Vol. 13, Issue 8, p. 570-574 https://doi.org/10.1002/1521-4095(200104)13:8<570::AID-ADMA570>3.0.CO;2-B	journal	April 2001
Coaxial silicon nanowires as solar cells and nanoelectronic power sources Tian, Bozhi; Zheng, Xiaolin; Kempa, Thomas J. Nature, Vol. 449, Issue 7164, p. 885-889 https://doi.org/10.1038/nature06181	journal	October 2007
Preparation and characterization of CdS/CdTe thin film solar cells Toušková, J.; Kindl, D.; Toušek, J. Thin Solid Films, Vol. 293, Issue 1-2, p. 272-276 https://doi.org/10.1016/S0040-6090(96)09113-4	journal	January 1997
Silicon nanowire solar cells Tsakalakos, L.; Balch, J.; Fronheiser, J. Applied Physics Letters, Vol. 91, Issue 23, 233117 https://doi.org/10.1063/1.2821113	journal	December 2007
Strong broadband optical absorption in silicon nanowire films Tsakalakos, Loucas; Balch, Joleyn E.; Fronheiser, Jody Journal of Nanophotonics, Vol. 1, Issue 1, Article No. 013552 https://doi.org/10.1117/1.2768999	journal	July 2007
Vapor-liquid-solid mechanism of single crystal growth Wagner, R. S.; Ellis, W. C. Applied Physics Letters, Vol. 4, Issue 5, p. 89-90 https://doi.org/10.1063/1.1753975	journal	March 1964
Defects in Silicon Crystals Grown by the VLS Technique Wagner, R. S. Journal of Applied Physics, Vol. 38, Issue 4, p. 1554-1560 https://doi.org/10.1063/1.1709722	journal	March 1967
Titania-nanotube-array-based photovoltaic cells Wang, H.; Yip, C. T.; Cheung, K. Y. Applied Physics Letters, Vol. 89, Issue 2, 023508 https://doi.org/10.1063/1.2221502	journal	July 2006
Control of the Size and Position of Silicon Nanowires Grown via the Vapor-Liquid-Solid Technique Westwater, Jonathan; Gosain, Dharam Pal; Usui, Setsuo Japanese Journal of Applied Physics, Vol. 36, Issue Part 1, No. 10, p. 6204-6209 https://doi.org/10.1143/JJAP.36.6204	journal	October 1997
Si Nanowires Grown via the Vapour–Liquid–Solid Reaction Westwater, J.; Gosain, D. P.; Usui, S. physica status solidi (a), Vol. 165, Issue 1, p. 37-42 https://doi.org/10.1002/(SICI)1521-396X(199801)165:1<37::AID-PSSA37>3.0.CO;2-Z	journal	January 1998
Limitations and Possibilities for Improvement of Photovoltaic Solar Energy Converters: Part I: Considerations for Earth's Surface Operation Wolf, M. Proceedings of the IRE, Vol. 48, Issue 7, p. 1246-1263 https://doi.org/10.1109/JRPROC.1960.287647	journal	July 1960
Vertically Oriented Germanium Nanowires Grown from Gold Colloids on Silicon Substrates and Subsequent Gold Removal Woodruff, Jacob H.; Ratchford, Joshua B.; Goldthorpe, Irene A. Nano Letters, Vol. 7, Issue 6, p. 1637-1642 https://doi.org/10.1021/nl070595x	journal	June 2007
A study on deep etching of silicon using ethylene-diamine-pyrocatechol-water Wu, Xian-Ping; Wu, Quin-Hai; Ko, Wen H. Sensors and Actuators, Vol. 9, Issue 4, p. 333-343 https://doi.org/10.1016/0250-6874(86)80065-8	journal	July 1986
Semiconductor Nanowire Array: Potential Substrates for Photocatalysis and Photovoltaics Wu, Yijing; Yan, Haoquan; Yang, Peidong Topics in Catalysis, Vol. 19, Issue 2, p. 197-202 https://doi.org/10.1023/A:1015260008046	journal	January 2002
One-Dimensional Nanostructures: Synthesis, Characterization, and Applications Xia, Y.; Yang, P.; Sun, Y. Advanced Materials, Vol. 15, Issue 5, p. 353-389 https://doi.org/10.1002/adma.200390087	journal	March 2003
Experimental Observation of an Extremely Dark Material Made By a Low-Density Nanotube Array Yang, Zu-Po; Ci, Lijie; Bur, James A. Nano Letters, Vol. 8, Issue 2, p. 446-451 https://doi.org/10.1021/nl072369t	journal	January 2008
Si nanowires synthesized with Cu catalyst Yao, Y.; Fan, S. Materials Letters, Vol. 61, Issue 1, p. 177-181 https://doi.org/10.1016/j.matlet.2006.04.045	journal	January 2007
Ultrathin silicon solar microcells for semitransparent, mechanically flexible and microconcentrator module designs Yoon, Jongseung; Baca, Alfred J.; Park, Sang-Il Nature Materials, Vol. 7, Issue 11, p. 907-915 https://doi.org/10.1038/nmat2287	journal	October 2008

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