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Title: Ultrananocrystalline diamond contacts for electronic devices

Patent ·
OSTI ID:1330709
; ;

A method of forming electrical contacts on a diamond substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The mixture of gases include a source of a p-type or an n-type dopant. The plasma ball is disposed at a first distance from the diamond substrate. The diamond substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the diamond substrate for a first time, and a UNCD film, which is doped with at least one of a p-type dopant and an n-type dopant, is disposed on the diamond substrate. The doped UNCD film is patterned to define UNCD electrical contacts on the diamond substrate.

Research Organization:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-98CH10886; SC0012704; AC02-06CH11357
Assignee:
UChicago Argonne, LLC (Chicago, IL); Brookhaven Science Associates, LLC (Upton, NY) ; The Research Foundation for the State University of New York (Albany, NY)
Patent Number(s):
9,484,474
Application Number:
14/790,995
OSTI ID:
1330709
Resource Relation:
Patent File Date: 2015 Jul 02
Country of Publication:
United States
Language:
English

References (35)

X-ray beam position monitor and its position measurement method patent February 1998
Method for synthesizing n-type diamond having low resistance patent January 2002
Method to grow pure nanocrystalline diamond films at low temperatures and high deposition rates patent July 2009
Ultrananocrystalline diamond films with optimized dielectric properties for advanced RF MEMS capacitive switches patent January 2013
Nano-crystal diamond film, manufacturing method thereof, and device using nano-crystal diamond film patent April 2013
Method for producing nanocrystalline diamond coatings on gemstones and other substrates patent August 2015
Diamond transmission dynode and photomultiplier or imaging device using same patent-application April 2002
Polycrystal diamond thin film and photocathode and electron tube using the same patent-application January 2003
Patterning Of Nanocrystalline Diamond Films For Diamond Microstructures Useful In Mems And Other Devices patent-application July 2004
Single crystal diamond prepared by CVD patent-application November 2004
All diamond self-aligned thin film transistor patent-application March 2006
Electrode and electron emission applications for n-type doped nanocrystalline materials patent-application June 2006
Transparent thin film transistor (TFT) and its method of manufacture patent-application March 2007
Novel ultrananocrystalline diamond probes for high-resolution low-wear nanolithographic techniques patent-application September 2007
Nanowire-based sensor configurations patent-application May 2009
Method For Preparing A Semiconductor Ultrananocrystalline Diamond Film And A Semiconductor Ultrananocrystalline Diamond Film Prepared Therefrom patent-application March 2010
Printable, Flexible and Stretchable Diamond for Thermal Management patent-application March 2010
Semiconductor Component Having Diamond-Containing Electrodes and Use Thereof patent-application December 2012
Diamond Semiconductor System and Method patent-application January 2013
Graphene on Semiconductor Detector patent-application April 2013
Nanowire Stress Sensors And Stress Sensor Integrated Circuits, Design Structures For A Stress Sensor Integrated Circuit, And Related Methods patent-application June 2013
Vacuum Encapsulated, High Temperature Diamond Amplified Cathode Capsule and Method for Making Same patent-application December 2013
Appendage Mountable Electronic Devices COnformable to Surfaces patent-application December 2013
Piezoresistivity in vapor‐deposited diamond films journal June 1992
Planar ultrananocrystalline diamond field emitter in accelerator radio frequency electron injector: Performance metrics journal November 2014
The CVD of Nanodiamond Materials journal July 2008
Optically Transparent Diamond Electrode for Use in IR Transmission Spectroelectrochemical Measurements journal October 2007
Configurational, electronic entropies and the thermoelectric properties of nanocarbon ensembles journal April 2008
Giant piezoresistance effect in silicon nanowires journal October 2006
Silicon Device Scaling to the Sub-10-nm Regime journal December 2004
High quantum efficiency ultrananocrystalline diamond photocathode for photoinjector applications
  • Pérez Quintero, Kenneth J.; Antipov, Sergey; Sumant, Anirudha V.
  • Applied Physics Letters, Vol. 105, Issue 12, Article No. 123103 https://doi.org/10.1063/1.4896418
journal September 2014
Properties of Hydrogen Terminated Diamond as a Photocathode journal March 2011
Optical and Electrochemical Properties of Optically Transparent, Boron-Doped Diamond Thin Films Deposited on Quartz journal December 2002
Polycrystalline diamond films as prospective UV photocathodes conference December 2000
Review on diamond based piezoresistive sensors conference January 1998

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