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Title: High performance waveguide-coupled Ge-on-Si linear mode avalanche photodiodes

Journal Article · · Optics Express
DOI:https://doi.org/10.1364/OE.24.019072· OSTI ID:1326061

Here, we present experimental results for a selective epitaxially grown Ge-on-Si separate absorption and charge multiplication (SACM) integrated waveguide coupled avalanche photodiode (APD) compatible with our silicon photonics platform. Epitaxially grown Ge-on-Si waveguide-coupled linear mode avalanche photodiodes with varying lateral multiplication regions and different charge implant dimensions are fabricated and their illuminated device characteristics and high-speed performance is measured. We report a record gain-bandwidth product of 432 GHz for our highest performing waveguide-coupled avalanche photodiode operating at 1510nm. Bit error rate measurements show operation with BER< 10–12, in the range from –18.3 dBm to –12 dBm received optical power into a 50 Ω load and open eye diagrams with 13 Gbps pseudo-random data at 1550 nm.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
Grant/Contract Number:
AC04-94AL85000
OSTI ID:
1326061
Report Number(s):
SAND-2016-8357J; OPEXFF; 647399
Journal Information:
Optics Express, Vol. 24, Issue 17; ISSN 1094-4087
Publisher:
Optical Society of America (OSA)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 42 works
Citation information provided by
Web of Science

References (20)

Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects journal March 2010
The influence of hydrogen during the growth of Ge films on Si(001) by solid source molecular beam epitaxy journal May 1998
Low Dark-Current Germanium-on-Silicon Near-Infrared Detectors journal November 2007
High-performance Ge-on-Si photodetectors journal July 2010
Photonic quantum technologies journal December 2009
Adiabatic thermo-optic Mach–Zehnder switch journal January 2013
Strained Si, SiGe, and Ge channels for high-mobility metal-oxide-semiconductor field-effect transistors journal January 2005
Ge-on-Si Single-Photon Avalanche Diode Detectors: Design, Modeling, Fabrication, and Characterization at Wavelengths 1310 and 1550 nm journal November 2013
Ultra compact 45 GHz CMOS compatible Germanium waveguide photodiode with low dark current journal January 2011
High-performance p-i-n Ge on Si photodetectors for the near infrared: from model to demonstration journal June 2001
Ge-on-Si approaches to the detection of near-infrared light journal January 1999
310 GHz gain-bandwidth product Ge/Si avalanche photodetector for 1550 nm light detection journal January 2012
High sensitivity 10Gb/s Si photonic receiver based on a low-voltage waveguide-coupled Ge avalanche photodetector journal January 2015
Challenges in the implementation of dense wavelength division multiplexed (DWDM) optical interconnects using resonant silicon photonics conference February 2016
High-quality Ge epilayers on Si with low threading-dislocation densities journal November 1999
Monolithic germanium/silicon avalanche photodiodes with 340 GHz gain–bandwidth product journal December 2008
Ge growth on Si using atomic hydrogen as a surfactant journal January 1994
Low-Voltage and High-Responsivity Germanium Bipolar Phototransistor for Optical Detections in the Near-Infrared Regime journal October 2008
Device Requirements for Optical Interconnects to Silicon Chips journal July 2009
(Invited) Ge/Si Waveguide Avalanche Photodiodes on SOI Substrates for High Speed Communication journal October 2010

Cited By (7)

Enhancement of responsivity and speed in waveguide Ge/Si avalanche photodiode with separate vertical Ge absorption, lateral Si charge and multiplication configuration journal June 2019
High performance planar germanium-on-silicon single-photon avalanche diode detectors journal March 2019
High-efficiency grating-couplers: demonstration of a new design strategy journal November 2017
Single photon detection in a waveguide-coupled Ge-on-Si lateral avalanche photodiode journal January 2017
Ge photodetector monolithically integrated with amorphous Si waveguide on wafer-bonded Ge-on-insulator substrate journal January 2018
Impact of longitudinal chromatic aberration on through-focus visual acuity journal January 2019
Silicon–germanium avalanche photodiodes with direct control of electric field in charge multiplication region journal January 2019