skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Piezoresistive boron doped diamond nanowire

Patent ·
OSTI ID:1324680
;

A UNCD nanowire comprises a first end electrically coupled to a first contact pad which is disposed on a substrate. A second end is electrically coupled to a second contact pad also disposed on the substrate. The UNCD nanowire is doped with a dopant and disposed over the substrate. The UNCD nanowire is movable between a first configuration in which no force is exerted on the UNCD nanowire and a second configuration in which the UNCD nanowire bends about the first end and the second end in response to a force. The UNCD nanowire has a first resistance in the first configuration and a second resistance in the second configuration which is different from the first resistance. The UNCD nanowire is structured to have a gauge factor of at least about 70, for example, in the range of about 70 to about 1,800.

Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-06CH11357
Assignee:
UCHICAGO ARGONNE, LLC (Chicago, IL)
Patent Number(s):
9,441,940
Application Number:
14/601,908
OSTI ID:
1324680
Resource Relation:
Patent File Date: 2015 Jan 21
Country of Publication:
United States
Language:
English

References (27)

Method for synthesizing n-type diamond having low resistance patent January 2002
Ultrananocrystalline diamond films with optimized dielectric properties for advanced RF MEMS capacitive switches patent January 2013
Nano-crystal diamond film, manufacturing method thereof, and device using nano-crystal diamond film patent April 2013
Diamond transmission dynode and photomultiplier or imaging device using same patent-application April 2002
Polycrystal diamond thin film and photocathode and electron tube using the same patent-application January 2003
Patterning Of Nanocrystalline Diamond Films For Diamond Microstructures Useful In Mems And Other Devices patent-application July 2004
Single crystal diamond prepared by CVD patent-application November 2004
Transparent thin film transistor (TFT) and its method of manufacture patent-application March 2007
Nanowire-based sensor configurations patent-application May 2009
Printable, Flexible and Stretchable Diamond for Thermal Management patent-application March 2010
Diamond Semiconductor System and Method patent-application January 2013
Graphene on Semiconductor Detector patent-application April 2013
Nanowire Stress Sensors And Stress Sensor Integrated Circuits, Design Structures For A Stress Sensor Integrated Circuit, And Related Methods patent-application June 2013
Vacuum Encapsulated, High Temperature Diamond Amplified Cathode Capsule and Method for Making Same patent-application December 2013
Planar ultrananocrystalline diamond field emitter in accelerator radio frequency electron injector: Performance metrics journal November 2014
High quantum efficiency ultrananocrystalline diamond photocathode for photoinjector applications
  • Pérez Quintero, Kenneth J.; Antipov, Sergey; Sumant, Anirudha V.
  • Applied Physics Letters, Vol. 105, Issue 12, Article No. 123103 https://doi.org/10.1063/1.4896418
journal September 2014
Properties of Hydrogen Terminated Diamond as a Photocathode journal March 2011
Piezoresistivity in vapor‐deposited diamond films journal June 1992
The CVD of Nanodiamond Materials journal July 2008
Optically Transparent Diamond Electrode for Use in IR Transmission Spectroelectrochemical Measurements journal October 2007
Band structure, deformation potentials, and carrier mobility in strained Si, Ge, and SiGe alloys journal August 1996
Direct Low-Temperature Integration of Nanocrystalline Diamond with GaN Substrates for Improved Thermal Management of High-Power Electronics journal February 2012
Configurational, electronic entropies and the thermoelectric properties of nanocarbon ensembles journal April 2008
Giant piezoresistance effect in silicon nanowires journal October 2006
Silicon Device Scaling to the Sub-10-nm Regime journal December 2004
Optical and Electrochemical Properties of Optically Transparent, Boron-Doped Diamond Thin Films Deposited on Quartz journal December 2002
Review on diamond based piezoresistive sensors conference January 1998

Similar Records

Related Subjects

36 MATERIALS SCIENCE
77 NANOSCIENCE AND NANOTECHNOLOGY