Selective directed self-assembly of coexisting morphologies using block copolymer blends

Stein, A.; Wright, G.; Yager, K. G.; Doerk, G. S.; Black, C. T.

doi:10.1038/ncomms12366

Title: Selective directed self-assembly of coexisting morphologies using block copolymer blends

Journal Article · Tue Aug 02 00:00:00 EDT 2016 · Nature Communications

DOI:https://doi.org/10.1038/ncomms12366· OSTI ID:1303021

Stein, A. ^[1]; Wright, G. ^[1]; Yager, K. G. ^[1]; Doerk, G. S. ^[1]; Black, C. T. ^[1]

Brookhaven National Lab. (BNL), Upton, NY (United States)

Directed self-assembly (DSA) of block copolymers is an emergent technique for nano-lithography, but is limited in the range of structures possible in a single fabrication step. We expand on traditional DSA chemical patterning. Moreover, a blend of lamellar- and cylinder-forming block copolymers assembles on specially designed surface chemical line gratings, leading to the simultaneous formation of coexisting ordered morphologies in separate areas of the substrate. The competing energetics of polymer chain distortions and chemical mismatch with the substrate grating bias the system towards either line/space or dot array patterns, depending on the pitch and linewidth of the prepattern. This contrasts with typical DSA, wherein assembly of a single-component block copolymer on chemical templates generates patterns of either lines/spaces (lamellar) or hexagonal dot arrays (cylinders). In our approach, the chemical template encodes desired local spatial arrangements of coexisting design motifs, self-assembled from a single, sophisticated resist.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC00112704

OSTI ID:: 1303021

Report Number(s):: BNL-112517-2016-JA; KC0403020

Journal Information:: Nature Communications, Vol. 7; ISSN 2041-1723

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 39 works

Citation information provided by
Web of Science

References (35)

Phase Behavior of Pure Diblocks and Binary Diblock Blends of Poly(ethylene)−Poly(ethylethylene) Zhao, Jin; Majumdar, Biswaroop; Schulz, Mark F. Macromolecules, Vol. 29, Issue 4 https://doi.org/10.1021/ma9507251	journal	January 1996
Guiding Polymers to Perfection: Macroscopic Alignment of Nanoscale Domains Sundrani, Deepak; Darling, S. B.; Sibener, S. J. Nano Letters, Vol. 4, Issue 2, p. 273-276 https://doi.org/10.1021/nl035005j	journal	February 2004
Millisecond Ordering of Block Copolymer Films via Photothermal Gradients Majewski, Pawel W.; Yager, Kevin G. ACS Nano, Vol. 9, Issue 4 https://doi.org/10.1021/nn5071827	journal	February 2015
Polymers confined between two parallel plane walls Hsu, Hsiao-Ping; Grassberger, Peter The Journal of Chemical Physics, Vol. 120, Issue 4 https://doi.org/10.1063/1.1636454	journal	January 2004
Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates Bita, I.; Yang, J. K. W.; Jung, Y. S. Science, Vol. 321, Issue 5891 https://doi.org/10.1126/science.1159352	journal	August 2008
Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films Tavakkoli K. G., A.; Gotrik, K. W.; Hannon, A. F. Science, Vol. 336, Issue 6086 https://doi.org/10.1126/science.1218437	journal	June 2012
Sacrificial-Post Templating Method for Block Copolymer Self-Assembly Tavakkoli K. G., Amir; Nicaise, Samuel M.; Hannon, Adam F. Small, Vol. 10, Issue 3 https://doi.org/10.1002/smll.201301066	journal	July 2013
Directed Self-Assembly of Block Copolymers for Nanolithography: Fabrication of Isolated Features and Essential Integrated Circuit Geometries Stoykovich, Mark P.; Kang, Huiman; Daoulas, Kostas Ch. ACS Nano, Vol. 1, Issue 3 https://doi.org/10.1021/nn700164p	journal	October 2007
Directed self-assembly of block copolymers in the extreme: guiding microdomains from the small to the large Koo, Kyosung; Ahn, Hyungju; Kim, Sang-Woo Soft Matter, Vol. 9, Issue 38 https://doi.org/10.1039/c3sm51083b	journal	January 2013
Enabling complex nanoscale pattern customization using directed self-assembly Doerk, Gregory S.; Cheng, Joy Y.; Singh, Gurpreet Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms6805	journal	December 2014
Design rules for self-assembled block copolymer patterns using tiled templates Chang, Jae-Byum; Choi, Hong Kyoon; Hannon, Adam F. Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms4305	journal	February 2014
Assembly of Sub-10-nm Block Copolymer Patterns with Mixed Morphology and Period Using Electron Irradiation and Solvent Annealing Son, Jeong Gon; Chang, Jae-Byum; Berggren, Karl K. Nano Letters, Vol. 11, Issue 11 https://doi.org/10.1021/nl203445h	journal	November 2011
Self-Assembled Phases of Block Copolymer Blend Thin Films Yager, Kevin G.; Lai, Erica; Black, Charles T. ACS Nano, Vol. 8, Issue 10 https://doi.org/10.1021/nn504977r	journal	October 2014
Templated Self-Assembly of Block Copolymers: Top-Down Helps Bottom-Up Cheng, J. Y.; Ross, C. A.; Smith, H. I. Advanced Materials, Vol. 18, Issue 19, p. 2505-2521 https://doi.org/10.1002/adma.200502651	journal	October 2006
Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly Ruiz, R.; Kang, H.; Detcheverry, F. A. Science, Vol. 321, Issue 5891 https://doi.org/10.1126/science.1157626	journal	August 2008
Immiscibility of large and small symmetric diblock copolymers Matsen, M. W. The Journal of Chemical Physics, Vol. 103, Issue 8 https://doi.org/10.1063/1.470260	journal	August 1995
Structural study of mixtures of styrene isoprene two- and three-block copolymers Hadziioannou, G.; Skoulios, A. Macromolecules, Vol. 15, Issue 2, p. 267-271 https://doi.org/10.1021/ma00230a013	journal	March 1982
Ordered Structure in Blends of Block Copolymers.2.Self-Assembly for Immiscible Lamella-Forming Copolymers Hashimoto, Takeji; Koizumi, Satoshi; Hasegawa, Hirokazu Macromolecules, Vol. 27, Issue 6 https://doi.org/10.1021/ma00084a043	journal	November 1994
Dimensions and Shapes of Block Copolymer Domains Assembled on Lithographically Defined Chemically Patterned Substrates Edwards, Erik W.; Müller, Marcus; Stoykovich, Mark P. Macromolecules, Vol. 40, Issue 1, p. 90-96 https://doi.org/10.1021/ma0607564	journal	January 2007
Orientational Order in Block Copolymer Films Zone Annealed below the Order−Disorder Transition Temperature Berry, Brian C.; Bosse, August W.; Douglas, Jack F. Nano Letters, Vol. 7, Issue 9 https://doi.org/10.1021/nl071354s	journal	September 2007
Ordered Structure in Blends of Block Copolymers. 3. Self-Assembly in Blends of Sphere- or Cylinder-Forming Copolymers Koizumi, Satoshi; Hasegawa, Hirokazu; Hashimoto, Takeji Macromolecules, Vol. 27, Issue 15, p. 4371-4381 https://doi.org/10.1021/ma00093a044	journal	July 1994
Long-Range Order and Orientation of Cylinder-Forming Block Copolymers on Chemically Nanopatterned Striped Surfaces Edwards, Erik W.; Stoykovich, Mark P.; Solak, Harun H. Macromolecules, Vol. 39, Issue 10, p. 3598-3607 https://doi.org/10.1021/ma052335c	journal	May 2006
Complex self-assembled patterns using sparse commensurate templates with locally varying motifs Yang, Joel K. W.; Jung, Yeon Sik; Chang, Jae-Byum Nature Nanotechnology, Vol. 5, Issue 4 https://doi.org/10.1038/nnano.2010.30	journal	March 2010
One-Component Approximation for Binary Diblock Copolymer Blends Matsen, M. W.; Bates, F. S. Macromolecules, Vol. 28, Issue 21 https://doi.org/10.1021/ma00125a041	journal	October 1995
Effects of Lateral Confinement on Order in Spherical Domain Block Copolymer Thin Films Segalman, Rachel A.; Hexemer, Alexander; Kramer, Edward J. Macromolecules, Vol. 36, Issue 18, p. 6831-6839 https://doi.org/10.1021/ma0257696	journal	September 2003
Controlling interfacial interactions for directed self assembly of block copolymers Stein, Gila E.; Mahadevapuram, Nikhila; Mitra, Indranil Journal of Polymer Science Part B: Polymer Physics, Vol. 53, Issue 2, p. 96-102 https://doi.org/10.1002/polb.23502	journal	May 2014
Selective Area Control of Self-Assembled Pattern Architecture Using a Lithographically Patternable Block Copolymer Bosworth, Joan K.; Black, Charles T.; Ober, Christopher K. ACS Nano, Vol. 3, Issue 7 https://doi.org/10.1021/nn900343u	journal	June 2009
Evolution of block-copolymer order through a moving thermal zone Yager, Kevin G.; Fredin, Nathaniel J.; Zhang, Xiaohua Soft Matter, Vol. 6, Issue 1 https://doi.org/10.1039/B916200C	journal	January 2010
Phase Behavior in Thin Films of Cylinder-Forming Block Copolymers Knoll, A.; Horvat, A.; Lyakhova, K. S. Physical Review Letters, Vol. 89, Issue 3 https://doi.org/10.1103/PhysRevLett.89.035501	journal	June 2002
Dynamics of pattern coarsening in a two-dimensional smectic system Harrison, Christopher; Cheng, Zhengdong; Sethuraman, Srinivasan Physical Review E, Vol. 66, Issue 1 https://doi.org/10.1103/PhysRevE.66.011706	journal	July 2002
Formation of superlattices via blending of block copolymers Abetz, Volker; Goldacker, Thorsten Macromolecular Rapid Communications, Vol. 21, Issue 1 https://doi.org/10.1002/(SICI)1521-3927(20000101)21:1<16::AID-MARC16>3.0.CO;2-S	journal	January 2000
Stretching and compression of a macromolecule under different modes of mechanical manupulations Skvortsov, A. M.; Klushin, L. I.; Birshtein, T. M. Polymer Science Series A, Vol. 51, Issue 5 https://doi.org/10.1134/S0965545X09050010	journal	May 2009
Python for Scientific Computing Oliphant, Travis E. Computing in Science & Engineering, Vol. 9, Issue 3 https://doi.org/10.1109/MCSE.2007.58	journal	January 2007
Matplotlib: A 2D Graphics Environment Hunter, John D. Computing in Science & Engineering, Vol. 9, Issue 3 https://doi.org/10.1109/MCSE.2007.55	journal	January 2007
Polymer Self-Assembly as a Novel Extension to Optical Lithography Black, Charles T. ACS Nano, Vol. 1, Issue 3 https://doi.org/10.1021/nn7002663	journal	October 2007

Cited By (3)

Non-native three-dimensional block copolymer morphologies Rahman, Atikur; Majewski, Pawel W.; Doerk, Gregory Nature Communications, Vol. 7, Issue 1 https://doi.org/10.1038/ncomms13988	journal	December 2016
Photothermally Directed Assembly of Block Copolymers Nowak, Samantha R.; Yager, Kevin G. Advanced Materials Interfaces, Vol. 7, Issue 5 https://doi.org/10.1002/admi.201901679	journal	December 2019
Simultaneous fabrication of line and dot dual nanopatterns using miktoarm block copolymer with photocleavable linker Choi, Chungryong; Park, Jichoel; Vincent Joseph, Kanniyambatti L. Nature Communications, Vol. 8, Issue 1 https://doi.org/10.1038/s41467-017-02019-9	journal	November 2017

Similar Records

Autonomous discovery of emergent morphologies in directed self-assembly of block copolymer blends

Journal Article · Fri Jan 13 00:00:00 EST 2023 · Science Advances · OSTI ID:1303021

Doerk, Gregory S.; Stein, Aaron; Bae, Suwon; +3 more

Quantitative three-dimensional characterization of block copolymer directed self-assembly on combined chemical and topographical prepatterned templates

Journal Article · Thu Dec 22 00:00:00 EST 2016 · ACS Nano · OSTI ID:1303021

Segal-Peretz, Tamar; Ren, Jiaxing; Xiong, Shisheng; +8 more

Simple orientational control over cylindrical organic-inorganic block copolymer domains for etch mask applications.

Journal Article · Sun Feb 01 00:00:00 EST 2009 · Thin Solid Films · OSTI ID:1303021

Ramanathan, M; Nettleton, E; Darling, S B

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY

Title: Selective directed self-assembly of coexisting morphologies using block copolymer blends

Citation Formats

References (35)

Cited By (3)

Similar Records

Related Subjects