Wide bandwidth and high resolution planar filter array based on DBR-metasurface-DBR structures

Horie, Yu; Arbabi, Amir; Arbabi, Ehsan; Kamali, Seyedeh Mahsa; Faraon, Andrei

doi:10.1364/OE.24.011677

Title: Wide bandwidth and high resolution planar filter array based on DBR-metasurface-DBR structures

Journal Article · Thu May 19 00:00:00 EDT 2016 · Optics Express

DOI:https://doi.org/10.1364/OE.24.011677· OSTI ID:1287395

Horie, Yu ^[1]; Arbabi, Amir ^[1]; Arbabi, Ehsan ^[1]; Kamali, Seyedeh Mahsa ^[1]; Faraon, Andrei ^[1]

California Inst. of Technology, Pasadena, CA (United States). T. J. Watson Laboratory of Applied Physics

Here, we propose and experimentally demonstrate a planar array of optical bandpass filters composed of low loss dielectric metasurface layers sandwiched between two distributed Bragg reflectors (DBRs). The two DBRs form a Fabry-Perot resonator whose center wavelength is controlled by the design of the transmissive metasurface layer which functions as a phase shifting element. We demonstrate an array of bandpass filters with spatially varying center wavelengths covering a wide range of operation wavelengths of 250nm around λ = 1550nm (Δλ/λ = 16%). The center wavelengths of each filter are independently controlled only by changing the in-plane geometry of the sandwiched metasurfaces, and the experimentally measured quality factors are larger than 700. The demonstrated filter array can be directly integrated on top of photodetector arrays to realize on-chip high-resolution spectrometers with free-space coupling.

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Research Organization:: California Institute of Technology (CalTech), Pasadena, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0001293

OSTI ID:: 1287395

Journal Information:: Optics Express, Vol. 24, Issue 11; ISSN 1094-4087

Publisher:: Optical Society of America (OSA)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 44 works

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References (23)

A lab-on-a-chip for spectrophotometric analysis of biological fluids Minas, G.; Wolffenbuttel, R. F.; Correia, J. H. Lab on a Chip, Vol. 5, Issue 11 https://doi.org/10.1039/b506817g	journal	January 2005
Silicon nanophotonic devices for integrated sensing Momeni, Babak; Yegnanarayanan, Siva; Soltani, Mohammad Journal of Nanophotonics, Vol. 3, Issue 1, Article No. 031001 https://doi.org/10.1117/1.3122986	journal	January 2009
Miniature spectroscopic instrumentation: Applications to biology and chemistry Bacon, Christina P.; Mattley, Yvette; DeFrece, Ronald Review of Scientific Instruments, Vol. 75, Issue 1 https://doi.org/10.1063/1.1633025	journal	January 2004
MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range Wolffenbuttel, R. F. Journal of Micromechanics and Microengineering, Vol. 15, Issue 7 https://doi.org/10.1088/0960-1317/15/7/021	journal	June 2005
High resolution on-chip spectroscopy based on miniaturized microdonut resonators Xia, Zhixuan; Eftekhar, Ali Asghar; Soltani, Mohammad Optics Express, Vol. 19, Issue 13, p. 12356-12364 https://doi.org/10.1364/OE.19.012356	journal	January 2011
Sub-nm resolution cavity enhanced microspectrometer Kyotoku, Bernardo B. C.; Chen, Long; Lipson, Michal Optics Express, Vol. 18, Issue 1, p. 102-107 https://doi.org/10.1364/OE.18.000102	journal	December 2009
A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides Cheben, P.; Schmid, J. H.; Delâge, A. Optics Express, Vol. 15, Issue 5 https://doi.org/10.1364/OE.15.002299	journal	January 2007
Concept of a high-resolution miniature spectrometer using an integrated filter array Wang, Shao-Wei; Xia, Changsheng; Chen, Xiaoshuang Optics Letters, Vol. 32, Issue 6, p. 632-634 https://doi.org/10.1364/OL.32.000632	journal	January 2007
High-selectivity single-chip spectrometer in silicon for operation in visible part of the spectrum Correia, J. H.; Bartek, M.; Wolffenbuttel, R. F. IEEE Transactions on Electron Devices, Vol. 47, Issue 3 https://doi.org/10.1109/16.824727	journal	March 2000
Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter Emadi, Arvin; Wu, Huaiwen; de Graaf, Ger Optics Express, Vol. 20, Issue 1 https://doi.org/10.1364/OE.20.000489	journal	December 2011
Fabrication of CMOS-compatible optical filter arrays using gray-scale lithography Xiao, Jing; Song, Fuchuan; Han, Kijeong Journal of Micromechanics and Microengineering, Vol. 22, Issue 2, Article No. 025006 https://doi.org/10.1088/0960-1317/22/2/025006	journal	January 2012
Flat optics with designer metasurfaces Yu, Nanfang; Capasso, Federico Nature Materials, Vol. 13, Issue 2, p. 139-150 https://doi.org/10.1038/nmat3839	journal	February 2014
All-dielectric metamaterials Jahani, Saman; Jacob, Zubin Nature Nanotechnology, Vol. 11, Issue 1 https://doi.org/10.1038/nnano.2015.304	journal	January 2016
Planar Photonics with Metasurfaces Kildishev, A. V.; Boltasseva, A.; Shalaev, V. M. Science, Vol. 339, Issue 6125, p. 1232009-1232009 https://doi.org/10.1126/science.1232009	journal	March 2013
Sub-Wavelength Grating Lenses With a Twist Vo, Sonny; Fattal, David; Sorin, Wayne V. IEEE Photonics Technology Letters, Vol. 26, Issue 13, p. 1375-1378 https://doi.org/10.1109/LPT.2014.2325947	journal	July 2014
Dielectric gradient metasurface optical elements Lin, D.; Fan, P.; Hasman, E. Science, Vol. 345, Issue 6194, p. 298-302 https://doi.org/10.1126/science.1253213	journal	July 2014
Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays Arbabi, Amir; Horie, Yu; Ball, Alexander J. Nature Communications, Vol. 6, Article No. 7069 https://doi.org/10.1038/ncomms8069	journal	May 2015
Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission Arbabi, Amir; Horie, Yu; Bagheri, Mahmood Nature Nanotechnology, Vol. 10, Issue 11, p. 937-943 https://doi.org/10.1038/nnano.2015.186	journal	August 2015
How to deal with the loss in plasmonics and metamaterials Khurgin, Jacob B. Nature Nanotechnology, Vol. 10, Issue 1 https://doi.org/10.1038/nnano.2014.310	journal	January 2015
Narrowband multispectral filter set for visible band Walls, K.; Chen, Q.; Grant, J. Optics Express, Vol. 20, Issue 20 https://doi.org/10.1364/OE.20.021917	journal	January 2012
Two-dimensional array of optical interference filters produced by lithographic alterations of the index of refraction Kaushik, Sumanth; Stallard, Brian R. SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, SPIE Proceedings https://doi.org/10.1117/12.221254	conference	September 1995
S⁴ : A free electromagnetic solver for layered periodic structures Liu, Victor; Fan, Shanhui Computer Physics Communications, Vol. 183, Issue 10, p. 2233-2244 https://doi.org/10.1016/j.cpc.2012.04.026	journal	October 2012
High resolution on-chip optical filter array based on double subwavelength grating reflectors Horie, Yu; Arbabi, Amir; Han, Seunghoon Optics Express, Vol. 23, Issue 23, p. 29848-29854 https://doi.org/10.1364/OE.23.029848	journal	January 2015

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