Purification of Nanoscale Electron-Beam-Induced Platinum Deposits via a Pulsed Laser-Induced Oxidation Reaction

Stanford, Michael G.; Lewis, Brett B.; Noh, Joo Hyon; Fowlkes, Jason Davidson; Roberts, Nicholas A.; Plank, Harald; Rack, Philip D.

doi:10.1021/am506246z

Title: Purification of Nanoscale Electron-Beam-Induced Platinum Deposits via a Pulsed Laser-Induced Oxidation Reaction

Journal Article · Wed Nov 05 00:00:00 EST 2014 · ACS Applied Materials and Interfaces

DOI:https://doi.org/10.1021/am506246z· OSTI ID:1286840

Stanford, Michael G. ^[1]; Lewis, Brett B. ^[1]; Noh, Joo Hyon ^[1]; Fowlkes, Jason Davidson ^[2]; Roberts, Nicholas A. ^[3]; Plank, Harald ^[4]; Rack, Philip D. ^[5]

Univ. of Tennessee, Knoxville, TN (United States)
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Utah State Univ., Logan, UT (United States)
Graz Univ. of Technology (Austria)
Univ. of Tennessee, Knoxville, TN (United States); Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

Platinum–carbon deposits made via electron-beam-induced deposition were purified in this study via a pulsed laser-induced oxidation reaction and erosion of the amorphous carbon to form pure platinum. Purification proceeds from the top down and is likely catalytically facilitated via the evolving platinum layer. Thermal simulations suggest a temperature threshold of ~485 K, and the purification rate is a function of the PtC₅ thickness (80–360 nm) and laser pulse width (1–100 μs) in the ranges studied. The thickness dependence is attributed to the ~235 nm penetration depth of the PtC₅ composite at the laser wavelength, and the pulse-width dependence is attributed to the increased temperatures achieved at longer pulse widths. Finally, remarkably fast purification is realized at cumulative laser exposure times of less than 1 s.

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)

Sponsoring Organization:: USDOE Office of Science (SC)

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1286840

Journal Information:: ACS Applied Materials and Interfaces, Vol. 6, Issue 23; ISSN 1944-8244

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 42 works

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References (53)

Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective Botman, A.; Mulders, J. J. L.; Hagen, C. W. Nanotechnology, Vol. 20, Issue 37 https://doi.org/10.1088/0957-4484/20/37/372001	journal	August 2009
Focused, Nanoscale Electron-Beam-Induced Deposition and Etching Randolph, S. J.; Fowlkes, J. D.; Rack, P. D. Critical Reviews in Solid State and Materials Sciences, Vol. 31, Issue 3 https://doi.org/10.1080/10408430600930438	journal	September 2006
Resolution in focused electron- and ion-beam induced processing Utke, Ivo; Friedli, Vinzenz; Purrucker, Martin Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6 https://doi.org/10.1116/1.2789441	journal	January 2007
Understanding the Kinetics and Nanoscale Morphology of Electron-Beam-Induced Deposition via a Three-Dimensional Monte Carlo Simulation: The Effects of the Precursor Molecule and the Deposited Material Smith, Daryl A.; Fowlkes, Jason D.; Rack, Philip D. Small, Vol. 4, Issue 9 https://doi.org/10.1002/smll.200701133	journal	September 2008
Fundamental Electron-Precursor-Solid Interactions Derived from Time-Dependent Electron-Beam-Induced Deposition Simulations and Experiments Fowlkes, Jason D.; Rack, Philip D. ACS Nano, Vol. 4, Issue 3 https://doi.org/10.1021/nn901363a	journal	March 2010
Analysis of electron beam induced deposition (EBID) of residual hydrocarbons in electron microscopy Rykaczewski, Konrad; White, William B.; Fedorov, Andrei G. Journal of Applied Physics, Vol. 101, Issue 5 https://doi.org/10.1063/1.2437065	journal	March 2007
Electron flux controlled switching between electron beam induced etching and deposition Toth, Milos; Lobo, Charlene J.; Hartigan, Gavin Journal of Applied Physics, Vol. 101, Issue 5 https://doi.org/10.1063/1.2437667	journal	March 2007
High-resolution magnetic Co supertips grown by a focused electron beam Utke, I.; Hoffmann, P.; Berger, R. Applied Physics Letters, Vol. 80, Issue 25 https://doi.org/10.1063/1.1489097	journal	June 2002
Nanofabrication of insulated scanning probes for electromechanical imaging in liquid solutions Noh, Joo Hyon; Nikiforov, Maxim; Kalinin, Sergei V. Nanotechnology, Vol. 21, Issue 36 https://doi.org/10.1088/0957-4484/21/36/365302	journal	August 2010
Ultrasmall Functional Ferromagnetic Nanostructures Grown by Focused Electron-Beam-Induced Deposition Serrano-Ramón, Luis; Córdoba, Rosa; Rodríguez, Luis Alfredo ACS Nano, Vol. 5, Issue 10 https://doi.org/10.1021/nn201517r	journal	September 2011
Synthesis of Individually Tuned Nanomagnets for Nanomagnet Logic by Direct Write Focused Electron Beam Induced Deposition Gavagnin, Marco; Wanzenboeck, Heinz D.; Belić, Domagoj ACS Nano, Vol. 7, Issue 1 https://doi.org/10.1021/nn305079a	journal	December 2012
Nanofocusing in a metal–insulator–metal gap plasmon waveguide with a three-dimensional linear taper Choo, Hyuck; Kim, Myung-Ki; Staffaroni, Matteo Nature Photonics, Vol. 6, Issue 12, p. 838-844 https://doi.org/10.1038/nphoton.2012.277	journal	November 2012
Polarisation stabilisation of vertical cavity surface emitting lasers by minimally invasive focused electron beam triggered chemistry Utke, Ivo; Jenke, Martin G.; Röling, Christian Nanoscale, Vol. 3, Issue 7 https://doi.org/10.1039/c1nr10047e	journal	January 2011
Conductive dots, wires, and supertips for field electron emitters produced by electron-beam induced deposition on samples having increased temperature Koops, H. W. P. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 14, Issue 6 https://doi.org/10.1116/1.588600	journal	November 1996
Integrated tungsten nanofiber field emission cathodes selectively grown by nanoscale electron beam-induced deposition Yang, X.; Simpson, M. L.; Randolph, S. J. Applied Physics Letters, Vol. 86, Issue 18 https://doi.org/10.1063/1.1922568	journal	May 2005
Variable tunneling barriers in FEBID based PtC metal-matrix nanocomposites as a transducing element for humidity sensing Kolb, Florian; Schmoltner, Kerstin; Huth, Michael Nanotechnology, Vol. 24, Issue 30 https://doi.org/10.1088/0957-4484/24/30/305501	journal	July 2013
A Tunable Strain Sensor Using Nanogranular Metals Schwalb, Christian H.; Grimm, Christina; Baranowski, Markus Sensors, Vol. 10, Issue 11 https://doi.org/10.3390/s101109847	journal	November 2010
Nanoscale lithography via electron beam induced deposition Guan, Yingfeng; Fowlkes, Jason D.; Retterer, Scott T. Nanotechnology, Vol. 19, Issue 50 https://doi.org/10.1088/0957-4484/19/50/505302	journal	November 2008
Direct-Write Atomic Layer Deposition of High-Quality Pt Nanostructures: Selective Growth Conditions and Seed Layer Requirements Mackus, A. J. M.; Thissen, N. F. W.; Mulders, J. J. L. The Journal of Physical Chemistry C, Vol. 117, Issue 20 https://doi.org/10.1021/jp402260j	journal	May 2013
Maskless and Resist-Free Rapid Prototyping of Three-Dimensional Structures Through Electron Beam Induced Deposition (EBID) of Carbon in Combination with Metal-Assisted Chemical Etching (MaCE) of Silicon Rykaczewski, Konrad; Hildreth, Owen J.; Kulkarni, Dhaval ACS Applied Materials & Interfaces, Vol. 2, Issue 4 https://doi.org/10.1021/am1000773	journal	March 2010
Electroplating using high-aspect-ratio microstructures fabricated by proton beam writing Seki, Y.; Furuta, Y.; Nishikawa, H. Microelectronic Engineering, Vol. 86, Issue 4-6 https://doi.org/10.1016/j.mee.2009.01.013	journal	April 2009
Inhibiting spontaneous etching of nanoscale electron beam induced etching features: Solutions for nanoscale repair of extreme ultraviolet lithography masks Lassiter, Matthew G.; Liang, Ted; Rack, Philip D. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 3 https://doi.org/10.1116/1.2917076	journal	January 2008
Advanced photolithographic mask repair using electron beams Liang, Ted; Frendberg, Eric; Lieberman, Barry Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 6 https://doi.org/10.1116/1.2062428	journal	January 2005
Nanoscale electron beam-induced deposition and purification of ruthenium for extreme ultraviolet lithography mask repair Noh, J. H.; Stanford, M. G.; Lewis, B. B. Applied Physics A, Vol. 117, Issue 4 https://doi.org/10.1007/s00339-014-8745-0	journal	August 2014
Gas assisted focused electron beam induced etching of alumina Bret, T.; Afra, B.; Becker, R. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6 https://doi.org/10.1116/1.3243208	journal	January 2009
Microstructural analysis and Transport Properties of MoO and MoC nanostructures prepared by focused electron beam-induced deposition Makise, Kazumasa; Mitsuishi, Kazutaka; Shimojo, Masayuki Scientific Reports, Vol. 4, Issue 1 https://doi.org/10.1038/srep05740	journal	July 2014
Superconductivity and metallic behavior in Pb _x C _y O _δ structures prepared by focused electron beam induced deposition Winhold, M.; Weirich, P. M.; Schwalb, C. H. Applied Physics Letters, Vol. 105, Issue 16 https://doi.org/10.1063/1.4898819	journal	October 2014
Electrodes for carbon nanotube devices by focused electron beam induced deposition of gold Brintlinger, T.; Fuhrer, M. S.; Melngailis, J. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 6 https://doi.org/10.1116/1.2130355	journal	January 2005
Improving the conductivity of platinum-containing nano-structures created by electron-beam-induced deposition Botman, A.; Hesselberth, M.; Mulders, J. J. L. Microelectronic Engineering, Vol. 85, Issue 5-6 https://doi.org/10.1016/j.mee.2007.12.036	journal	May 2008
The influence of beam defocus on volume growth rates for electron beam induced platinum deposition Plank, H.; Gspan, C.; Dienstleder, M. Nanotechnology, Vol. 19, Issue 48 https://doi.org/10.1088/0957-4484/19/48/485302	journal	November 2008
Rapid Prototyping of Site-Specific Nanocontacts by Electron and Ion Beam Assisted Direct-Write Nanolithography Gopal, Vidyut; Radmilovic, Velimir R.; Daraio, Chiara Nano Letters, Vol. 4, Issue 11 https://doi.org/10.1021/nl0492133	journal	November 2004
Purification of platinum and gold structures after electron-beam-induced deposition Botman, A.; Mulders, J. J. L.; Weemaes, R. Nanotechnology, Vol. 17, Issue 15 https://doi.org/10.1088/0957-4484/17/15/028	journal	July 2006
Reducing the resistivity of electron and ion beam assisted deposited Pt Langford, R. M.; Wang, T. -X.; Ozkaya, D. Microelectronic Engineering, Vol. 84, Issue 5-8 https://doi.org/10.1016/j.mee.2007.01.055	journal	May 2007
Formation of complex features using electron-beam direct-write decomposition of palladium acetate Stark, T. J. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 10, Issue 6 https://doi.org/10.1116/1.586026	journal	November 1992
Single-crystal nanowires grown via electron-beam-induced deposition Klein, K. L.; Randolph, S. J.; Fowlkes, J. D. Nanotechnology, Vol. 19, Issue 34 https://doi.org/10.1088/0957-4484/19/34/345705	journal	July 2008
Magnetotransport properties of high-quality cobalt nanowires grown by focused-electron-beam-induced deposition Fernández-Pacheco, A.; De Teresa, J. M.; Córdoba, R. Journal of Physics D: Applied Physics, Vol. 42, Issue 5 https://doi.org/10.1088/0022-3727/42/5/055005	journal	February 2009
Nanofabrication Tseng, Ampere A. World Scientific https://doi.org/10.1142/6276	book	March 2008
Effects of Water Vapour on Electron and Ion Beam Deposited Platinum Langford, Richard M.; Ozkaya, Dogan; Sheridan, J. Microscopy and Microanalysis, Vol. 10, Issue S02 https://doi.org/10.1017/S1431927604883417	journal	August 2004
Focused Electron Beam Induced Deposition of Si-Based Materials From SiOxCy to Stoichiometric SiO2: Chemical Compositions, Chemical-Etch Rates, and Deep Ultraviolet Optical Transmissions Perentes, A.; Hoffmann, P. Chemical Vapor Deposition, Vol. 13, Issue 4 https://doi.org/10.1002/cvde.200606583	journal	April 2007
A new sequential EBID process for the creation of pure Pt structures from MeCpPtMe ₃ Mehendale, S.; Mulders, J. J. L.; Trompenaars, P. H. F. Nanotechnology, Vol. 24, Issue 14 https://doi.org/10.1088/0957-4484/24/14/145303	journal	March 2013
Electron-Beam-Assisted Oxygen Purification at Low Temperatures for Electron-Beam-Induced Pt Deposits: Towards Pure and High-Fidelity Nanostructures Plank, Harald; Noh, Joo Hyon; Fowlkes, Jason D. ACS Applied Materials & Interfaces, Vol. 6, Issue 2 https://doi.org/10.1021/am4045458	journal	December 2013
Rapid and Highly Compact Purification for Focused Electron Beam Induced Deposits: A Low Temperature Approach Using Electron Stimulated H ₂ O Reactions Geier, Barbara; Gspan, Christian; Winkler, Robert The Journal of Physical Chemistry C, Vol. 118, Issue 25 https://doi.org/10.1021/jp503442b	journal	June 2014
Post-deposition processes for nanostructures formed by electron beam induced deposition with Pt(PF3)4 precursor Takeguchi, M.; Shimojo, M.; Furuya, K. Applied Physics A, Vol. 93, Issue 2 https://doi.org/10.1007/s00339-008-4851-1	journal	November 2008
Tuning the electrical conductivity of Pt-containing granular metals by postgrowth electron irradiation Porrati, F.; Sachser, R.; Schwalb, C. H. Journal of Applied Physics, Vol. 109, Issue 6 https://doi.org/10.1063/1.3559773	journal	March 2011
Enhanced by-product desorption via laser assisted electron beam induced deposition of W(CO) ₆ with improved conductivity and resolution Roberts, Nicholas A.; Gonzalez, Carlos M.; Fowlkes, Jason D. Nanotechnology, Vol. 24, Issue 41 https://doi.org/10.1088/0957-4484/24/41/415301	journal	September 2013
In situ laser processing in a scanning electron microscope Roberts, Nicholas A.; Magel, Gregory A.; Hartfield, Cheryl D. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 4 https://doi.org/10.1116/1.4731254	journal	July 2012
Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis Arnold, Georg; Timilsina, Rajendra; Fowlkes, Jason ACS Applied Materials & Interfaces, Vol. 6, Issue 10 https://doi.org/10.1021/am5008003	journal	May 2014
Fundamental Proximity Effects in Focused Electron Beam Induced Deposition Plank, Harald; Smith, Daryl A.; Haber, Thomas ACS Nano, Vol. 6, Issue 1 https://doi.org/10.1021/nn204237h	journal	December 2011
Chemical sputtering of carbon films by simultaneous irradiation with argon ions and molecular oxygen Hopf, C.; Schlüter, M.; Schwarz-Selinger, T. New Journal of Physics, Vol. 10, Issue 9 https://doi.org/10.1088/1367-2630/10/9/093022	journal	September 2008
Platinum Film Growth by Chemical Vapor Deposition Based on Autocatalytic Oxidative Decomposition Hiratani, Masahiko; Nabatame, Toshihide; Matsui, Yuichi Journal of The Electrochemical Society, Vol. 148, Issue 8 https://doi.org/10.1149/1.1381389	journal	January 2001
A molecular beam study of the adsorption and desorption of oxygen from a Pt(111) surface Campbell, C. T.; Ertl, G.; Kuipers, H. Surface Science, Vol. 107, Issue 1 https://doi.org/10.1016/0039-6028(81)90622-1	journal	May 1981
The reactivity and auger chemical shift of oxygen adsorbed on platinum Matsushima, T.; Almy, D. B.; White, J. M. Surface Science, Vol. 67, Issue 1 https://doi.org/10.1016/0039-6028(77)90372-7	journal	October 1977
Catalytic Purification of Directly Written Nanostructured Pt Microelectrodes Sachser, Roland; Reith, Heiko; Huzel, Daniel ACS Applied Materials & Interfaces, Vol. 6, Issue 18 https://doi.org/10.1021/am503407y	journal	September 2014

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