Planarized arrays of aligned, untangled multiwall carbon nanotubes with Ohmic back contacts

Rochford, C.; Limmer, S. J.; Howell, S. W.; Beechem, T. E.; Siegal, M. P.

doi:10.1557/jmr.2014.359

Title: Planarized arrays of aligned, untangled multiwall carbon nanotubes with Ohmic back contacts

Journal Article · Wed Nov 26 00:00:00 EST 2014 · Journal of Materials Research

DOI:https://doi.org/10.1557/jmr.2014.359· OSTI ID:1235254

Rochford, C. ^[1]; Limmer, S. J. ^[1]; Howell, S. W. ^[1]; Beechem, T. E. ^[1]; Siegal, M. P. ^[1]

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Vertically aligned, untangled planarized arrays of multiwall carbon nanotubes (MWNTs) with Ohmic back contacts were grown in nanopore templates on arbitrary substrates. The templates were prepared by sputter depositing Nd-doped Al films onto W-coated substrates, followed by anodization to form an aluminum oxide nanopore array. The W underlayer helps eliminate the aluminum oxide barrier that typically occurs at the nanopore bottoms by instead forming a thin WO₃ layer. The WO₃ can be selectively etched to enable electrodeposition of Co catalysts with control over the Co site density. This led to control of the site density of MWNTs grown by thermal chemical vapor deposition, with the W also serving as a back electrical contact. As a result, Ohmic contact to MWNTs was confirmed, even following ultrasonic cutting of the entire array to a uniform height.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC04-94AL85000

OSTI ID:: 1235254

Report Number(s):: SAND-2014-17681J; applab; PII: S0884291414003598

Journal Information:: Journal of Materials Research, Vol. 30, Issue 02; ISSN 0884-2914

Publisher:: Materials Research SocietyCopyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 5 works

Citation information provided by
Web of Science

References (30)

Engineering Carbon Nanotubes and Nanotube Circuits Using Electrical Breakdown Collins, Philip G.; Arnold, Michael S.; Avouris, Phaedon Science, Vol. 292, Issue 5517, p. 706-709 https://doi.org/10.1126/science.1058782	journal	April 2001
Electrochemical Deposition of Bi ₂ (Te,Se) ₃ Nanowire Arrays on Si Limmer, Steven J.; Yelton, W. Graham; Siegal, Michael P. Journal of The Electrochemical Society, Vol. 159, Issue 4 https://doi.org/10.1149/2.084204jes	journal	January 2012
Preparation of Aligned Carbon Nanotubes with Prescribed Dimensions: Template Synthesis and Sonication Cutting Approach Jeong, Soo-Hwan; Lee, Ok-Joo; Lee, Kun-Hong Chemistry of Materials, Vol. 14, Issue 4 https://doi.org/10.1021/cm011620h	journal	April 2002
Carbon nanotubes for electronics manufacturing and packaging: from growth to integration Liu, Johan; Jiang, Di; Fu, Yifeng Advances in Manufacturing, Vol. 1, Issue 1 https://doi.org/10.1007/s40436-013-0007-4	journal	March 2013
Effect of Graphitization on the Wettability and Electrical Conductivity of CVD-Carbon Nanotubes and Films Mattia, D.; Rossi, M. P.; Kim, B. M. The Journal of Physical Chemistry B, Vol. 110, Issue 20 https://doi.org/10.1021/jp061138s	journal	May 2006
Template-based carbon nanotubes and their application to a field emitter Jeong, Soo-Hwan; Hwang, Hee-Young; Lee, Kun-Hong Applied Physics Letters, Vol. 78, Issue 14 https://doi.org/10.1063/1.1359483	journal	April 2001
Self-Oriented Regular Arrays of Carbon Nanotubes and Their Field Emission Properties Fan, Shoushan; Chapline, Michael G.; Franklin, Nathan R. Science, Vol. 283, Issue 5401, p. 512-514 https://doi.org/10.1126/science.283.5401.512	journal	January 1999
Field emission from carbon nanotubes and its application to electron sources Saito, Yahachi; Uemura, Sashiro Carbon, Vol. 38, Issue 2 https://doi.org/10.1016/S0008-6223(99)00139-6	journal	January 2000
Linear Behavior of Carbon Nanotube Diameters with Growth Temperature Siegal, Michael P.; Overmyer, Donald L.; Provencio, Paula P. The Journal of Physical Chemistry C, Vol. 114, Issue 35 https://doi.org/10.1021/jp105815u	journal	August 2010
Synthesis of Large Arrays of Well-Aligned Carbon Nanotubes on Glass Ren, Z. F. Science, Vol. 282, Issue 5391 https://doi.org/10.1126/science.282.5391.1105	journal	November 1998
Preparation of Free-Standing Nanowire Arrays on Conductive Substrates Liang, Yongqi; Zhen, Changgua; Zou, Dechun Journal of the American Chemical Society, Vol. 126, Issue 50 https://doi.org/10.1021/ja044545v	journal	December 2004
Highly-ordered carbon nanotube arrays for electronics applications Li, J.; Papadopoulos, C.; Xu, J. M. Applied Physics Letters, Vol. 75, Issue 3 https://doi.org/10.1063/1.124377	journal	July 1999
Phonons in carbon nanotubes Dresselhaus, M. S.; Eklund, P. C. Advances in Physics, Vol. 49, Issue 6 https://doi.org/10.1080/000187300413184	journal	September 2000
Pulsed electrodeposition into AAO templates for CVD growth of carbon nanotube arrays Sklar, G. P.; Paramguru, K.; Misra, M. Nanotechnology, Vol. 16, Issue 8 https://doi.org/10.1088/0957-4484/16/8/047	journal	June 2005
99.9% purity multi-walled carbon nanotubes by vacuum high-temperature annealing Huang, Wei; Wang, Yao; Luo, Guohua Carbon, Vol. 41, Issue 13, p. 2585-2590 https://doi.org/10.1016/S0008-6223(03)00330-0	journal	January 2003
Precise control of multiwall carbon nanotube diameters using thermal chemical vapor deposition Siegal, M. P.; Overmyer, D. L.; Provencio, P. P. Applied Physics Letters, Vol. 80, Issue 12 https://doi.org/10.1063/1.1463204	journal	March 2002
WSXM : A software for scanning probe microscopy and a tool for nanotechnology Horcas, I.; Fernández, R.; Gómez-Rodríguez, J. M. Review of Scientific Instruments, Vol. 78, Issue 1 https://doi.org/10.1063/1.2432410	journal	January 2007
Highly ordered two-dimensional carbon nanotube arrays Suh, Jung Sang; Lee, Jin Seung Applied Physics Letters, Vol. 75, Issue 14 https://doi.org/10.1063/1.124911	journal	October 1999
Recrystallized Arrays of Bismuth Nanowires with Trigonal Orientation Limmer, Steven J.; Yelton, W. Graham; Erickson, Kristopher J. Nano Letters, Vol. 14, Issue 4 https://doi.org/10.1021/nl404752p	journal	March 2014
Preparation of high yield multi-walled carbon nanotubes by microwave plasma chemical vapor deposition at low temperature Chen, Mi; Chen, Chieng-Ming; Chen, Chia-Fu Journal of Materials Science, Vol. 37, Issue 17, p. 3561-3567 https://doi.org/10.1023/A:1016544001173	journal	January 2002
Controlling the site density of multiwall carbon nanotubes via growth conditions Siegal, M. P.; Overmyer, D. L.; Kaatz, F. H. Applied Physics Letters, Vol. 84, Issue 25 https://doi.org/10.1063/1.1765741	journal	June 2004
Packing Density Control of Aligned Carbon Nanotubes Jeong, Soo-Hwan; Lee, Ok-Joo; Lee, Kun-Hong Chemistry of Materials, Vol. 14, Issue 10 https://doi.org/10.1021/cm020302v	journal	October 2002
Low temperature growth of multi-wall carbon nanotubes assisted by mesh potential using a modified plasma enhanced chemical vapor deposition system Kang, H. S.; Yoon, H. J.; Kim, C. O. Chemical Physics Letters, Vol. 349, Issue 3-4 https://doi.org/10.1016/S0009-2614(01)01205-2	journal	November 2001
Fabrication of the aligned and patterned carbon nanotube field emitters using the anodic aluminum oxide nano-template on a Si wafer Jeong, Soo-Hwan; Lee, Kun-Hong Synthetic Metals, Vol. 139, Issue 2 https://doi.org/10.1016/S0379-6779(03)00187-5	journal	September 2003
Growth of Carbon Nanotubes on Anodic Aluminum Oxide Templates: Fabrication of a Tube-in-Tube and Linearly Joined Tube Lee, Jin Seung; Gu, Geun Hoi; Kim, Hoseong Chemistry of Materials, Vol. 13, Issue 7 https://doi.org/10.1021/cm0014076	journal	July 2001
Growth control of single and multi-walled carbon nanotubes by thin film catalyst Joon Yoon, Young; Cheol Bae, Jun; Koo Baik, Hong Chemical Physics Letters, Vol. 366, Issue 1-2 https://doi.org/10.1016/S0009-2614(02)01548-8	journal	November 2002
Selective Barrier Perforation in Porous Alumina Anodized on Substrates Oh, Jihun; Thompson, Carl V. Advanced Materials, Vol. 20, Issue 7 https://doi.org/10.1002/adma.200701719	journal	April 2008
Carbon nanotube array-based biosensor Sotiropoulou, Sofia; Chaniotakis, Nikolas A. Analytical and Bioanalytical Chemistry, Vol. 375, Issue 1 https://doi.org/10.1007/s00216-002-1617-z	journal	January 2003
Field emission of carbon nanotubes on anodic aluminum oxide template with controlled tube density Chen, Po-Lin; Chang, Jun-Kai; Kuo, Cheng-Tzu Applied Physics Letters, Vol. 86, Issue 12 https://doi.org/10.1063/1.1886260	journal	March 2005
Low-temperature growth of multi-walled carbon nanotubes by thermal CVD: Low-temperature growth of multi-walled carbon nanotubes by thermal CVD Halonen, Niina; Sápi, András; Nagy, László physica status solidi (b), Vol. 248, Issue 11 https://doi.org/10.1002/pssb.201100137	journal	August 2011

Cited By (2)

Electrical and morphological behavior of carbon nanotubes synthesized within porous anodic alumina templates Sacco, Leandro; Florea, Ileana; Châtelet, Marc Journal of Physics: Materials, Vol. 1, Issue 1 https://doi.org/10.1088/2515-7639/aad57f	journal	September 2018
Visible- and solar-blind photodetectors using AlGaN high electron mobility transistors with a nanodot-based floating gate Armstrong, Andrew M.; Klein, Brianna A.; Allerman, Andrew A. Photonics Research, Vol. 7, Issue 6 https://doi.org/10.1364/prj.7.000b24	journal	January 2019

Similar Records

Formation of Ohmic back contact for Ag2ZnSn(S,Se)4 photovoltaic devices

Patent · Tue Oct 15 00:00:00 EDT 2019 · OSTI ID:1235254

Gershon, Talia S.; Gunawan, Oki; Haight, Richard A.; +1 more

Solar Cell Nanotechnology (Final Technical Report)

Technical Report · Wed May 07 00:00:00 EDT 2014 · OSTI ID:1235254

Das, Biswajit

Perpendicular recording media using phase-separated AlSi films

Journal Article · Sun May 15 00:00:00 EDT 2005 · Journal of Applied Physics · OSTI ID:1235254

Yasui, N; Nakamura, T; Fukutani, K; +4 more

Related Subjects

36 MATERIALS SCIENCE

Title: Planarized arrays of aligned, untangled multiwall carbon nanotubes with Ohmic back contacts

Citation Formats

References (30)

Cited By (2)

Similar Records

Related Subjects