skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Multilayer heterostructures and their manufacture

Abstract

A method of synthesizing multilayer heterostructures including an inorganic oxide layer residing on a solid substrate is described. Exemplary embodiments include producing an inorganic oxide layer on a solid substrate by a liquid coating process under relatively mild conditions. The relatively mild conditions include temperatures below 225.degree. C. and pressures above 9.4 mb. In an exemplary embodiment, a solution of diethyl aluminum ethoxide in anhydrous diglyme is applied to a flexible solid substrate by slot-die coating at ambient atmospheric pressure, and the diglyme removed by evaporation. An AlO.sub.x layer is formed by subjecting material remaining on the solid substrate to a relatively mild oven temperature of approximately 150.degree. C. The resulting AlO.sub.x layer exhibits relatively high light transmittance and relatively low vapor transmission rates for water. An exemplary embodiment of a flexible solid substrate is polyethylene napthalate (PEN). The PEN is not substantially adversely affected by exposure to 150.degree. C

Inventors:
; ; ; ; ; ;
Publication Date:
Research Org.:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1224882
Patent Number(s):
9,175,397
Application Number:
13/048,251
Assignee:
Alliance for Sustainable Energy, LLC (
DOE Contract Number:  
AC36-08GO28308
Resource Type:
Patent
Resource Relation:
Patent File Date: 2011 Mar 15
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Hammond, Scott R, Reese, Matthew, Rupert, Benjamin, Miedaner, Alexander, Curtis, Clavin, Olson, Dana, and Ginley, David S. Multilayer heterostructures and their manufacture. United States: N. p., 2015. Web.
Hammond, Scott R, Reese, Matthew, Rupert, Benjamin, Miedaner, Alexander, Curtis, Clavin, Olson, Dana, & Ginley, David S. Multilayer heterostructures and their manufacture. United States.
Hammond, Scott R, Reese, Matthew, Rupert, Benjamin, Miedaner, Alexander, Curtis, Clavin, Olson, Dana, and Ginley, David S. 2015. "Multilayer heterostructures and their manufacture". United States. https://www.osti.gov/servlets/purl/1224882.
@article{osti_1224882,
title = {Multilayer heterostructures and their manufacture},
author = {Hammond, Scott R and Reese, Matthew and Rupert, Benjamin and Miedaner, Alexander and Curtis, Clavin and Olson, Dana and Ginley, David S},
abstractNote = {A method of synthesizing multilayer heterostructures including an inorganic oxide layer residing on a solid substrate is described. Exemplary embodiments include producing an inorganic oxide layer on a solid substrate by a liquid coating process under relatively mild conditions. The relatively mild conditions include temperatures below 225.degree. C. and pressures above 9.4 mb. In an exemplary embodiment, a solution of diethyl aluminum ethoxide in anhydrous diglyme is applied to a flexible solid substrate by slot-die coating at ambient atmospheric pressure, and the diglyme removed by evaporation. An AlO.sub.x layer is formed by subjecting material remaining on the solid substrate to a relatively mild oven temperature of approximately 150.degree. C. The resulting AlO.sub.x layer exhibits relatively high light transmittance and relatively low vapor transmission rates for water. An exemplary embodiment of a flexible solid substrate is polyethylene napthalate (PEN). The PEN is not substantially adversely affected by exposure to 150.degree. C},
doi = {},
url = {https://www.osti.gov/biblio/1224882}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Wed Nov 04 00:00:00 EST 2015},
month = {Wed Nov 04 00:00:00 EST 2015}
}

Works referenced in this record:

Process for depositing silicon dioxide films
patent, July 1992


Apparatus for forming thin film by chemical vapor deposition
patent, July 1998


Nanoparticulate Encapsulation Barrier Stack
patent-application, April 2010


Aqueous Inorganic Inks for Low-Temperature Fabrication of ZnO TFTs
journal, December 2008

  • Meyers, Stephen T.; Anderson, Jeremy T.; Hung, Celia M.
  • Journal of the American Chemical Society, Vol. 130, Issue 51, p. 17603-17609
  • https://doi.org/10.1021/ja808243k

Assembly of conducting polymer/ metal oxide multilayer in one step
journal, June 1999


Thin-Film Permeation-Barrier Technology for Flexible Organic Light-Emitting Devices
journal, January 2004


Mechanisms of vapor permeation through multilayer barrier films: Lag time versus equilibrium permeation
journal, August 2004


Organic light-emitting devices with extended operating lifetimes on plastic substrates
journal, October 2002


Low-temperature preparation of photocatalytic TiO2 thin films from anatase sols
journal, February 2005


Preparation of textured alumina films by the sol-gel route
journal, February 1995


Surface Chemistry for Atomic Layer Growth
journal, January 1996


Mild solution synthesis of zinc oxide films with superhydrophobicity and superhydrophilicity
journal, January 2005


SiOx Gas Barrier Coatings on Polymer Substrates:  Morphology and Gas Transport Considerations
journal, July 1999