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Title: High-order multilayer coated blazed gratings for high resolution soft x-ray spectroscopy

Journal Article · · Optics Express
DOI:https://doi.org/10.1364/OE.23.004771· OSTI ID:1219409
 [1];  [2];  [1];  [1];  [1]
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
  2. Saint Petersburg Academic Univ. and Inst. for Analytical Instrumentation, St. Petersburg (Russia)

A grand challenge in soft x-ray spectroscopy is to drive the resolving power of monochromators and spectrometers from the 104 achieved routinely today to well above 105. This need is driven mainly by the requirements of a new technique that is set to have enormous impact in condensed matter physics, Resonant Inelastic X-ray Scattering (RIXS). Unlike x-ray absorption spectroscopy, RIXS is not limited by an energy resolution dictated by the core-hole lifetime in the excitation process. Using much higher resolving power than used for normal x-ray absorption spectroscopy enables access to the energy scale of soft excitations in matter. These excitations such as magnons and phonons drive the collective phenomena seen in correlated electronic materials such as high temperature superconductors. RIXS opens a new path to study these excitations at a level of detail not formerly possible. However, as the process involves resonant excitation at an energy of around 1 keV, and the energy scale of the excitations one would like to see are at the meV level, to fully utilize the technique requires the development of monochromators and spectrometers with one to two orders of magnitude higher energy resolution than has been conventionally possible. Here we investigate the detailed diffraction characteristics of multilayer blazed gratings. These elements offer potentially revolutionary performance as the dispersive element in ultra-high resolution x-ray spectroscopy. In doing so, we have established a roadmap for the complete optimization of the grating design. Traditionally 1st order gratings are used in the soft x-ray region, but we show that as in the optical domain, one can work in very high spectral orders and thus dramatically improve resolution without significant loss in efficiency.

Research Organization:
Argonne National Lab. (ANL), Argonne, IL (United States); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE
Grant/Contract Number:
AC02-05CH11231; AC02-06CH11357
OSTI ID:
1219409
Journal Information:
Optics Express, Vol. 23, Issue 4; ISSN 1094-4087
Publisher:
Optical Society of America (OSA)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 23 works
Citation information provided by
Web of Science

References (30)

X-ray and far uv multilayer mirrors: principles and possibilities journal January 1977
Multilayer‐coated echelle gratings for soft x rays and extreme ultraviolet journal February 1995
A Soft X-ray Spectrometer using a Highly Dispersive Multilayer Grating
  • Warwick, Tony; Padmore, Howard; Voronov, Dmitriy
  • SRI 2009, 10TH INTERNATIONAL CONFERENCE ON RADIATION INSTRUMENTATION, AIP Conference Proceedings https://doi.org/10.1063/1.3463327
conference January 2010
Ultra-high efficiency multilayer blazed gratings through deposition kinetic control journal January 2012
Multilayer coated gratings for x-ray diffraction: differential theory journal January 1991
Application of the boundary integral equation method to very small wavelength-to-period diffraction problems journal November 2010
Analytic theory of soft x-ray diffraction by lamellar multilayer gratings journal January 2011
Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating journal January 2004
High throughput and resolution compact spectrograph for the 124–250 Å range based on MoSi2-Si sliced multilayer grating journal June 1994
Application of the rigorous method to x-ray and neutron beam scattering on rough surfaces journal August 2010
Improved resolution for soft-x-ray monochromatization using lamellar multilayer gratings conference September 2011
Soft x-ray multilayer coated echelle gratings: electromagnetic and phenomenological study journal January 1996
Fabrication of 200nm period blazed transmission gratings on silicon-on-insulator wafers
  • Ahn, Minseung; Heilmann, Ralf K.; Schattenburg, Mark L.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 6 https://doi.org/10.1116/1.2968613
journal November 2008
Development of an ultrahigh-resolution diffraction grating for soft x-rays conference September 2007
Numerical analysis of the efficiency of multilayer-coated gratings using integral method journal January 2005
Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands journal January 2011
Nonlinear continuum growth model of multiscale reliefs as applied to rigorous analysis of multilayer short-wave scattering intensity. I. Gratings journal June 2013
Lamellar multilayer gratings with very high diffraction efficiency conference November 1997
High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region journal January 2008
Multilayer-coated blazed grating performance in the soft x-ray region journal January 1989
A multiplexed high-resolution imaging spectrometer for resonant inelastic soft X-ray scattering spectroscopy journal June 2014
Some recent theorical results for gratings; Application to their use in the very far ultraviolet region journal May 1976
X-Ray Bragg Diffraction in Asymmetric Backscattering Geometry journal December 2006
A 10,000 groove/mm multilayer coated grating for EUV spectroscopy journal January 2011
Optical demultiplexer using a silicon echelette grating journal February 1980
Wavelength demultiplexer: using echelette gratings on silicon substrate journal January 1985
High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths journal January 2010
Enhancement of diffraction efficiency via higher-order operation of a multilayer blazed grating journal January 2014
Solving conical diffraction grating problems with integral equations journal January 2010
Optical properties of sliced multilayer gratings journal September 2002

Cited By (5)

X-ray spectroscopy with variable line spacing based on reflection zone plate optics journal January 2018
Breaking the efficiency limit for high-frequency blazed multilayer soft x-ray gratings: Conical vs classical diffraction journal September 2016
Theoretical analysis and optimization of highly efficient multilayer-coated blazed gratings with high fix-focus constant for the tender X-ray region journal January 2020
High-efficiency X-ray multilayer-coated blazed gratings with shifted boundaries journal July 2019
X-ray spectroscopy with variable line spacing based on reflection zone plate optics text January 2018