Method of monitoring photoactive organic molecules in-situ during gas-phase deposition of the photoactive organic molecules
A method for in-situ monitoring of gas-phase photoactive organic molecules in real time while depositing a film of the photoactive organic molecules on a substrate in a processing chamber for depositing the film includes irradiating the gas-phase photoactive organic molecules in the processing chamber with a radiation from a radiation source in-situ while depositing the film of the one or more organic materials and measuring the intensity of the resulting photoluminescence emission from the organic material. One or more processing parameters associated with the deposition process can be determined from the photoluminescence intensity data in real time providing useful feedback on the deposition process.
- Research Organization:
- Univ. of Michigan, Ann Arbor, MI (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- SC0005310
- Assignee:
- The Regents of the University of Michigan (Ann Arbor, MI)
- Patent Number(s):
- 9,062,368
- Application Number:
- 13/652,593
- OSTI ID:
- 1185298
- Resource Relation:
- Patent File Date: 2012 Oct 16
- Country of Publication:
- United States
- Language:
- English
Similar Records
In situ analysis of thin film deposition processes using time-of-flight (TOF) ion beam analysis methods
In-Situ Sensors for Process Control of CuIn(Ga)Se2 Module Deposition; Annual Technical Report, 15 February 1998-15 February 1999