Nanofabrication

Tuominen, Mark; Bal, Mustafa; Russell, Thomas P.; Ursache, Andrei

Title: Nanofabrication

Patent · Tue Mar 13 00:00:00 EDT 2007

OSTI ID:1176141

Tuominen, Mark; Bal, Mustafa; Russell, Thomas P.; Ursache, Andrei

Pathways to rapid and reliable fabrication of three-dimensional nanostructures are provided. Simple methods are described for the production of well-ordered, multilevel nanostructures. This is accomplished by patterning block copolymer templates with selective exposure to a radiation source. The resulting multi-scale lithographic template can be treated with post-fabrication steps to produce multilevel, three-dimensional, integrated nanoscale media, devices, and systems.

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Research Organization:: Univ. of Massachusetts, Amherst, MA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-96ERA45612; DMR-9809365; CTS-9871782

Assignee:: University of Massachusetts (Boston, MA)

Patent Number(s):: 7,189,435

Application Number:: 10/098,222

OSTI ID:: 1176141

Resource Relation:: Patent File Date: 2002 Mar 14

Country of Publication:: United States

Language:: English

References (23)

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