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Title: Sealed, nozzle-mix burners for silica deposition

Patent ·
OSTI ID:1174386

Burners (40) for producing fused silica boules are provided. The burners employ a tube-in-tube (301-306) design with flats (56, 50) on some of the tubes (305, 301) being used to limit the cross-sectional area of certain passages (206, 202) within the burner and/or to atomize a silicon-containing, liquid source material, such as OMCTS. To avoid the possibility of flashback, the burner has separate passages for fuel (205) and oxygen (204, 206), i.e., the burner employs nozzle mixing, rather than premixing, of the fuel and oxygen. The burners are installed in burner holes (26) formed in the crown (20) of a furnace and form a seal with those holes so that ambient air cannot be entrained into the furnace through the holes. An external air cooled jacket (60) can be used to hold the temperature of the burner below a prescribed upper limit, e.g., 400.degree. C.

Research Organization:
Corning Incorporated, Corning, NY (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
W-7405-ENG-48
Assignee:
Corning Incorporated (Corning, NY)
Patent Number(s):
6,588,230
Application Number:
09/364,149
OSTI ID:
1174386
Country of Publication:
United States
Language:
English

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