Thin film application device and method for coating small aperture vacuum vessels

Walters, Dean R; Este, Grantley O

Title: Thin film application device and method for coating small aperture vacuum vessels

Patent · Tue Jan 27 00:00:00 EST 2015

OSTI ID:1168692

Walters, Dean R; Este, Grantley O

A device and method for coating an inside surface of a vessel is provided. In one embodiment, a coating device comprises a power supply and a diode in electrical communication with the power supply, wherein electrodes comprising the diode reside completely within the vessel. The method comprises reversibly sealing electrodes in a vessel, sputtering elemental metal or metal compound on the surface while maintaining the surface in a controlled atmosphere.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE

Assignee:: Uchicago Argonne, LLC (Chicago, IL)

Patent Number(s):: 8,940,140

Application Number:: 11/850,409

OSTI ID:: 1168692

Country of Publication:: United States

Language:: English

References (8)

Glow discharge method and apparatus Penfold, Alan S.; Thornton, John A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4132613 US Patent Document 4,132,613	patent	January 1979
Cathodic sputtering target including means for detecting target piercing Zega, Bogdan https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4374722 US Patent Document 4,374,722	patent	February 1983
Cylindrical cathode for magnetically-enhanced sputtering Zega, Bogdan https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4376025 US Patent Document 4,376,025	patent	March 1983
Method and apparatus for linear magnetron sputtering Marshall, John R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5298137 US Patent Document 5,298,137	patent	March 1994
Vacuum arc deposition apparatus Tamagaki, Hiroshi; Kawaguchi, Hiroshi; Fujii, Hirofumi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5744017 US Patent Document 5,744,017	patent	April 1998
Sputtering system using cylindrical rotating magnetron electrically powered using alternating current Lehan, John; Byorum, Henry; Hill, Russell J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5814195 US Patent Document 5,814,195	patent	September 1998
Method and apparatus for magnetron sputtering Tzatzov, Konstantin K.; Gorodetsky, Alexander S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6436252 US Patent Document 6,436,252	patent	August 2002
Method and apparatus of plasma-enhanced coaxial magnetron for sputter-coating interior surfaces Wei, Ronghua https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6767436 US Patent Document 6,767,436	patent	July 2004

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Title: Thin film application device and method for coating small aperture vacuum vessels

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