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Title: Resonant-frequency discharge in a multi-cell radio frequency cavity

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.4900994· OSTI ID:1166946

We are reporting experimental results on microwave discharge operating at resonant frequency in a multi-cell radio frequency (RF) accelerator cavity. Although the discharge operated at room temperature, the setup was constructed so that it could be used for plasma generation and processing in fully assembled active superconducting radio-frequency (SRF) cryomodule (in situ operation). This discharge offers an efficient mechanism for removal of a variety of contaminants, organic or oxide layers, and residual particulates from the interior surface of RF cavities through the interaction of plasma-generated radicals with the cavity walls. We describe resonant RF breakdown conditions and address the problems related to generation and sustaining the multi-cell cavity plasma, which are breakdown and resonant detuning. We have determined breakdown conditions in the cavity, which was acting as a plasma vessel with distorted cylindrical geometry. We discuss the spectroscopic data taken during plasma removal of contaminants and use them to evaluate plasma parameters, characterize the process, and estimate the volatile contaminant product removal.

Research Organization:
Thomas Jefferson National Accelerator Facility (TJNAF), Newport News, VA (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
DOE Contract Number:
AC05-06OR23177
OSTI ID:
1166946
Report Number(s):
JLAB-ACC-13-1845; DOE/OR/23177-3140; JAPIAU
Journal Information:
Journal of Applied Physics, Vol. 116, Issue 17; ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English

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