Telescopic nanotube device for hot nanolithography

Patent · Tue Dec 30 00:00:00 EST 2014

OSTI ID:1166765

Popescu, Adrian; Woods, Lilia M

A device for maintaining a constant tip-surface distance for producing nanolithography patterns on a surface using a telescopic nanotube for hot nanolithography. An outer nanotube is attached to an AFM cantilever opposite a support end. An inner nanotube is telescopically disposed within the outer nanotube. The tip of the inner nanotube is heated to a sufficiently high temperature and brought in the vicinity of the surface. Heat is transmitted to the surface for thermal imprinting. Because the inner tube moves telescopically along the outer nanotube axis, a tip-surface distance is maintained constant due to the vdW force interaction, which in turn eliminates the need of an active feedback loop.

• Research Organization: Univ. of South Florida, Tampa, FL (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: FG02-06ER46297
• Assignee: University of South Florida (Tampa, FL)
• Patent Number(s): 8,920,700
• Application Number: 13/023,782
• OSTI ID: 1166765
• Resource Relation: Patent File Date: 2011 Feb 09
• Country of Publication: United States
• Language: English

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY