Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere

Allendorf, Mark D; Robinson, Alex L

Title: Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere

Patent · Tue Dec 09 00:00:00 EST 2014

OSTI ID:1165139

Allendorf, Mark D; Robinson, Alex L

We have demonstrated that a surface acoustic wave (SAW) sensor coated with a nanoporous framework material (NFM) film can perform ultrasensitive water vapor detection at concentrations in air from 0.05 to 12,000 ppmv at 1 atmosphere pressure. The method is extendable to other MEMS-based sensors, such as microcantilevers, or to quartz crystal microbalance sensors. We identify a specific NFM that provides high sensitivity and selectivity to water vapor. However, our approach is generalizable to detection of other species using NFM to provide sensitivity and selectivity.

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Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-94AL85000

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Number(s):: 8,904,850

Application Number:: 13/253,274

OSTI ID:: 1165139

Resource Relation:: Patent File Date: 2011 Oct 05

Country of Publication:: United States

Language:: English

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Tunable electrical conductivity in metal-organic framework thin film devices Talin, Albert Alec; Allendorf, Mark D.; Stavila, Vitalie https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9346831 US Patent Document 9,346,831	patent	May 2016
Devices and methods to detect and quantify trace gases Allendorf, Mark D.; Robinson, Alex https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9329154 US Patent Document 9,329,154	patent	May 2016
Passive absolute age and temperature history sensor Robinson, Alex; Vianco, Paul T. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9182436 US Patent Document 9,182,436	patent	November 2015

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