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Title: A broader view on EUV-masks: adding complementary imaging modes to the SHARP microscope

Abstract

The authors are expanding the capabilities of the SHARP microscope by implementing complementary imaging modes. SHARP (the SEMATECH High-NA Actinic Reticle review Project) is an actinic, synchrotron-based microscope dedicated to extreme ultraviolet (EUV) photomask research. SHARP’s programmable Fourier Synthesis Illuminator and its use of Fresnel zoneplate lenses as imaging optics provide a versatile framework, facilitating the implementation of diverse modes beyond conventional imaging. In addition to SHARP’s set of standard zoneplates, we have created more than 100 zoneplates for complementary imaging modes, all designed to extract additional information from photomasks, improve navigation and enhance defect detection. More than 50 new zoneplates are installed in the tool; the remaining lenses are currently in production. Here in this paper we discuss the design and fabrication of zoneplates for complementary imaging modes and present image data, obtained using Zernike Phase Contrast and different implementations of Differential Interference Contrast.

Authors:
 [1];  [1];  [1];  [2];  [1];  [1];  [1];  [1]
  1. Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
  2. University of California, Berkeley, CA (United States)
Publication Date:
Research Org.:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1163231
Report Number(s):
LBNL-6805E
Journal ID: ISSN 0277-786X
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Proceedings of SPIE - The International Society for Optical Engineering
Additional Journal Information:
Journal Volume: 9235; Journal ID: ISSN 0277-786X
Publisher:
SPIE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; mask; photomask; EUV; mask imaging; aerial image; zoneplate; zernike phase contrast; differential interference contrast

Citation Formats

Benk, Markus P., Miyakawa, Ryan H., Chao, Weilun, Wang, Yow-Gwo, Wojdyla, Antoine, Johnson, David G., Donoghue, Alexander P., and Goldberg, Kenneth A. A broader view on EUV-masks: adding complementary imaging modes to the SHARP microscope. United States: N. p., 2014. Web. doi:10.1117/12.2065513.
Benk, Markus P., Miyakawa, Ryan H., Chao, Weilun, Wang, Yow-Gwo, Wojdyla, Antoine, Johnson, David G., Donoghue, Alexander P., & Goldberg, Kenneth A. A broader view on EUV-masks: adding complementary imaging modes to the SHARP microscope. United States. https://doi.org/10.1117/12.2065513
Benk, Markus P., Miyakawa, Ryan H., Chao, Weilun, Wang, Yow-Gwo, Wojdyla, Antoine, Johnson, David G., Donoghue, Alexander P., and Goldberg, Kenneth A. 2014. "A broader view on EUV-masks: adding complementary imaging modes to the SHARP microscope". United States. https://doi.org/10.1117/12.2065513. https://www.osti.gov/servlets/purl/1163231.
@article{osti_1163231,
title = {A broader view on EUV-masks: adding complementary imaging modes to the SHARP microscope},
author = {Benk, Markus P. and Miyakawa, Ryan H. and Chao, Weilun and Wang, Yow-Gwo and Wojdyla, Antoine and Johnson, David G. and Donoghue, Alexander P. and Goldberg, Kenneth A.},
abstractNote = {The authors are expanding the capabilities of the SHARP microscope by implementing complementary imaging modes. SHARP (the SEMATECH High-NA Actinic Reticle review Project) is an actinic, synchrotron-based microscope dedicated to extreme ultraviolet (EUV) photomask research. SHARP’s programmable Fourier Synthesis Illuminator and its use of Fresnel zoneplate lenses as imaging optics provide a versatile framework, facilitating the implementation of diverse modes beyond conventional imaging. In addition to SHARP’s set of standard zoneplates, we have created more than 100 zoneplates for complementary imaging modes, all designed to extract additional information from photomasks, improve navigation and enhance defect detection. More than 50 new zoneplates are installed in the tool; the remaining lenses are currently in production. Here in this paper we discuss the design and fabrication of zoneplates for complementary imaging modes and present image data, obtained using Zernike Phase Contrast and different implementations of Differential Interference Contrast.},
doi = {10.1117/12.2065513},
url = {https://www.osti.gov/biblio/1163231}, journal = {Proceedings of SPIE - The International Society for Optical Engineering},
issn = {0277-786X},
number = ,
volume = 9235,
place = {United States},
year = {Wed Oct 08 00:00:00 EDT 2014},
month = {Wed Oct 08 00:00:00 EDT 2014}
}

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Works referenced in this record:

Fourier-synthesis custom-coherence illuminator for extreme ultraviolet microfield lithography
journal, January 2003


Image processing with the radial Hilbert transform: theory and experiments
journal, January 2000


Differential interference contrast x-ray microscopy with twin zone plates
journal, April 2002


Phase contrast soft x-ray microscopy using Zernike zone plates
journal, January 2008


Soft-x-ray microscopy using spiral zone plates
journal, January 2007


Single-element objective lens for soft x-ray differential interference contrast microscopy
journal, January 2006


Phase contrast studies of biological specimens with the x-ray microscope at BESSY (invited)
journal, February 1995