POST-CMOS COMPATIBLE ALUMINUM NITRIDE RING WAVE GUIDE (RWG) RESONATORS.
Conference
·
OSTI ID:1146402
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1146402
- Report Number(s):
- SAND2008-1614C; 520027
- Resource Relation:
- Conference: Proposed for presentation at the Solid-State Sensor, Actuator, and Microsystems Workshop held June 1-5, 2008 in Hilton Head Island, SC.
- Country of Publication:
- United States
- Language:
- English
Similar Records
Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.
Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.
Post-CMOS Compatible Aluminum Nitride Resonant MEMS Accelerometers.
Conference
·
Tue May 01 00:00:00 EDT 2007
·
OSTI ID:1146402
+1 more
Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.
Conference
·
Fri Jun 01 00:00:00 EDT 2007
·
OSTI ID:1146402
+1 more
Post-CMOS Compatible Aluminum Nitride Resonant MEMS Accelerometers.
Journal Article
·
Fri Aug 01 00:00:00 EDT 2008
· Post-CMOS Compatible Aluminum Nitride Resonant MEMS Accelerometers
·
OSTI ID:1146402
+1 more