Using Casimir and capillary forces to model adhesion of MEMS cantilevers.

Conference · Sat Aug 01 00:00:00 EDT 2009

OSTI ID:1142226

de Boer, Maarten P; Del Rio, Frank W.

Abstract not provided.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1142226
• Report Number(s): SAND2009-5004C; 507907
• Resource Relation: Conference: Proposed for presentation at the Seminar at Casimir Workshop held August 10-11, 2009 in New Haven, CT.
• Country of Publication: United States
• Language: English