Pre-Photolithographic GaAs Surface Treatment for Improved Photoresist Adhesion During Wet Chemical Etching and Improved Wet Etch Profiles.
Conference
·
OSTI ID:1124405
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1124405
- Report Number(s):
- SAND2010-0767C; 493171
- Resource Relation:
- Conference: Proposed for presentation at the Compound Semiconductor Manufacturing and Technology Conference held May 17-20, 2010 in Portland, OR.
- Country of Publication:
- United States
- Language:
- English
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