THERMAL CONDUCTIVITY MANIPULATION IN SINGLE CRYSTAL SILICON VIA LITHOGRAPHYCALLY DEFINED PHONONIC CRYSTALS.
Conference
·
OSTI ID:1118476
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1118476
- Report Number(s):
- SAND2011-8984C; 481593
- Resource Relation:
- Conference: Proposed for presentation at the The 25th International Conference on Micro Electro Mechanical Systems (MEMS 2012) held January 29 - February 2, 2012 in Paris, France.
- Country of Publication:
- United States
- Language:
- English
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