Formation of Nanoscale Structures by Inductively Coupled Plasma Etching.
Conference
·
OSTI ID:1116140
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1116140
- Report Number(s):
- SAND2012-9887C; 480229
- Resource Relation:
- Conference: Proposed for presentation at the SPIE Optics and Optoelectroncis held April 15-18, 2013 in Prague, Czech Repulblic.
- Country of Publication:
- United States
- Language:
- English
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