skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Light source employing laser-produced plasma

Patent ·
OSTI ID:1093377

A system and a method of generating radiation and/or particle emissions are disclosed. In at least some embodiments, the system includes at least one laser source that generates a first pulse and a second pulse in temporal succession, and a target, where the target (or at least a portion the target) becomes a plasma upon being exposed to the first pulse. The plasma expand after the exposure to the first pulse, the expanded plasma is then exposed to the second pulse, and at least one of a radiation emission and a particle emission occurs after the exposure to the second pulse. In at least some embodiments, the target is a solid piece of material, and/or a time period between the first and second pulses is less than 1 microsecond (e.g., 840 ns).

Research Organization:
Univ. of California, Oakland, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG03-99ER54547
Assignee:
The Regents of the University of California (Oakland, CA)
Patent Number(s):
8,536,549
Application Number:
12/296,707
OSTI ID:
1093377
Country of Publication:
United States
Language:
English

References (23)

Enhancement of extreme ultraviolet emission from a CO2 laser-produced Sn plasma using a cavity target journal December 2007
Dynamics of laser-produced Sn-based plasmas for a monochromatic 13.5 nm extreme ultraviolet source conference September 2007
Extreme ultraviolet light sources for use in semiconductor lithography—state of the art and future development journal November 2004
Characterization of extreme ultraviolet emission from laser-produced spherical tin plasma generated with multiple laser beams journal January 2005
Characterization of density profile of laser-produced Sn plasma for 13.5nm extreme ultraviolet source journal May 2005
Efficient extreme ultraviolet plasma source generated by a CO2 laser and a liquid xenon microjet target journal May 2007
Opacity Effect on Extreme Ultraviolet Radiation from Laser-Produced Tin Plasmas journal November 2005
Soft x-ray light source device patent January 2002
Comparative study on emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced tin plasmas journal July 2005
Condenser for photolithography system patent March 2004
Optimizing 13.5nm laser-produced tin plasma emission as a function of laser wavelength journal April 2007
Mass-limited Sn target irradiated by dual laser pulses for an extreme ultraviolet lithography source journal January 2007
Method and arrangement for producing radiation patent July 2007
CO 2 laser-produced Sn plasma as the solution for high-volume manufacturing EUV lithography conference September 2007
Extreme ultraviolet lithography: overview and development status journal January 2005
High repetition rate laser produced plasma EUV light source patent April 2008
High conversion efficiency mass-limited Sn-based laser plasma source for extreme ultraviolet lithography
  • Richardson, M.; Koay, C. -S.; Takenoshita, K.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 22, Issue 2 https://doi.org/10.1116/1.1667511
journal January 2004
Proximity printing using extreme ultraviolet radiation conference April 2008
LPP EUV source development for HVM conference March 2007
Density and temperature profiles in strongly absorbing plasma with distributed absorption journal May 1991
Laser-produced plasma EUV light source with pre-pulse enhancement patent December 2005
Extreme-ultraviolet spectral purity and magnetic ion debris mitigation by use of low-density tin targets journal January 2006
Mitigation of fast ions from laser-produced Sn plasma for an extreme ultraviolet lithography source journal September 2006

Similar Records

Self-proton/ion radiography of laser-produced proton/ion beam from thin foil targets
Journal Article · Sat Dec 15 00:00:00 EST 2012 · Physics of Plasmas · OSTI ID:1093377

Laser plasma plume structure and dynamics in the ambient air: The early stage of expansion
Journal Article · Sun May 15 00:00:00 EDT 2011 · Journal of Applied Physics · OSTI ID:1093377

Nonlinear processes in laser-produced dense plasma (observation of the fractional harmonics)
Miscellaneous · Fri Jan 01 00:00:00 EST 1988 · OSTI ID:1093377

Related Subjects