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Title: Method for reuse of wafers for growth of vertically-aligned wire arrays

Patent ·
OSTI ID:1084359

Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.

Research Organization:
California Institute of Technology (CalTech), Pasadena, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-03ER15483
Assignee:
California Institute of Technology (Pasadena, CA)
Patent Number(s):
8,455,333
Application Number:
13/550,395
OSTI ID:
1084359
Country of Publication:
United States
Language:
English

References (118)

Semiconductor Nanowires: From Self-Organization to Patterned Growth journal April 2006
Epitaxial core–shell and core–multishell nanowire heterostructures journal November 2002
Impurities in silicon solar cells journal April 1980
Experimental Observation of an Extremely Dark Material Made By a Low-Density Nanotube Array journal January 2008
High‐efficiency electrodeposited cadmium telluride solar cells journal February 1982
High Density Germanium Nanowire Assemblies:  Contact Challenges and Electrical Characterization journal January 2006
Highly Anisotropic Crystals book January 1987
Si nanowires synthesized with Cu catalyst journal January 2007
Comparison of the device physics principles of planar and radial p-n junction nanorod solar cells journal June 2005
Impurity effects in silicon for high efficiency solar cells journal May 1986
High efficiency inorganic nanorod-enhanced photovoltaic devices patent-application September 2006
Photoelectric conversion device and method of production thereof patent November 2003
Nanowire light emitting device and method of fabricating the same patent-application October 2005
Systems and Methods for Nanowire Growth patent-application May 2009
Macroporous Silicon as a Model for Silicon Wire Array Solar Cells journal April 2008
Controlled Growth of Si Nanowire Arrays for Device Integration journal March 2005
Silicon nanowire solar cells journal December 2007
Electrochemical fabrication of cadmium chalcogenide microdiode arrays journal July 1993
Nanowire dye-sensitized solar cells journal May 2005
Electrodeposition of CdTe Thin Films journal January 1984
Use of sacrificial layers in the manufacture of high performance systems on tailored substrates patent December 2007
Computer-Assisted Web Services Access Application Program Generation patent-application June 2008
Structures of and Methods for Forming Vertically Aligned Si Wire Arrays patent-application January 2009
"Ideal" behavior of the open circuit voltage of semiconductor/liquid junctions journal May 1989
Growth of vertically aligned Si wire arrays over large areas (>1cm2) with Au and Cu catalysts journal September 2007
Controlled partial embedding of carbon nanotubes within flexible transparent layers journal December 2007
A study on deep etching of silicon using ethylene-diamine-pyrocatechol-water journal July 1986
Semiconductor Nanowire Array: Potential Substrates for Photocatalysis and Photovoltaics journal January 2002
Thermal interface material with carbon nanotubes patent August 2007
Aligned Single-Crystalline Si Nanowire Arrays for Photovoltaic Applications journal September 2005
Silicon Nanowire Array Photoelectrochemical Cells
  • Goodey, Adrian P.; Eichfeld, Sarah M.; Lew, Kok-Keong
  • Journal of the American Chemical Society, Vol. 129, Issue 41, p. 12344-12345 https://doi.org/10.1021/ja073125d
journal September 2007
Kinetic studies of carrier transport and recombination at the n-silicon methanol interface journal August 1986
630‐mV open circuit voltage, 12% efficient n ‐Si liquid junction journal August 1984
Rare Earth Elements—Critical Resources for High Technology report November 2002
Fabrication of Large-Area Silicon Nanowire p–n Junction Diode Arrays journal January 2004
Flexible energy storage devices based on nanocomposite paper journal August 2007
Nanofiber surface based capacitors patent October 2006
Semiconducting Cadmium Telluride journal December 1954
Semiconductors for Photoelectrolysis journal August 1978
Nanofiber surface based capacitors patent June 2006
Electrochemical Fabrication of CdS Nanowire Arrays in Porous Anodic Aluminum Oxide Templates journal January 1996
Solvent Compatibility of Poly(dimethylsiloxane)-Based Microfluidic Devices journal October 2003
Fabrication of individually seeded nanowire arrays by vapour–liquid–solid growth journal October 2003
Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells journal February 2008
Control of the Size and Position of Silicon Nanowires Grown via the Vapor-Liquid-Solid Technique journal October 1997
Controlled nanowire growth in permanent, integrated nano-templates and methods of fabricating sensor and transducer structures patent July 2007
Polymer-Embedded Semiconductor Rod Arrays patent-application March 2009
Method of making silicon quantum wires on a substrate patent November 1999
Well-ordered ZnO nanowire arrays on GaN substrate fabricated via nanosphere lithography journal January 2006
Amorphous-crystalline tandem nanostructured solar cells patent-application May 2008
Nanowire vias patent-application December 2008
Fabrication of Silicon Nanowire Arrays with Controlled Diameter, Length, and Density journal March 2007
SEMICONDUCTOR NANOWIRES AND NANOTUBES journal August 2004
A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires journal January 1998
Method for the controlled growth of crystal whiskers and application thereof to the making of tip microcathodes patent May 1994
Light-induced generation of hydrogen at CdS-monograin membranes journal March 1983
Silicon Nanowires:  Preparation, Device Fabrication, and Transport Properties journal December 2000
Effects of Interfacial Energetics on the Effective Surface Recombination Velocity of Si/Liquid Contacts journal March 2002
Synthesis of Molybdenum Nanowires with Millimeter-Scale Lengths Using Electrochemical Step Edge Decoration journal June 2002
Methods of fabricating nanostructures and nanowires and devices fabricated therefrom patent-application November 2002
Embedded Carbon-Nanotube-Stiffened Polymer Surfaces journal January 2005
Vapor-liquid-solid mechanism of single crystal growth journal March 1964
A review of some charge transport properties of silicon journal February 1977
One-Dimensional Nanostructures: Synthesis, Characterization, and Applications journal March 2003
Nanostructured imaging transfer element patent October 1994
Method of making an enhanced optical absorption and radiation tolerance in thin-film solar cells and photodetectors patent September 2006
Silicon optoelectronic device using silicon nanowire and method for preparing the same patent-application November 2005
Properties of gold in silicon journal February 1966
n-Type silicon photoelectrochemistry in methanol: Design of a 10.1% efficient semiconductor/liquid junction solar cell journal February 1983
Nanoimprint Lithography: Methods and Material Requirements journal February 2007
Solubility and Diffusivity of Gold, Iron, and Copper in Silicon journal December 1956
Nanostructure Arrays and Methods for Forming Same patent-application April 2008
Multilayered Film-Nanowire Composite, Bifacial, and Tandem Solar Cells patent-application July 2008
Fabrication and properties of ultrasmall Si wire arrays with circuits by vapor–liquid–solid growth journal April 2002
Strong broadband optical absorption in silicon nanowire films journal July 2007
Optoelectronic devices utilizing materials having enhanced electronic transitions patent-application December 2007
Growth of single crystal nanowires patent February 2008
Stretchable and Foldable Silicon Integrated Circuits journal April 2008
Controlled growth of highly uniform, axial/radial direction-defined, individually addressable InP nanowire arrays journal October 2005
Nanowire horizontal growth and substrate removal patent July 2009
Systems and methods for nanowire growth and harvesting patent September 2006
Photovoltaic Wire patent-application October 2009
Vertically Oriented Germanium Nanowires Grown from Gold Colloids on Silicon Substrates and Subsequent Gold Removal journal June 2007
Spectroscopic ellipsometry investigation of optical and interface properties of CdTe films deposited on metal foils journal May 2004
Poly(dimethylsiloxane) as a Material for Fabricating Microfluidic Devices journal April 2002
Composite article comprising oriented microstructures patent August 1994
Synthesis of High Density, Size-Controlled Si Nanowire Arrays via Porous Anodic Alumina Mask journal January 2006
Synthesis of stoichiometric cadmium selenide films via sequential monolayer electrodeposition journal November 1991
Method of synthesizing silicon wires patent-application July 2007
Electrical Characteristics and Chemical Stability of Non-Oxidized, Methyl-Terminated Silicon Nanowires journal June 2006
High‐efficiency electroplated heterojunction solar cell journal January 1984
Photovoltaic Device Using Nanostructured Material patent-application February 2009
Large-area blown bubble films of aligned nanowires and carbon nanotubes journal May 2007
Hybrid solar cells with vertically aligned CdTe nanorods and a conjugated polymer journal March 2005
Quantitative Measurement of the Electron and Hole Mobility−Lifetime Products in Semiconductor Nanowires journal April 2006
Synthesis of Vertical High-Density Epitaxial Si(100) Nanowire Arrays on a Si(100) Substrate Using an Anodic Aluminum Oxide Template journal April 2007
Nanochannel apparatus and method of fabricating patent-application May 2007
Nanowires in thin-film silicon solar cells patent-application February 2008
Diameter-Controlled Synthesis of Silicon Nanowires Using Nanoporous Alumina Membranes journal January 2005
Microwave assisted patterning of vertically aligned carbon nanotubes onto polymer substrates
  • Sunden, Erik; Moon, Jack K.; Wong, C. P.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 4, p. 1947-1950 https://doi.org/10.1116/1.2221320
journal January 2006
Structures of Ordered Arrays of Semiconductors patent-application January 2009
Biomimetic Assembly of Zinc Oxide Nanorods onto Flexible Polymers journal October 2007
Method for producing catalyst-free single crystal silicon nanowires, nanowires produced by the method and nanodevice comprising the nanowires patent-application June 2009
Efficient photoinduced charge transfer in TiO2 nanorod/conjugated polymer hybrid materials journal November 2006
Hybrid Nanorod-Polymer Solar Cells journal March 2002
Photoconverters based on silicon-crystal whiskers journal April 1978
Diameter-Dependent Growth Direction of Epitaxial Silicon Nanowires journal April 2005
Cadmium Telluride Solar Cells book April 2003
Thermal interface material and method for manufacturing same patent-application June 2006
Method and apparatus for growing oriented whisker arrays patent October 2001
Aligned Carbon Nanotube−Polymer Hybrid Architectures for Diverse Flexible Electronic Applications journal February 2006
Fabrication of densely packed, well-ordered, high-aspect-ratio silicon nanopillars over large areas using block copolymer lithography journal August 2006
Nanostructure-reinforced composite articles and methods patent-application March 2008
High Aspect Ratio Silicon Wire Array Photoelectrochemical Cells
  • Maiolo, James R.; Kayes, Brendan M.; Filler, Michael A.
  • Journal of the American Chemical Society, Vol. 129, Issue 41, p. 12346-12347 https://doi.org/10.1021/ja074897c
journal October 2007
Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices patent February 2010
A 14% efficient nonaqueous semiconductor/liquid junction solar cell journal November 1984
Systems and methods for nanowire growth and manufacturing patent-application December 2005
New Facets of CdTe Electrodeposition in Acidic Solutions with Higher Tellurium Concentrations journal January 2004